(a) showing the step of preparing an insulating base layer,
(b) showing the step of successively laminating a silver layer and a copper layer on the insulating base layer,
(c) showing the step of forming a conductive pattern made of a copper alloy in which silver is diffused by heating the silver layer and the copper layer, and
(d) showing the step of forming an insulating cover layer on the insulating base layer to cover the conductive pattern;
(a) showing the step of preparing the insulating base layer,
(b) showing the step of forming a metal thin film on the entire surface of the insulating base layer,
(c) showing the step of forming a plating resist on the surface of the metal thin film,
(d) showing the step of laminating the silver layer on the surface of the metal thin film exposed from the plating resist,
(e) showing the step of laminating the copper layer on the surface of the silver layer,
(f) showing the step of removing the plating resist and the metal thin film, and
(g) showing the step of forming the conductive pattern made of the copper alloy in which the silver is diffused by heating the silver layer and the copper layer;
The wired circuit board 1 is a flexible wired circuit board formed in the shape of a flat belt extending in the longitudinal direction. As shown in, e.g.,
The insulating base layer 2 is formed in the shape of a flat belt corresponding to the outer shape of the wired circuit board 1.
The conductive pattern 3 comprises a plurality of wires 5 extending along the longitudinal direction of the wired circuit board 1 and arranged in mutually spaced-apart and parallel relation in a widthwise direction (orthogonal to the longitudinal direction of the wired circuit board 1). The conductive pattern 3 is formed of a copper alloy in which silver is diffused and contained at a content ratio of more than 0.50% by weight and not more than 3.00% by weight by a producing method described later.
The conductive pattern 3 includes terminal portions, which are not shown, for connecting to the external terminals of an electric component, which is not shown.
In the insulating cover layer 4, openings, which are not shown, are formed to expose the terminal portions.
Next, the method of producing the wired circuit board 1 is described with reference to
In the method, the insulating base layer 2 is prepared first, as shown in
The insulating base layer 2 is either prepared in advance as a film of a synthetic resin or prepared by forming a varnish of a synthetic resin into a film by casting on a stripper board, which is not shown and drying the film, and curing as necessary. Alternatively, the insulating base layer 2 is prepared by forming (coating) a varnish of a photosensitive synthetic resin into a film by casting on a stripper board, drying, exposing to light, developing, and processing the film into the foregoing pattern, and curing as necessary. The thickness of the insulating base layer 2 is in the range of, e.g., 3 to 50 μm, or preferably 5 to 30 μm.
Then, a silver layer 7 and a copper layer 8 are successively laminated on the insulating base layer 2 to form a laminate metal layer 15, as shown in
The silver layer 7 and the copper layer 8 formed as the laminate metal layer 15 are successively formed as the foregoing wired circuit pattern by a known patterning method such as, e.g., a subtractive method or an additive method, or preferably by an additive method in terms of forming a fine wiring pattern.
In the additive method, the metal thin film 6 as a seed film is formed first on the entire surface of the insulating base layer 2, as shown in
Then, as shown in
Then, as shown in
In the silver sputtering method, the silver layer 7 is formed by, e.g., sputtering silver as a target and introducing an inert gas, such as argon, as an introduced gas.
In the electroless silver plating method, the silver layer 7 is formed by dipping the wired circuit board 1 in a process of the production shown in
The thickness of the silver layer 7 is selected appropriately depending on a weight ratio of silver diffused in the copper alloy described later. The thickness of the silver layer 7 is in the range of, e.g., 10 to 600 nm, preferably 10 to 200 nm, or more preferably 10 to 160 nm. When the silver layer 7 is formed as a plurality of silver layers as described later, the total thickness is preferably set to fall in the thickness range shown above.
Then, as shown in
In the electrolytic copper plating method, the copper layer 8 is formed by, e.g., dipping the wired circuit board 1 in a process of the production shown in
The thickness of the copper layer 8 is selected appropriately in accordance with a thickness required for the conductive pattern 3. For example, the thickness of the copper layer 8 is in the range of, e.g., 4 to 20 μm, preferably 7 to 15 μm, or more preferably 8 to 12 μm. When the copper layer 8 is formed as a plurality of copper layers as described later, the total thickness is preferably set to fall in the thickness range shown above.
Then, as shown in
As a result, as shown in
Then, as shown in
The laminate metal layer 15 is heated in an oxygen-containing atmosphere such as atmospheric air or in an inert gas atmosphere of, e.g., nitrogen, or preferably in an inert gas atmosphere in a temperature range of, e.g., 300 to 600° C., or preferably 350 to 400° C. for a period of, e.g., 60 to 300 minutes, or preferably 120 to 300 minutes.
By such heating, the silver contained in the silver layer 7 of the laminate metal layer 15 is diffused into the copper layer 8 so that the laminate metal layer 15 forms the conductive pattern 3 made of the copper alloy in which the silver is diffused.
In the conductive pattern 3 (copper alloy), the weight ratio of silver (silver concentration) diffused therein is, e.g., more than 0.50% by weight and not more than 3.00% by weight, preferably more than 0.50% by weight and not more than 1.50% by weight, or more preferably more than 0.50% by weight and not more than 1.00% by weight. When the weight ratio of the diffused silver is not more than 0.50% by weight, the strength of the conductive pattern 3 cannot be sufficiently improved. When the weight ratio of the diffused silver is more than 3.00% by weight, all of the silver contained in the silver layer 7 is not efficiently diffused in the copper alloy so that the silver layer 7 remains.
The weight ratio of the silver diffused in the conductive pattern 3 is calculated from the thickness of the silver layer 7, the thickness of the copper layer 8, the concentration of silver, and the concentration of copper before heating. That is, the weight ratio of the silver is calculated in accordance with the following formula:
Weight Ratio of Silver (wt %)=(Thickness of Silver Layer 7 per Unit Area×Silver Concentration)/{(Thickness of Silver Layer 7 per Unit Area×Silver Concentration)+(Thickness of Copper Layer 8 per Unit Area×Concentration of Copper Layer 8)}×100.
In the obtained conductive pattern 3, the silver is diffused to have a distribution in the thickness direction (lamination direction) such that the weight ratio of silver is highest in the lowermost portion and gradually decreases according to the distance from the lowermost portion toward an upper portion in the thickness direction.
The thickness of the conductive pattern 3 is in the range of, e.g., 4 to 20 μm, preferably 7 to 15 μm, or more preferably 8 to 12 μm.
Then, as shown in
For the insulating cover layer 4, the same synthetic resin as used for the insulating base layer 2 is used. The insulating cover layer 4 can be formed in the foregoing pattern by, e.g., forming (coating) a varnish of a photosensitive resin into a film by casting, drying, exposing to light, and developing the film, and curing film as necessary.
Alternatively, the insulating cover layer 4 can also be formed by sticking a film of a synthetic resin preliminary formed in the foregoing pattern onto the insulating base layer 2 including the conductive pattern 3 via an adhesive layer as necessary.
The thickness of the insulating cover layer 4 is in the range of, e.g., 2 to 25 μm, or preferably 5 to 15 μm.
The wired circuit board 1 thus obtained comprises the conductive pattern 3 made of the copper alloy in which silver is diffused and contained at a content ratio of more than 0.50% by weight and not more than 3.00% by weight. As a result, the strength of the conductive pattern 3, e.g., the tensile strength or the like can be sufficiently improved. Therefore, the wired circuit board 1 with high connection reliability can be obtained.
More specifically,
In each of
In the description given above, the laminate metal layer 15 is formed by successively laminating the silver layer 7 and the copper layer 8 on the insulating base layer 2 (metal thin film 6) in a process of the production of the wired circuit board 1. However, the laminate metal layer 15 may also be formed by, e.g., successively laminating the copper layer 8 and the silver layer 7 on the insulating base layer 2 (metal thin film 6), as shown in
In the conductive pattern 3 obtained by heating the laminate metal layer 15, silver is diffused to have a distribution in the thickness direction (lamination direction) such that the weight ratio of silver is highest in the uppermost portion and gradually decreases according to the distance from the uppermost portion toward a lower portion in the thickness direction.
Although the laminate metal layer 15 is formed by laminating the single silver layer 7 and the single copper layer 8 in a process of the production of the wired circuit board 1, it is also possible to form the laminate metal layer 15 having a sandwich structure in which, e.g., the silver layer 7 is sandwiched between two copper layers, i.e., a first copper layer 10 and a second copper layer 11 over the insulating base layer 2 (metal thin film 6), as shown in
In the laminate metal layer 15 having such a structure, the thickness of each of the first copper layer 10 and the second copper layer 11 is in the range of, e.g., 2 to 10 μm, preferably 3 to 7 μm, or more preferably 4 to 6 μm. The thickness of the silver layer 7 is in the range of, e.g., 10 to 600 nm, preferably 10 to 200 nm, or more preferably 10 to 160 nm.
In the conductive pattern 3 obtained by heating the laminate metal layer 15, silver is diffused to have a distribution in the thickness direction (lamination direction) such that the weight ratio of silver is highest at a midway portion (in which the silver layer 7 is laminated) in the thickness direction and gradually decreases according to the distance from the midway portion toward an upper portion and a lower portion in the thickness direction.
That is, since the silver contained in the silver layer 7 is diffused from the midway portion in the thickness direction of the laminate metal layer 15, silver can be diffused to have a more uniform distribution in the thickness direction.
Alternatively, the laminate metal layer 15 can also be formed such that a plurality of silver layers and a plurality of copper layers are alternately laminated, as shown in
In the laminate metal layer 15 having such a structure, the thickness of each of the first copper layer 10, the second copper layer 11, and the third copper layer 12 is in the range of, e.g., 1 to 7 μm, preferably 2 to 5 μm, or more preferably 2 to 4 μm. The thickness of the first silver layer 13 and the second silver layer 14 is in the range of, e.g., 10 to 600 nm, preferably 10 to 100 nm, or more preferably 10 to 80 nm.
In the conductive pattern 3 obtained by heating the laminate metal layer 15, silver is diffused to have a distribution in the thickness direction (lamination direction) such that the weight ratio of silver is highest in portions in the thickness direction in which the first silver layer 13 and the second silver layer 14 are laminated and gradually decreases according to the distance from the portions in the thickness direction.
That is, since the silver contained in the first silver layer 13 and the second silver layer 14 is thus formed substantially evenly in the midway portions in the thickness direction and diffused from the midway portions, the silver can be diffused to have a more uniform distribution in the thickness direction.
Although the silver layers and the copper layers are alternately laminated after the copper layer is laminated on the insulating base layer 2 (metal thin film 6) in
Although the wired circuit board according to the present invention is described above using the flexible wired circuit board as an example, the wired circuit board according to the present invention is not limited thereto. For example, the wired circuit board according to the present invention also includes a suspension board with circuit in which an insulating base layer is supported by a metal supporting board or the like.
The terminal portions 21 of the suspension board with circuit 19 are formed in a flying lead structure. For example, as shown in
Even when the terminal portions 21 having the both surfaces exposed are formed in the flying lead structure, the rigidity of the terminal portions 21 can be sufficiently improved since the conductive pattern 3 including the terminal portions 21 is made of a copper alloy in which silver is diffused and contained at a content ratio of more than 0.50% by weight and not more than 3.00% by weight.
The present invention is described more specifically by showing examples and comparative examples herein below.
An insulating base layer made of a film of a polyimide resin having a thickness of 10 μm was prepared (see
Then, a chromium thin film having a thickness of 40 nm and a copper thin film having a thickness of 70 nm were successively laminated on the surface of the insulating base layer by a sputtering method to form a metal thin film as a seed film on the insulating base layer (see
Then, a plating resist was formed in a pattern reverse to a conductive pattern on the surface of the metal thin film (see
Then, a silver layer having a thickness of 35.0 nm was laminated on the surface of the metal thin film exposed from the plating resist by a silver sputtering method (see
Then, a copper layer having a thickness of 8.1 μm was laminated on the surface of the silver layer by an electrolytic copper plating method (see
Then, the plating resist was removed by etching and the metal thin film exposed from a laminate metal layer formed by laminating the silver layer and the copper layer was removed by etching (see
Then, the silver contained in the silver layer was diffused into the copper layer by heating the laminate metal layer in a nitrogen atmosphere at 400° C. for 120 minutes, whereby the conductive pattern made of a copper alloy was formed (see
Thereafter, a varnish of a photosensitive resin was coated on the insulating base layer, dried, exposed to light, developed, and then cured to form an insulating cover layer having a thickness of 5 μm on the insulating base layer such that the conductive pattern was covered therewith and openings were formed therein to expose the terminal portions (see
A wired circuit board was obtained by the same procedure as in EXAMPLE 1 except that the thickness of the silver layer was changed to 70.0 nm and the thickness of the copper layer was changed to 8.5 μm. The weight ratio of the silver diffused in the copper alloy was 0.82% by weight to the copper alloy.
An insulating base layer made of a film of a polyimide resin having a thickness of 10 μm was prepared (see
Then, a chromium thin film having a thickness of 40 nm and a copper thin film having a thickness of 70 nm were successively laminated on the surface of the insulating base layer by a sputtering method to form a metal thin film as a seed film on the insulating base layer (see
Then, a plating resist was formed in a pattern reverse to a conductive pattern on the surface of the metal thin film (see
Then a first copper layer having a thickness of 4.3 μm was laminated on the surface of the metal thin film exposed from the plating resist by an electrolytic copper plating method.
Then a silver layer having a thickness of 40.0 nm was laminated on the surface of the first copper layer exposed from the plating resist by an electroless silver plating method.
Then a second copper layer having a thickness of 4.6 μm was laminated on the surface of the silver layer exposed from the plating resist by an electrolytic copper plating method.
Then, the plating resist was removed by etching. Thereafter, the metal thin film exposed from the laminate metal layer formed by laminating the first copper layer, the silver layer, and the second copper layer was removed by etching (see
Then, the silver contained in the silver layer was diffused into the first copper layer and the second copper layer by heating the laminate metal layer in a nitrogen atmosphere at 400° C. for 120 minutes, whereby the conductive pattern made of a copper alloy was formed (see
Thereafter, a varnish of a photosensitive resin was coated on the insulating base layer, dried, exposed to light, developed, and then cured to form an insulating cover layer having a thickness of 5 μm on the insulating layer such that the conductive pattern was covered therewith and openings were formed therein to expose the terminal portions (see
A wired circuit board was obtained by the same procedure as in EXAMPLE 3 except that the thickness of the first copper layer was changed to 4.5 μm, the thickness of the silver layer was changed to 92.8 nm, and the thickness of the second copper layer was changed to 5.3 μm. The weight ratio of the silver diffused in the copper alloy was 0.93% by weight to the copper alloy.
A wired circuit board was obtained by the same procedure as in EXAMPLE 3 except that the thickness of the silver layer was changed to 155.8 nm and the thickness of the second copper layer was changed to 4.9 μm. The weight ratio of silver diffused in the copper alloy was 1.66% by weight to the copper alloy.
An insulating base layer made of a film of a polyimide resin having a thickness of 10 μm was prepared (see
Then, a chromium thin film having a thickness of 40 nm and a copper thin film having a thickness of 70 nm were successively formed on the surface of the insulating base layer by a sputtering method to form a metal thin film as a seed film on the insulating base layer (see
Then, a plating resist was formed in a pattern reverse to a conductive pattern on the surface of the metal thin film (see
Then, a first copper layer having a thickness of 3.0 μm was laminated on the surface of the metal thin film exposed from the plating resist by an electrolytic copper plating method.
Then a first silver layer having a thickness of 43.2 nm was laminated on the surface of the first copper layer exposed from the plating resist by an electroless silver plating method.
Then a second copper layer having a thickness of 2.0 μm was laminated on the surface of the first silver layer exposed from the plating resist by an electrolytic copper plating method.
Then a second silver layer having a thickness of 42.1 nm was laminated on the surface of the second copper layer exposed from the plating resist by an electroless silver plating method.
Then a third copper layer having a thickness of 3.3 μm was laminated on the surface of the second silver layer exposed from the plating resist by an electrolytic copper plating method.
Then, the plating resist was removed by etching. Thereafter, the metal thin film exposed from the laminate metal layer formed by laminating the first copper layer, the first silver layer, the second copper layer, the second silver layer, and the third copper layer was removed by etching (see
Then, the silver contained in the first silver layer and the second silver layer was diffused into the first copper layer, the second copper layer, and the third copper layer by heating the laminate metal layer in a nitrogen atmosphere at 400° C. for 120 minutes, whereby the conductive pattern made of a copper alloy was formed (see
Thereafter, a varnish of a photosensitive resin was coated on the insulating base layer, dried, exposed to light, developed, and then cured to form an insulating cover layer having a thickness of 5 μm on the insulating layer such that the conductive pattern was covered therewith and openings were formed therein to expose the terminal portions (see
A wired circuit board was obtained by the same procedure as in EXAMPLE 1 except that no silver layer was laminated and the thickness of the copper layer was changed to 8.3 μm.
A metal supporting board made of a stainless steel foil having a thickness of 25 μm was prepared.
Then, a varnish of a photosensitive resin was coated on the metal supporting board, dried, exposed to light, developed, and then cured to form an insulating base layer having a thickness of 10 μm on the metal supporting board.
Then, a chromium thin film having a thickness of 40 nm and a copper thin film having a thickness of 70 nm were successively formed on the surface of the insulating base layer by a sputtering method to form a metal thin film as a seed film on the insulating base layer.
Then, a plating resist was formed in a pattern reverse to a conductive pattern on the surface of the metal thin.
Then, a silver layer having a thickness of 70.0 nm was laminated on the surface of the metal thin film exposed from the plating resist by a silver sputtering method.
Then, a copper layer having a thickness of 8.1 μm was laminated on the surface of the silver layer by an electrolytic copper plating method.
Then, the plating resist was removed by etching and the metal thin film exposed from a laminate metal layer formed by laminating the silver layer and the copper layer was removed by etching.
Then, the silver contained in the silver layer was diffused into the copper layer by heating the laminate metal layer in a nitrogen atmosphere at 400° C. for 120 minutes, whereby the conductive pattern made of a copper alloy was formed. The weight ratio of the silver diffused in the copper alloy was 1.01% by weight to the copper alloy.
Thereafter, a varnish of a photosensitive resin was coated on the insulating base layer, dried, exposed to light, developed, and then cured to form an insulating cover layer having a thickness of 5 μm on the insulating layer such that the conductive pattern was covered therewith and openings were formed therein to expose the terminal portions.
Then, the metal supporting board was opened at the same positions as the openings in the insulating cover layer by etching. Subsequently, the insulating base layer exposed from the openings in the metal supporting board was opened by etching, whereby the terminal portions in a flying lead structure having the top surfaces exposed from the insulating cover layer and the back surfaces exposed from the metal supporting board and the insulating base layer were formed (see
A wired circuit board was obtained by the same procedure as in EXAMPLE 1 except that the thickness of the silver layer was changed to 7.0 nm and the thickness of the copper layer was changed to 7.8 μm. The weight ratio of the silver diffused in the copper alloy was 0.09% by weight to the copper alloy.
The tensile strengths of the wired circuit boards obtained in the examples and the comparative examples were measured using an RSAIII viscoelasticity measuring apparatus, the result of which is shown in Table 1.
In Table 1, the weight ratio of silver after heating shows the weight ratio of silver to the copper alloy in which the silver is diffused by heating and the value of each of the silver layers and the copper layers shows the thickness thereof.
As shown in Table 1, the results confirmed that the wired circuit board according to each of the examples which comprised the conductive pattern made of the copper alloy in which silver was diffused and contained at a content ratio of more than 0.50% by weight and not more than 3.00% by weight had a higher tensile strength than the wired circuit board according to each of the comparative examples which did not comprise a conductive pattern made of such a copper alloy.
In particular, a higher strength was observed in each of EXAMPLES 3 to 6 where the laminate layers each having the sandwich structure sandwiching the silver layer between the copper layers were formed.
In EXAMPLE 6 where the two silver layers sandwiched between the copper layers were formed, the one silver layer sandwiched between the copper layers was formed, whereby EXAMPLE 6 observes a much higher strength than that of Example 4 where the weight ratio of silver was relatively close to that of the copper alloy.
While the illustrative embodiments of the present invention are provided in the above description, such is for illustrative purpose only and it is not to be construed limitative. Modification and variation of the present invention that will be obvious to those skilled in the art is to be covered by the following claims.
Number | Date | Country | Kind |
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2006-161116 | Jun 2006 | JP | national |
This patent application claims the benefit of U.S. Provisional Application No. 60/815,275, filed on Jun. 21, 2006, and claims priority from Japanese Patent Application No. 2006-161116, filed on Jun. 9, 2006, the contents of which are herein incorporated by reference in their entirety.
Number | Date | Country | |
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60815275 | Jun 2006 | US |