ONTO INNOVATION INC

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WILMINGTON, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
High resolution multispectral multi-field-of-view imaging system fo...
- Patent number 12,174,128
- Issue date Dec 24, 2024
- Onto Innovation Inc.
- John A Tejada
- G01 - MEASURING TESTING
Information Patent Grant
Substrate mapping using deep neural-networks
- Patent number 12,131,454
- Issue date Oct 29, 2024
- Onto Innovation, Inc.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Semiconductor substrate yield prediction based on spectra data from...
- Patent number 12,111,355
- Issue date Oct 8, 2024
- Onto Innovation Inc.
- Xin Song
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Non-destructive inspection and manufacturing metrology systems and...
- Patent number 12,092,565
- Issue date Sep 17, 2024
- Onto Innovation Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Measurements of structures in presence of signal contaminations
- Patent number 12,092,962
- Issue date Sep 17, 2024
- Onto Innovation Inc.
- Jingsheng Shi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Effective cell approximation model for logic structures
- Patent number 12,013,350
- Issue date Jun 18, 2024
- Onto Innovation Inc.
- Kevin Eduard Heidrich
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Characterization of patterned structures using acoustic metrology
- Patent number 11,988,641
- Issue date May 21, 2024
- Onto Innovation Inc.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Grant
Enhanced heat transfer in liquefied gas cooled detector
- Patent number 11,913,703
- Issue date Feb 27, 2024
- Onto Innovation Inc.
- James Givens
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Apparatus and method for multiple source excitation Raman spectroscopy
- Patent number 11,874,229
- Issue date Jan 16, 2024
- Onto Innovation Inc.
- George Andrew Antonelli
- G02 - OPTICS
Information Patent Grant
Wafer-level package assembly handling
- Patent number 11,809,441
- Issue date Nov 7, 2023
- Onto Innovation Inc.
- Kevin Barr
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Target for optical measurement of trenches
- Patent number 11,808,715
- Issue date Nov 7, 2023
- Onto Innovation Inc.
- Nicholas James Keller
- G01 - MEASURING TESTING
Information Patent Grant
System and method for correcting overlay errors in a lithographic p...
- Patent number 11,687,010
- Issue date Jun 27, 2023
- Onto Innovation Inc.
- Zhiyang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Opto-acoustic measurement of a transparent film stack
- Patent number 11,668,644
- Issue date Jun 6, 2023
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection system including a laser triangulation sensor
- Patent number 11,578,967
- Issue date Feb 14, 2023
- Onto Innovation Inc.
- John Schaefer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for optimizing a lithography exposure process
- Patent number 11,531,279
- Issue date Dec 20, 2022
- Onto Innovation Inc.
- Elvino da Silveira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Beamsplitter based ellipsometer focusing system
- Patent number 11,385,167
- Issue date Jul 12, 2022
- Onto Innovation Inc.
- John F. Lesoine
- G01 - MEASURING TESTING
Information Patent Grant
Interferometry with pixelated color discriminating elements combine...
- Patent number 11,353,316
- Issue date Jun 7, 2022
- Onto Innovation Inc.
- Neal Brock
- G01 - MEASURING TESTING
Information Patent Grant
Conformal stage
- Patent number 11,353,800
- Issue date Jun 7, 2022
- Onto Innovation Inc.
- J. Casey Donaher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vortex polarimeter
- Patent number 11,346,768
- Issue date May 31, 2022
- Onto Innovation Inc.
- Kenneth E. James
- G01 - MEASURING TESTING
Information Patent Grant
Fast generalized multi-wavelength ellipsometer
- Patent number 11,346,769
- Issue date May 31, 2022
- Onto Innovation Inc.
- Alexander George Boosalis
- G01 - MEASURING TESTING
Information Patent Grant
Focus system for oblique optical metrology device
- Patent number 11,346,790
- Issue date May 31, 2022
- Onto Innovation Inc.
- Amit Shachaf
- G01 - MEASURING TESTING
Information Patent Grant
Wafer singulation process control
- Patent number 11,315,832
- Issue date Apr 26, 2022
- Onto Innovation Inc.
- Wayne Fitzgerald
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Active damper for semiconductor metrology and inspection systems
- Patent number 11,280,381
- Issue date Mar 22, 2022
- Onto Innovation Inc.
- Paul A. Doyle
- G01 - MEASURING TESTING
Information Patent Grant
On-axis dynamic interferometer and optical imaging systems employin...
- Patent number 11,262,191
- Issue date Mar 1, 2022
- Onto Innovation Inc.
- James Millerd
- G01 - MEASURING TESTING
Information Patent Grant
Optical metrology device using numerical aperture reduction
- Patent number 11,162,897
- Issue date Nov 2, 2021
- Onto Innovation Inc.
- George Andrew Antonelli
- G01 - MEASURING TESTING
Information Patent Grant
Sample surface polarization modification in interferometric defect...
- Patent number 11,150,195
- Issue date Oct 19, 2021
- Onto Innovation Inc.
- Nigel P. Smith
- G01 - MEASURING TESTING
Information Patent Grant
System and method for optimizing a lithography exposure process
- Patent number 11,126,096
- Issue date Sep 21, 2021
- Onto Innovation, Inc.
- Elvino Da Silveira
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Calibration of azimuth angle for optical metrology stage using grat...
- Patent number 11,079,220
- Issue date Aug 3, 2021
- Onto Innovation Inc.
- Nicholas James Keller
- G01 - MEASURING TESTING
Information Patent Grant
Sample inspection using topography
- Patent number 10,937,705
- Issue date Mar 2, 2021
- Onto Innovation Inc.
- Nigel P. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sub-resolution defect detection
- Patent number 10,935,501
- Issue date Mar 2, 2021
- Onto Innovation Inc.
- Nigel P. Smith
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKS
- Publication number 20250014165
- Publication date Jan 9, 2025
- ONTO INNOVATION INC.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL METROLOGY WITH INFLUENCE MAP OF UNKNOWN SECTION
- Publication number 20250012737
- Publication date Jan 9, 2025
- ONTO INNOVATION INC.
- Yiliang LIU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHOTO RESPONSE NON-UNIFORMITY CORRECTION DURING SEMICONDUCTOR INSPE...
- Publication number 20250003888
- Publication date Jan 2, 2025
- Onto Innovation Inc.
- John M. Thornell
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND...
- Publication number 20240402074
- Publication date Dec 5, 2024
- ONTO INNOVATION INC.
- Manjusha Mehendale
- G01 - MEASURING TESTING
Information Patent Application
TRACKING AND/OR PREDICTING SUBSTRATE YIELD DURING FABRICATION
- Publication number 20240354485
- Publication date Oct 24, 2024
- ONTO INNOVATION INC.
- Keith Frank Best
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR FAST MICROSCOPY
- Publication number 20240337627
- Publication date Oct 10, 2024
- ONTO INNOVATION INC.
- Manjusha MEHENDALE
- G01 - MEASURING TESTING
Information Patent Application
MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY
- Publication number 20240329005
- Publication date Oct 3, 2024
- ONTO INNOVATION INC.
- Michael J. Kotelyanskii
- G01 - MEASURING TESTING
Information Patent Application
SUBSTRATE EDGE PATTERNING TECHNIQUES
- Publication number 20240319615
- Publication date Sep 26, 2024
- ONTO INNOVATION INC.
- Keith F. Best
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER LEARNING FOR METROLOGY DATA ANALYSIS
- Publication number 20240320508
- Publication date Sep 26, 2024
- ONTO INNOVATION INC.
- Jie Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
POST-OVERLAY COMPENSATION ON LARGE-FIELD PACKAGING
- Publication number 20240302752
- Publication date Sep 12, 2024
- ONTO INNOVATION INC.
- Yin-Yi John Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PERFORMANCE MANAGEMENT OF SEMICONDUCTOR SUBSTRATE TOOLS
- Publication number 20240295829
- Publication date Sep 5, 2024
- ONTO INNOVATION INC.
- Xin Song
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ADAPTIVE SPATIAL PATTERN RECOGNITION FOR DEFECT DETECTION
- Publication number 20240281953
- Publication date Aug 22, 2024
- ONTO INNOVATION INC.
- Longjiang Xiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INTERFEROMETER WITH AUXILIARY LENS FOR MEASUREMENT OF A TRANSPARENT...
- Publication number 20240264035
- Publication date Aug 8, 2024
- ONTO INNOVATION INC.
- Michael B. North Morris
- G01 - MEASURING TESTING
Information Patent Application
MASK AND PROCEDURE FOR PROCESS PERFORMANCE DETECTION
- Publication number 20240248045
- Publication date Jul 25, 2024
- ONTO INNOVATION INC.
- Kevin Eduard HEIDRICH
- G01 - MEASURING TESTING
Information Patent Application
OVERLAY CORRECTION FOR ADVANCED INTEGRATED-CIRCUIT DEVICES
- Publication number 20240219825
- Publication date Jul 4, 2024
- ONTO INNOVATION INC.
- Keith F. Best
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STAGE ACTUATOR PARTICLE SHIELD
- Publication number 20240186176
- Publication date Jun 6, 2024
- ONTO INNOVATION INC.
- Paul Yamasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT DETECTION IN MANUFACTURED ARTICLES USING MULTI-CHANNEL IMAGES
- Publication number 20240169514
- Publication date May 23, 2024
- ONTO INNOVATION INC.
- Longjiang Xiang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMBINED MODELING AND MACHINE LEARNING IN OPTICAL METROLOGY
- Publication number 20240159656
- Publication date May 16, 2024
- ONTO INNOVATION INC.
- Pei Fen Teh
- G01 - MEASURING TESTING
Information Patent Application
COMPOSITE DATA FOR DEVICE METROLOGY
- Publication number 20240111256
- Publication date Apr 4, 2024
- ONTO INNOVATION INC.
- Haodong Qiu
- G01 - MEASURING TESTING
Information Patent Application
Parameter Aggregation and Normalization for Manufacturing Tools
- Publication number 20240095307
- Publication date Mar 21, 2024
- ONTO INNOVATION INC.
- Joshua Michael Holt
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE DEFECT-DETECTION AND COMPARISON
- Publication number 20240062361
- Publication date Feb 22, 2024
- ONTO INNOVATION INC.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS TO CHARACTERIZE SUBSTRATES AND FILMS
- Publication number 20240027186
- Publication date Jan 25, 2024
- ONTO INNOVATION INC.
- Jian Ding
- G01 - MEASURING TESTING
Information Patent Application
PERIODIC-PATTERN BACKGROUND REMOVAL
- Publication number 20240020819
- Publication date Jan 18, 2024
- ONTO INNOVATION INC.
- Roman S. Basistyy
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MITIGATION OF UNDESIRED SPECTRAL EFFECTS IN OPTICAL METROLOGY
- Publication number 20240011921
- Publication date Jan 11, 2024
- ONTO INNOVATION INC.
- Petar Zuvela
- G01 - MEASURING TESTING
Information Patent Application
A SYSTEM AND METHOD FOR PERFORMING ALIGNMENT AND OVERLAY MEASUREMEN...
- Publication number 20240004311
- Publication date Jan 4, 2024
- ONTO INNOVATION INC.
- Manjusha Mehendale
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTIPLE SOURCES OF SIGNALS FOR HYBRID METROLOGY USING PHYSICAL MOD...
- Publication number 20230418995
- Publication date Dec 28, 2023
- ONTO INNOVATION INC.
- Jie Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METROLOGY SOLUTIONS FOR COMPLEX STRUCTURES OF INTEREST
- Publication number 20230417682
- Publication date Dec 28, 2023
- ONTO INNOVATION INC.
- Jingsheng SHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
OPTICAL METROLOGY WITH NUISANCE FEATURE MITIGATION
- Publication number 20230402328
- Publication date Dec 14, 2023
- ONTO INNOVATION INC.
- Jonathan Andrew Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MULTIPLE SOURCE EXCITATION RAMAN SPECTROSCOPY
- Publication number 20230324303
- Publication date Oct 12, 2023
- ONTO INNOVATION INC.
- George Andrew ANTONELLI
- G02 - OPTICS
Information Patent Application
LOW NUMERICAL APERTURE ALIGNMENT
- Publication number 20230314967
- Publication date Oct 5, 2023
- ONTO INNOVATION INC.
- J. Casey Donaher
- G06 - COMPUTING CALCULATING COUNTING

Trademarklast 30 trademarks

Information Trademark
97318714 - DISCOVER
- Serial number 97318714
- Registration number 7381620
- Filing date Mar 18, 2022
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97316638 - ATLAS
- Serial number 97316638
- Registration number 7027924
- Filing date Mar 17, 2022
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97316640 - METAPULSE
- Serial number 97316640
- Registration number 6951613
- Filing date Mar 17, 2022
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97313388 - NSX
- Serial number 97313388
- Registration number 7057228
- Filing date Mar 15, 2022
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97308052 - ONTO
- Serial number 97308052
- Filing date Mar 11, 2022
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97308042 - RUDOLPH TECHNOLOGIES
- Serial number 97308042
- Filing date Mar 11, 2022
- Onto Innovation Inc.
- 7 - Machines and machine tools
Information Trademark
97308055 - ONTO INNOVATION
- Serial number 97308055
- Filing date Mar 11, 2022
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97308063 - ONTO INNOVATION
- Serial number 97308063
- Filing date Mar 11, 2022
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
97308047 - NANOMETRICS
- Serial number 97308047
- Registration number 7444130
- Filing date Mar 11, 2022
- ONTO INNOVATION INC.
- 7 - Machines and machine tools
Information Trademark
97201525 - SURFSPEC
- Serial number 97201525
- Registration number 7170914
- Filing date Jan 4, 2022
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90863066 - IVISION
- Serial number 90863066
- Filing date Aug 3, 2021
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90817217 - ONTO INNOVATION
- Serial number 90817217
- Registration number 6666767
- Filing date Jul 8, 2021
- ONTO INNOVATION INC.
- 7 - Machines and machine tools
Information Trademark
90555023 - ONTO
- Serial number 90555023
- Registration number 7231267
- Filing date Mar 2, 2021
- ONTO INNOVATION INC.
- 7 - Machines and machine tools
Information Trademark
90479624 - IRIS
- Serial number 90479624
- Registration number 7495689
- Filing date Jan 21, 2021
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90450352 - ECHO
- Serial number 90450352
- Filing date Jan 6, 2021
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90367243 - REFLEX
- Serial number 90367243
- Registration number 7270100
- Filing date Dec 8, 2020
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
90103469 - AI DIFFRACT
- Serial number 90103469
- Registration number 7289139
- Filing date Aug 10, 2020
- ONTO INNOVATION INC.
- 42 - Scientific and technological services and research and design relating thereto
Information Trademark
90004454 - ELEMENT
- Serial number 90004454
- Filing date Jun 16, 2020
- Onto Innovation Inc.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88852248 - ASPECT
- Serial number 88852248
- Registration number 6296836
- Filing date Mar 30, 2020
- ONTO INNOVATION INC.
- 9 - Scientific, nautical, surveying, photographic, cinematographic, optical, weighing, measuring, signalling, checking (supervision), life-saving and teaching apparatus and instruments
Information Trademark
88640856 - ONTO INNOVATION
- Serial number 88640856
- Registration number 6479639
- Filing date Oct 3, 2019
- ONTO INNOVATION INC.
- 7 - Machines and machine tools
Information Trademark
88168607 - STEPFAST
- Serial number 88168607
- Registration number 6289921
- Filing date Oct 25, 2018
- ONTO INNOVATION INC.
- 7 - Machines and machine tools

ONTO INNOVATION INC

Organization

Patents Grantslast 30 patents

High resolution multispectral multi-field-of-view imaging system fo...

Substrate mapping using deep neural-networks

Semiconductor substrate yield prediction based on spectra data from...

Non-destructive inspection and manufacturing metrology systems and...

Measurements of structures in presence of signal contaminations

Effective cell approximation model for logic structures

Characterization of patterned structures using acoustic metrology

Enhanced heat transfer in liquefied gas cooled detector

Apparatus and method for multiple source excitation Raman spectroscopy

Wafer-level package assembly handling

Target for optical measurement of trenches

System and method for correcting overlay errors in a lithographic p...

Opto-acoustic measurement of a transparent film stack

Wafer inspection system including a laser triangulation sensor

System and method for optimizing a lithography exposure process

Beamsplitter based ellipsometer focusing system

Interferometry with pixelated color discriminating elements combine...

Conformal stage

Vortex polarimeter

Fast generalized multi-wavelength ellipsometer

Focus system for oblique optical metrology device

Wafer singulation process control

Active damper for semiconductor metrology and inspection systems

On-axis dynamic interferometer and optical imaging systems employin...

Optical metrology device using numerical aperture reduction

Sample surface polarization modification in interferometric defect...

System and method for optimizing a lithography exposure process

Calibration of azimuth angle for optical metrology stage using grat...

Sample inspection using topography

Sub-resolution defect detection

Patents Applicationslast 30 patents

SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKS

OPTICAL METROLOGY WITH INFLUENCE MAP OF UNKNOWN SECTION

PHOTO RESPONSE NON-UNIFORMITY CORRECTION DURING SEMICONDUCTOR INSPE...

NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND...

TRACKING AND/OR PREDICTING SUBSTRATE YIELD DURING FABRICATION

SYSTEM AND METHOD FOR FAST MICROSCOPY

MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY

SUBSTRATE EDGE PATTERNING TECHNIQUES

TRANSFER LEARNING FOR METROLOGY DATA ANALYSIS

POST-OVERLAY COMPENSATION ON LARGE-FIELD PACKAGING

PERFORMANCE MANAGEMENT OF SEMICONDUCTOR SUBSTRATE TOOLS

ADAPTIVE SPATIAL PATTERN RECOGNITION FOR DEFECT DETECTION

INTERFEROMETER WITH AUXILIARY LENS FOR MEASUREMENT OF A TRANSPARENT...

MASK AND PROCEDURE FOR PROCESS PERFORMANCE DETECTION

OVERLAY CORRECTION FOR ADVANCED INTEGRATED-CIRCUIT DEVICES

STAGE ACTUATOR PARTICLE SHIELD

DEFECT DETECTION IN MANUFACTURED ARTICLES USING MULTI-CHANNEL IMAGES

COMBINED MODELING AND MACHINE LEARNING IN OPTICAL METROLOGY

COMPOSITE DATA FOR DEVICE METROLOGY

Parameter Aggregation and Normalization for Manufacturing Tools

SUBSTRATE DEFECT-DETECTION AND COMPARISON

APPARATUS TO CHARACTERIZE SUBSTRATES AND FILMS

PERIODIC-PATTERN BACKGROUND REMOVAL

MITIGATION OF UNDESIRED SPECTRAL EFFECTS IN OPTICAL METROLOGY

A SYSTEM AND METHOD FOR PERFORMING ALIGNMENT AND OVERLAY MEASUREMEN...

MULTIPLE SOURCES OF SIGNALS FOR HYBRID METROLOGY USING PHYSICAL MOD...

METROLOGY SOLUTIONS FOR COMPLEX STRUCTURES OF INTEREST

OPTICAL METROLOGY WITH NUISANCE FEATURE MITIGATION

APPARATUS AND METHOD FOR MULTIPLE SOURCE EXCITATION RAMAN SPECTROSCOPY

LOW NUMERICAL APERTURE ALIGNMENT

Trademarklast 30 trademarks

97318714 - DISCOVER

97316638 - ATLAS

97316640 - METAPULSE

97313388 - NSX

97308052 - ONTO

97308042 - RUDOLPH TECHNOLOGIES

97308055 - ONTO INNOVATION

97308063 - ONTO INNOVATION

97308047 - NANOMETRICS

97201525 - SURFSPEC

90863066 - IVISION

90817217 - ONTO INNOVATION

90555023 - ONTO

90479624 - IRIS

90450352 - ECHO