Claims
- 1. An apparatus for characterizing optical properties of a sample, the apparatus comprising:
- a) a light source for generating light in a broadband optical beam,
- b) optics positioned to image the light source on the sample,
- c) a first toroidal mirror positioned to collect the light reflected by a measurement area of the sample,
- d) a second toroidal mirror positioned to receive the light and to image the measurement area on an entrance aperture of a spectroscopic device, and
- e) a polarizing means for selecting a polarization of the light.
- 2. The apparatus of claim 1, wherein said polarizing means comprises a polarizer positioned in the path of the light reflected by the measurement area.
- 3. The apparatus of claim 1, wherein said polarizing means comprises a first polarizer positioned in the path of the light in the broadband optical beam.
- 4. The apparatus of claim 3, wherein said polarizing means further comprises a second polarizer positioned in the path of the light reflected by the measurement area.
- 5. The apparatus of claim 3, wherein said polarizing means further comprises a rotatable polarization analyzer positioned in the path of the light reflected by the measurement area.
- 6. The apparatus of claim 1, wherein the broadband optical beam has wavelengths lying in a range between 190 nm and 1100 nm.
- 7. The apparatus of claim 1, wherein the light reflected by the measurement area of the sample has a plurality of angles of reflection from the sample, the angles lying in the range between 0 and 89 degrees.
- 8. The apparatus of claim 1, wherein the spectroscopic device is a spectroscopic ellipsometer.
- 9. An apparatus for characterizing optical properties of a sample using spectroscopy, the apparatus comprising:
- a) a light source for generating light in a broadband optical beam,
- b) optics positioned to cause the broadband optical beam to strike the sample,
- c) a spectroscopic device having an entrance aperture,
- d) an optical relay for collecting the light reflected by a measurement area of the sample and for directing the light to the entrance aperture, the optical relay comprising first and second toroidal mirrors, and
- e) a polarizing means for selecting a polarization of the light.
- 10. The apparatus of claim 9, wherein said polarizing means comprises a polarizer positioned in the path of the light reflected by the measurement area.
- 11. The apparatus of claim 9, wherein said polarizing means comprises a first polarizer positioned in the path of the light in the broadband optical beam.
- 12. The apparatus of claim 11, wherein said polarizing means further comprises a second polarizer positioned in the path of the light reflected by the measurement area.
- 13. The apparatus of claim 11, wherein said polarizing means further comprises a rotatable polarization analyzer positioned in the path of the light reflected by the measurement area.
- 14. The apparatus of claim 9, wherein the broadband optical beam has wavelengths lying in a range between 190 nm and 1100 nm.
- 15. The apparatus of claim 9, wherein the light reflected by the measurement area of the sample has a plurality of angles of reflection from the sample, the angles lying in the range between 0 and 89 degrees.
- 16. The apparatus of claim 9, wherein the spectroscopic device is a spectroscopic ellipsometer.
RELATED APPLICATION DATA
This application is a continuation-in-part of application Ser. No. 09/079,875, filed on May 15, 1998 now U.S. Pat. No. 5,991,022, which is a continuation-in-part of application Ser. No. 08/987,907, filed on Dec. 9, 1997 now U.S. Pat. No. 5,880,831.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
5184191 |
Krishnan |
Feb 1993 |
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Continuation in Parts (2)
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Number |
Date |
Country |
Parent |
079875 |
May 1998 |
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Parent |
987907 |
Dec 1997 |
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