Claims
- 1. A method for washing/drying a material having a surface, comprising the steps of:
- (a) a first washing step wherein the material is washed in an aqueous solution containing a surfactant having a water repellency;
- (b) concurrently with step (a), applying sonication to the solution to remove contamination from the surface of the material;
- (c) allowing at least one molecular layer of surfactant to form on the surface of the material during the first washing step;
- (d) a second washing step wherein the material is rinsed with pure water; and
- (e) drying the material.
- 2. The method as recited in claim 1, wherein the concentration of the surfactant in the aqueous solution is in the rage of 150 ppm to 5000 ppm.
- 3. The method as recited in claim 2, wherein a concentration of the surfactant in the aqueous solution is in the range of 450 to 3000 ppm.
- 4. The method as recited in claim 2, wherein the aqueous solution has a temperature of less than 100.degree. C.
- 5. The method as recited in claim 1, wherein the surfactant is selected from the group consisting of hydrocarbon surfactants having a C.sub.12 -C.sub.8 hydrophobic alkyl group, fluorine surfactants having a C.sub.6 -C.sub.12 fluorinated alkyl group, and hydrophobic silicon surfactants.
- 6. The method as recited in claim 1, wherein the drying step occurs in a reduced pressure atmosphere.
- 7. The method as recited in claim 1, wherein the drying step occurs using a hot gas blow.
- 8. The method as recited in claim 1, further comprising the step of:
- (f) jet-showering the surface of the material with pure water.
- 9. The method according to claim 1, wherein the first washing step occurs for 10 seconds or more.
- 10. The method as recited in claim 1, wherein the second washing step and the drying step comprise the substeps of:
- rinsing the material in a first shower washing vessel by spraying pure water on the material;
- dipping the material in pure water in a dip bubbling vessel while bubbling clean air;
- spraying and washing the material with pure water;
- heating the material with a low temperature steam;
- subjecting the material to hot air; and
- subjecting the material to vacuum drying.
- 11. The method as recited in claim 1, wherein the drying step is carried out using steam having a temperature .ltoreq.100.degree. C.
- 12. The method as recited in claim 1, wherein the first washing step occurs from 30 seconds to 2 minutes.
- 13. A method for washing/drying a material having a surface, consisting of the steps:
- (a) a first washing step wherein the material is washed in an aqueous solution containing a surfactant having a water repellency;
- (b) concurrently with step (a), applying sonication to the solution to remove contamination from the surface of the material;
- (c) allowing at least one molecular layer of surfactant to form on the surface of the material during the first washing step;
- (d) a second washing step wherein the material is washed with pure water; and
- (e) drying the material.
- 14. The method as recited in claim 13, wherein a concentration of the surfactant in the aqueous solution is in the range of 150 ppm to 5000 ppm.
- 15. The method as recited in claim 14, wherein the aqueous solution has a temperature of less than 100.degree..
- 16. The method as recited in claim 13, wherein a concentration of the surfactant in the aqueous solution is in the range of 450 to 3000 ppm.
- 17. The method as recited in claim 13, wherein the surfactant is selected from the group consisting of hydrocarbon surfactants having a C.sub.12 -C.sub.18 hydrophobic alkyl group, and hydrophobic silicon surfactants.
- 18. The method as recited in claim 13, wherein the drying step occurs in a reduced pressure atmosphere.
- 19. The method as recited in claim 13, wherein the drying step occurs using a hot gas blow.
- 20. The method according to claim 13, wherein the first washing step occurs for 10 seconds or more.
- 21. The method as recited in claim 13, wherein the drying step is carried out using steam having a temperature .ltoreq.100.degree..
- 22. The method as recited in claim 13, wherein the first washing step occurs from 30 seconds to 2 minutes.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-116439 |
May 1990 |
JPX |
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Parent Case Info
This application is a continuation of application Ser. No. 08/005,329, filed Jan. 15, 1993, now U.S. Pat. No. 5,361,789, which is a divisional of application Ser. No. 07/691,915, filed Apr. 26, 1991, now U.S. Pat. No. 5,203,927.
US Referenced Citations (25)
Foreign Referenced Citations (1)
Number |
Date |
Country |
9216314 |
Oct 1992 |
WOX |
Divisions (1)
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Number |
Date |
Country |
Parent |
691915 |
Apr 1991 |
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Continuations (1)
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Number |
Date |
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Parent |
05329 |
Jan 1993 |
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