EVATEC CO., LTD.

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Liquid sputter target
- Patent number 11,952,654
- Issue date Apr 9, 2024
- EVATEC AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and apparatus for magnetron sputtering
- Patent number 11,848,179
- Issue date Dec 19, 2023
- EVATEC AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber for degassing substrates
- Patent number 11,776,825
- Issue date Oct 3, 2023
- EVATEC AG
- Rogier Lodder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF capacitive coupled etch reactor
- Patent number 11,742,187
- Issue date Aug 29, 2023
- EVATEC AG
- Johannes Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of processing a substrate...
- Patent number 11,551,950
- Issue date Jan 10, 2023
- EVATEC AG
- Hartmut Rohrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of and apparatus for magnetron sputtering
- Patent number 11,476,099
- Issue date Oct 18, 2022
- EVATEC AG
- Hartmut Rohrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum plasma workpiece treatment apparatus
- Patent number 11,469,085
- Issue date Oct 11, 2022
- EVATEC AG
- Jurgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma etch chamber and method of plasma etching
- Patent number 11,387,079
- Issue date Jul 12, 2022
- EVATEC AG
- Frantisek Balon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering with HIPIMS
- Patent number 11,380,530
- Issue date Jul 5, 2022
- EVATEC AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF power delivery to vacuum plasma processing
- Patent number 11,380,520
- Issue date Jul 5, 2022
- EVATEC AG
- Stefan Rhyner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Broadband optical monitoring
- Patent number 11,377,728
- Issue date Jul 5, 2022
- EVATEC AG
- Stephan Waldner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF capacitive coupled dual frequency etch reactor
- Patent number 11,217,434
- Issue date Jan 4, 2022
- EVATEC AG
- Jurgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc suppression and pulsing in high power impulse magnetron sputter...
- Patent number 11,211,234
- Issue date Dec 28, 2021
- EVATEC AG
- Stanislav Kadlec
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum treatment chamber and method of manufacturing a vacuum treat...
- Patent number 11,145,495
- Issue date Oct 12, 2021
- EVATEC AG
- Frantisek Balon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation heater arrangement
- Patent number 11,143,416
- Issue date Oct 12, 2021
- EVATEC AG
- Juergen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and method for vacuum processing substr...
- Patent number 10,889,890
- Issue date Jan 12, 2021
- EVATEC AG
- Silvia Schwyn-Thony
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering with HIPIMs
- Patent number 10,784,092
- Issue date Sep 22, 2020
- EVATEC AG
- Juergen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF substrate bias with high power impulse magnetron sputtering (HIP...
- Patent number 10,692,707
- Issue date Jun 23, 2020
- EVATEC AG
- Jürgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum treatment apparatus
- Patent number 10,590,538
- Issue date Mar 17, 2020
- EVATEC AG
- Bart Scholte Von Mast
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber for degassing substrates
- Patent number 10,580,671
- Issue date Mar 3, 2020
- EVATEC AG
- Jurgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for degassing substrates
- Patent number 10,403,522
- Issue date Sep 3, 2019
- EVATEC AG
- Jurgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for depositing a layer on a substrate in a processing gas
- Patent number 10,388,559
- Issue date Aug 20, 2019
- EVATEC AG
- Sven Uwe Rieschl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing workpieces and apparatus
- Patent number 10,347,515
- Issue date Jul 9, 2019
- EVATEC AG
- Bernd Heinz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport and handing-over arrangement for disc-shaped substrates,...
- Patent number 10,301,125
- Issue date May 28, 2019
- EVATEC AG
- Stephan Voser
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Adapter for vacuum-insulated lines
- Patent number 10,295,110
- Issue date May 21, 2019
- EVATEC AG
- Martin Bless
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
RF sputtering arrangement
- Patent number 10,224,188
- Issue date Mar 5, 2019
- EVATEC AG
- Martin Kratzer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of sputtering and sputter system
- Patent number 10,202,682
- Issue date Feb 12, 2019
- EVATEC AG
- Sven Uwe Rieschl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum treatment apparatus
- Patent number 10,138,553
- Issue date Nov 27, 2018
- EVATEC AG
- Bart Scholte Von Mast
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Direct liquid deposition
- Patent number 10,066,287
- Issue date Sep 4, 2018
- EVATEC AG
- Stephan Voser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber for degassing substrates
- Patent number 9,934,992
- Issue date Apr 3, 2018
- EVATEC AG
- Jurgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PROCESS SHUTTER ARRANGEMENT
- Publication number 20240347326
- Publication date Oct 17, 2024
- Evatec AG
- JÖRG KERSCHBAUMER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS
- Publication number 20240136156
- Publication date Apr 25, 2024
- Evatec AG
- Stephan VOSER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM TREATMENT APPARATUS AND METHODS FOR MANUFACTURING VACUUM TRE...
- Publication number 20240128099
- Publication date Apr 18, 2024
- Evatec AG
- Marco STUPAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR TEMPERATURE MEASUREMENT OF A MOV...
- Publication number 20240068099
- Publication date Feb 29, 2024
- Evatec AG
- Silvio GEES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...
- Publication number 20240063051
- Publication date Feb 22, 2024
- Evatec AG
- Florian Hagmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASURING DEVICE AND METHOD FOR MEASURING PARAMETERS OF A PIEZOELEC...
- Publication number 20240053301
- Publication date Feb 15, 2024
- Evatec AG
- Peter HORN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HYPOCHLORITE WATER PRODUCTION METHOD AND PRODUCTION APPARATUS
- Publication number 20230406703
- Publication date Dec 21, 2023
- EVATEC CO., LTD.
- Minoru TERADA
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Application
CHAMBER FOR DEGASSING SUBSTRATES
- Publication number 20230395402
- Publication date Dec 7, 2023
- Evatec AG
- Rogier Lodder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
BIOMETRIC AUTHENTICATION SYSTEM
- Publication number 20230267760
- Publication date Aug 24, 2023
- Evatec AG
- Silvia SCHWYN THÖNY
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
VACUUM TREATMENT APPARATUS
- Publication number 20230234094
- Publication date Jul 27, 2023
- Evatec AG
- Rico BENZ
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND PROCESS WITH A DC-PULSED CATHODE ARRAY
- Publication number 20230097276
- Publication date Mar 30, 2023
- Evatec AG
- Mohamed ELGHAZZALI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
- Publication number 20230014186
- Publication date Jan 19, 2023
- Evatec AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS RING FOR A PVD SOURCE
- Publication number 20230002879
- Publication date Jan 5, 2023
- Evatec AG
- Andreas Mark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER CO...
- Publication number 20230005725
- Publication date Jan 5, 2023
- Evatec AG
- Romeo Good
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESS TREATMENT CHAMBER AND METHOD OF TREATING A SUBSTRATE...
- Publication number 20220396864
- Publication date Dec 15, 2022
- Evatec AG
- Jürgen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREPARING HYPOCHLOROUS ACID AQUEOUS SOLUTION AND METHOD...
- Publication number 20220371887
- Publication date Nov 24, 2022
- EVATEC CO., LTD.
- Minoru TERADA
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PIEZOELECTRIC COATING AND DEPOSITION PROCESS
- Publication number 20220263009
- Publication date Aug 18, 2022
- Evatec AG
- Andrea Mazzalai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING IONS AND APPARATUS
- Publication number 20220130641
- Publication date Apr 28, 2022
- Evatec AG
- Silvio Gees
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM SYSTEM AND METHOD TO DEPOSIT A COMPOUND LAYER
- Publication number 20220098724
- Publication date Mar 31, 2022
- Evatec AG
- Kai Wenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM TREATMENT APPARATUS AND METHOD FOR VACUUM PLASMA TREATING AT...
- Publication number 20220068610
- Publication date Mar 3, 2022
- EVATEC AG
- Edmund Schüngel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM TREATMENT APPARATUS AND METHOD OF VACUUM TREATING SUBSTRATES
- Publication number 20210381100
- Publication date Dec 9, 2021
- Evatec AG
- Martin Bless
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION PROCESS FOR PIEZOELECTRIC COATINGS
- Publication number 20210384412
- Publication date Dec 9, 2021
- Evatec AG
- Boris Trajcevski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID SPUTTER TARGET
- Publication number 20210381099
- Publication date Dec 9, 2021
- Evatec AG
- Dominik Jaeger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF POWER DELIVERY TO VACUUM PLASMA PROCESSING
- Publication number 20210358718
- Publication date Nov 18, 2021
- Evatec AG
- Stefan Rhyner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS
- Publication number 20210348274
- Publication date Nov 11, 2021
- Evatec AG
- Jörg PATSCHEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APARATUS FOR LOW PARTICLE PLASMA ETCHING
- Publication number 20210319984
- Publication date Oct 14, 2021
- Evatec AG
- Jürgen Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR TREATING A SUBSTRATE
- Publication number 20210202282
- Publication date Jul 1, 2021
- Evatec AG
- Johannes Weichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE VACUUM TREATMENT APPARATUS AND METHOD THEREFOR
- Publication number 20210143036
- Publication date May 13, 2021
- Evatec AG
- Gaston Van Buuren
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
- Publication number 20210050193
- Publication date Feb 18, 2021
- Evatec AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Trademarklast 30 trademarks

Information Trademark
97839573 - EVATEC PROCESS SYSTEMS
- Serial number 97839573
- Filing date Mar 15, 2023
- Evatec AG
- 7 - Machines and machine tools
Information Trademark
79179320 - EVATEC
- Serial number 79179320
- Registration number 5111624
- Filing date May 22, 2015
- Evatec AG
- 7 - Machines and machine tools

EVATEC CO., LTD.

Organization

Patents Grantslast 30 patents

Liquid sputter target

Methods of and apparatus for magnetron sputtering

Chamber for degassing substrates

RF capacitive coupled etch reactor

Substrate processing apparatus and method of processing a substrate...

Methods of and apparatus for magnetron sputtering

Vacuum plasma workpiece treatment apparatus

Plasma etch chamber and method of plasma etching

Reactive sputtering with HIPIMS

RF power delivery to vacuum plasma processing

Broadband optical monitoring

RF capacitive coupled dual frequency etch reactor

Arc suppression and pulsing in high power impulse magnetron sputter...

Vacuum treatment chamber and method of manufacturing a vacuum treat...

Radiation heater arrangement

Vacuum processing apparatus and method for vacuum processing substr...

Reactive sputtering with HIPIMs

RF substrate bias with high power impulse magnetron sputtering (HIP...

Vacuum treatment apparatus

Chamber for degassing substrates

Chamber for degassing substrates

Apparatus for depositing a layer on a substrate in a processing gas

Method for manufacturing workpieces and apparatus

Transport and handing-over arrangement for disc-shaped substrates,...

Adapter for vacuum-insulated lines

RF sputtering arrangement

Method of sputtering and sputter system

Vacuum treatment apparatus

Direct liquid deposition

Chamber for degassing substrates

Patents Applicationslast 30 patents

PROCESS SHUTTER ARRANGEMENT

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS

VACUUM TREATMENT APPARATUS AND METHODS FOR MANUFACTURING VACUUM TRE...

SUBSTRATE PROCESSING APPARATUS FOR TEMPERATURE MEASUREMENT OF A MOV...

SUBSTRATE SUPPORT UNIT, AND APPARATUS AND METHOD FOR DEPOSITING A L...

MEASURING DEVICE AND METHOD FOR MEASURING PARAMETERS OF A PIEZOELEC...

HYPOCHLORITE WATER PRODUCTION METHOD AND PRODUCTION APPARATUS

CHAMBER FOR DEGASSING SUBSTRATES

BIOMETRIC AUTHENTICATION SYSTEM

VACUUM TREATMENT APPARATUS

APPARATUS AND PROCESS WITH A DC-PULSED CATHODE ARRAY

METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING

GAS RING FOR A PVD SOURCE

METHOD OF SPUTTER-COATING SUBSTRATES OR OF MANUFACTURING SPUTTER CO...

VACUUM PROCESS TREATMENT CHAMBER AND METHOD OF TREATING A SUBSTRATE...

METHOD FOR PREPARING HYPOCHLOROUS ACID AQUEOUS SOLUTION AND METHOD...

PIEZOELECTRIC COATING AND DEPOSITION PROCESS

METHOD OF PRODUCING IONS AND APPARATUS

VACUUM SYSTEM AND METHOD TO DEPOSIT A COMPOUND LAYER

VACUUM TREATMENT APPARATUS AND METHOD FOR VACUUM PLASMA TREATING AT...

VACUUM TREATMENT APPARATUS AND METHOD OF VACUUM TREATING SUBSTRATES

DEPOSITION PROCESS FOR PIEZOELECTRIC COATINGS

LIQUID SPUTTER TARGET

RF POWER DELIVERY TO VACUUM PLASMA PROCESSING

PLASMA ENHANCED ATOMIC LAYER DEPOSITION (PEALD) APPARATUS

METHOD AND APARATUS FOR LOW PARTICLE PLASMA ETCHING

METHOD AND APPARATUS FOR TREATING A SUBSTRATE

SUBSTRATE VACUUM TREATMENT APPARATUS AND METHOD THEREFOR

METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING

Trademarklast 30 trademarks

97839573 - EVATEC PROCESS SYSTEMS

79179320 - EVATEC