TimeDomain CVD Incorporated

Organizations

Please log in for detailed analytics

Patents Grantslast 30 patents

Please log in for detailed analytics

processing...

Count: 5

Information NSF Award
SBIR Phase I: Atmospheric Pressure Deep Etch for MEMS Manufacturing...
- Award Id 0839272
- Effective date Jan 1, 2009
Information NSF Award
SBIR Phase I: Nanoporous Nano-laminated Ultra Low-K Dielectric
- Award Id 0741024
- Effective date Jan 1, 2008
Information NSF Award
SBIR Phase I: Atmospheric Pressure Molecular Layer CVD
- Award Id 0539333
- Effective date Jan 1, 2006
Information NSF Award
SBIR Phase I: Inductive Thermal Plasmas for Ultrahigh Throughput So...
- Award Id 9960809
- Effective date Jan 1, 2000
Information NSF Award
SBIR Phase I: Molecular Layer Chemical Vapor Deposition for Advance...
- Award Id 9860994
- Effective date Jan 1, 1999