Claims
- 1. A belt for polishing a workpiece in a chemical mechanical polishing system, the belt comprising:a single polymeric layer with no supplementary reinforcing or supporting components, the single polymeric layer forming an endless loop sized to fit the chemical mechanical polishing system, the single polymeric layer having a polishing surface formed on a polishing side of the polymeric layer.
- 2. The belt of claim 1 wherein the single polymeric layer comprises polyurethane.
- 3. The belt of claim 1 wherein the polishing surface comprises groves formed in the polishing surface.
- 4. The belt of claim 1 wherein the belt comprises one or more viewing holes formed in the belt to expose a portion of the workpiece during polishing.
- 5. The belt of claim 1 wherein the belt further comprises a second layer which is directly cast onto an inside of the polymeric layer.
- 6. The belt of claim 1 wherein the belt is fabricated by hot cast molding of a single, substantially uniform layer of microcellular urethane.
- 7. A chemical mechanical polishing system for polishing a workpiece, the system comprising:an endless loop polishing belt with no supplementary reinforcing or supporting components, formed of a single layer of polymeric material having a polishing surface on one side; and transport means for moving the continuous loop belt past the workpiece.
- 8. A belt for polishing a workpiece in a chemical mechanical polishing system, the belt comprising:a single, polymeric layer hot-cast molded of a single, substantially uniform layer of polymeric material to form an endless loop sized to fit the chemical mechanical polishing system, the belt having no supplementary reinforcing or supporting components; and a polishing surface on a polishing side of the endless loop.
- 9. The belt of claim 8 further comprising:one or more viewing holes formed in the belt to expose a portion of the workpiece during polishing.
- 10. The belt of claim 8 wherein the polishing surface comprises:grooves formed in the polishing surface.
- 11. The belt of claim 8 wherein the polymeric material comprises microcellular urethane.
Parent Case Info
This is a continuation of application Ser. No. 09/386,741, filed Aug. 31, 1999, now U.S. Pat. No. 6,406,363 B1, which application is incorporated herein in its entirety by this reference.
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
6135859 |
Tietz |
Oct 2000 |
A |
6155910 |
Lamphere et al. |
Dec 2000 |
A |
6406363 |
Xu et al. |
Jun 2002 |
B1 |
Continuations (1)
|
Number |
Date |
Country |
Parent |
09/386741 |
Aug 1999 |
US |
Child |
10/036624 |
|
US |