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Abdul Rahim Forouhi
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Cupertino, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Combined transmittance and angle selective scattering measurement o...
Patent number
7,999,936
Issue date
Aug 16, 2011
n&k Technology, Inc.
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Grant
Integrated local and global optical metrology for samples having mi...
Patent number
7,397,030
Issue date
Jul 8, 2008
n&k Technology, Inc.
Mehdi Balooch
G01 - MEASURING TESTING
Information
Patent Grant
System and method for high intensity small spot optical metrology
Patent number
7,349,103
Issue date
Mar 25, 2008
n & k Technology, Inc.
Mehdi Balooch
G01 - MEASURING TESTING
Information
Patent Grant
Spectrophotometric system with reduced angle of incidence
Patent number
7,330,256
Issue date
Feb 12, 2008
n & k Technology, Inc.
Marc Aho
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for optical characterization of a sample over...
Patent number
7,327,457
Issue date
Feb 5, 2008
n & k Technology, Inc.
Ray Hebert
G02 - OPTICS
Information
Patent Grant
System and method for measuring overlay alignment using diffraction...
Patent number
7,289,214
Issue date
Oct 30, 2007
n & k Technology, Inc.
Guoguang Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase shift measurement using transmittance spectra
Patent number
7,253,909
Issue date
Aug 7, 2007
n & k Technology, Inc.
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for optical characterization of a sample over...
Patent number
7,248,364
Issue date
Jul 24, 2007
n & k Technology, Inc.
Ray Hebert
G02 - OPTICS
Information
Patent Grant
Method and apparatus for examining features on semi-transparent and...
Patent number
6,891,628
Issue date
May 10, 2005
n & k Technology, Inc.
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Grant
Computer-implemented reflectance system and method for non-destruct...
Patent number
6,825,933
Issue date
Nov 30, 2004
n & k Technology, Inc.
Jeff Roberts
G01 - MEASURING TESTING
Information
Patent Grant
Method of inferring optical parameters outside of a measurement spe...
Patent number
6,710,865
Issue date
Mar 23, 2004
n & k Technology, Inc.
Abdul Rahim Forouhi
G01 - MEASURING TESTING
Information
Patent Grant
Method of monitoring thin-film processes and metrology tool thereof
Patent number
6,594,025
Issue date
Jul 15, 2003
N&K Technology. Inc.
Abdul Rahim Forouhi
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for optically determining physical parameters...
Patent number
6,392,756
Issue date
May 21, 2002
n & k Technology, Inc.
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Grant
Graded anti-reflective coatings for photolithography
Patent number
6,379,014
Issue date
Apr 30, 2002
n & k Technology, Inc.
Guoguang Li
G02 - OPTICS
Information
Patent Grant
Method and apparatus for optically examining miniature patterns
Patent number
6,327,035
Issue date
Dec 4, 2001
NSH Technology, Inc.
Guoguang Li
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Reflectance spectroscopic apparatus with toroidal mirrors
Patent number
6,128,085
Issue date
Oct 3, 2000
n & k Technology, Inc.
Dale Buermann
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for optically determining physical parameters...
Patent number
6,091,485
Issue date
Jul 18, 2000
n & k Technology, Inc.
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Grant
Optical devices having toroidal mirrors for performing reflectance...
Patent number
6,075,612
Issue date
Jun 13, 2000
n & k Technology, Inc.
Michael J. Mandella
G01 - MEASURING TESTING
Information
Patent Grant
Reflectance spectrophotometric apparatus with toroidal mirrors
Patent number
5,991,022
Issue date
Nov 23, 1999
n & k Technology, Inc.
Dale Buermann
G01 - MEASURING TESTING
Information
Patent Grant
Reflectance spectrophotometric apparatus with optical relay
Patent number
5,880,831
Issue date
Mar 9, 1999
n & k Technology, Inc.
Dale Buermann
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Apparatus and method for optical characterization of a sample over...
Publication number
20050134847
Publication date
Jun 23, 2005
Ray Hebert
G02 - OPTICS
Information
Patent Application
Apparatus and method for optical characterization of a sample over...
Publication number
20050134848
Publication date
Jun 23, 2005
Ray Hebert
G02 - OPTICS
Information
Patent Application
METHOD AND APPARATUS FOR EXAMINING FEATURES ON SEMI-TRANSPARENT AND...
Publication number
20040263850
Publication date
Dec 30, 2004
Guoguang Li
G01 - MEASURING TESTING
Information
Patent Application
Computer-implemented reflectance system and method for non-destruct...
Publication number
20030227630
Publication date
Dec 11, 2003
Jeff Roberts
G01 - MEASURING TESTING
Information
Patent Application
Method of monitoring thin-film processes and metrology tool thereof
Publication number
20030053081
Publication date
Mar 20, 2003
Abdul Rahim Forouhi
G01 - MEASURING TESTING
Information
Patent Application
Method of inferring optical parameters outside of a measurement spe...
Publication number
20020113957
Publication date
Aug 22, 2002
Abdul Rahim Forouhi
G01 - MEASURING TESTING
Information
Patent Application
Graded anti-reflective coatings for photolithography
Publication number
20020097493
Publication date
Jul 25, 2002
Guoguang Li
G02 - OPTICS