Anthony de la Llera

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Showerhead faceplates with angled gas distribution passages for sem...
- Patent number 12,139,791
- Issue date Nov 12, 2024
- Lam Research Corporation
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi zone gas injection upper electrode system
- Patent number 11,594,400
- Issue date Feb 28, 2023
- Lam Research Corporation
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge-clamped and mechanically fastened inner electrode of showerhea...
- Patent number 10,262,834
- Issue date Apr 16, 2019
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual zone temperature control of upper electrodes
- Patent number 9,263,240
- Issue date Feb 16, 2016
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge-clamped and mechanically fastened inner electrode of showerhea...
- Patent number 9,245,716
- Issue date Jan 26, 2016
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Gas feed insert in a plasma processing chamber and methods therefor
- Patent number 9,111,731
- Issue date Aug 18, 2015
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 9,093,483
- Issue date Jul 28, 2015
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma confinement ring assembly for plasma processing chambers
- Patent number 9,076,826
- Issue date Jul 7, 2015
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Movable grounding arrangements in a plasma processing chamber and m...
- Patent number 8,847,495
- Issue date Sep 30, 2014
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 8,709,202
- Issue date Apr 29, 2014
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assembly with gas flow modification for extend...
- Patent number 8,702,866
- Issue date Apr 22, 2014
- Lam Research Corporation
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cam lock electrode clamp
- Patent number 8,628,268
- Issue date Jan 14, 2014
- Lam Research Corporation
- Michael C. Kellogg
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Showerhead electrode
- Patent number 8,573,152
- Issue date Nov 5, 2013
- Lam Research Corporation
- Anthony de la Llera
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cam-locked showerhead electrode and assembly
- Patent number 8,470,127
- Issue date Jun 25, 2013
- Lam Research Corporation
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped monolithic showerhead electrode
- Patent number 8,419,959
- Issue date Apr 16, 2013
- Lam Research Corporation
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode with centering feature
- Patent number 8,402,918
- Issue date Mar 26, 2013
- Lam Research Corporation
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped showerhead electrode assembly
- Patent number 8,313,805
- Issue date Nov 20, 2012
- Lam Research Corporation
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode assemblies for plasma processing apparatuses
- Patent number 8,313,665
- Issue date Nov 20, 2012
- Lam Research Corporation
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead electrode
- Patent number 8,206,506
- Issue date Jun 26, 2012
- Lam Research Corporation
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clamped showerhead electrode assembly
- Patent number 8,161,906
- Issue date Apr 24, 2012
- Lam Research Corporation
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper electrode backing member with particle reducing features
- Patent number 7,854,820
- Issue date Dec 21, 2010
- Lam Research Corporation
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding and spinning assembly and methods for making the...
- Patent number 7,226,055
- Issue date Jun 5, 2007
- Lam Research Corporation
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air platen for leading edge and trailing edge control
- Patent number 7,018,276
- Issue date Mar 28, 2006
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Gimballed conditioning apparatus
- Patent number 6,949,016
- Issue date Sep 27, 2005
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Air platen for leading edge and trailing edge control
- Patent number 6,761,626
- Issue date Jul 13, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head assembly in an apparatus for chemical mechanical pla...
- Patent number 6,746,313
- Issue date Jun 8, 2004
- Lam Research Corporation
- Xuyen Pham
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for applying downward force on wafer during CMP
- Patent number 6,712,670
- Issue date Mar 30, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...
- Publication number 20250054778
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Anthony DE LA LLERA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20250043425
- Publication date Feb 6, 2025
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC FIELD CONTROL SYSTEM
- Publication number 20230282455
- Publication date Sep 7, 2023
- LAM RESEARCH CORPORATION
- Alecia Chantalle Griffin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS
- Publication number 20230260768
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Theodoros Panagopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20230243034
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL
- Publication number 20230063007
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- John Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION FACEPLATE WITH OBLIQUE FLOW PATHS
- Publication number 20230057217
- Publication date Feb 23, 2023
- LAM RESEARCH CORPORATION
- Henry Stephen Povolny
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
DUAL-PHASE COOLING IN SEMICONDUCTOR MANUFACTURING
- Publication number 20220005675
- Publication date Jan 6, 2022
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM
- Publication number 20200243307
- Publication date Jul 30, 2020
- LAM RESEARCH CORPORATION
- Ryan Bise
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...
- Publication number 20160086776
- Publication date Mar 24, 2016
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...
- Publication number 20140187049
- Publication date Jul 3, 2014
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FEED INSERT IN A PLASMA PROCESSING CHAMBER AND METHODS THEREFOR
- Publication number 20130134138
- Publication date May 30, 2013
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOVABLE GROUNDING ARRANGEMENTS IN A PLASMA PROCESSING CHAMBER AND M...
- Publication number 20130134876
- Publication date May 30, 2013
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY
- Publication number 20120175062
- Publication date Jul 12, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS
- Publication number 20120073754
- Publication date Mar 29, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE
- Publication number 20120055632
- Publication date Mar 8, 2012
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...
- Publication number 20110083809
- Publication date Apr 14, 2011
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES
- Publication number 20110086513
- Publication date Apr 14, 2011
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES
- Publication number 20110081783
- Publication date Apr 7, 2011
- LAM RESEARCH CORPORATION
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE
- Publication number 20110070740
- Publication date Mar 24, 2011
- LAM RESEARCH CORPORATION
- Gregory R. Bettencourt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CAM LOCK ELECTRODE CLAMP
- Publication number 20110042879
- Publication date Feb 24, 2011
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Showerhead electrode
- Publication number 20100000683
- Publication date Jan 7, 2010
- LAM RESEARCH CORPORATION
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Clamped showerhead electrode assembly
- Publication number 20100003824
- Publication date Jan 7, 2010
- LAM RESEARCH CORPORATION
- Babak Kadkhodayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Showerhead electrode assemblies for plasma processing apparatuses
- Publication number 20080308228
- Publication date Dec 18, 2008
- LAM RESEARCH CORPORATION
- Thomas R. Stevenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Showerhead electrode assembly with gas flow modification for extend...
- Publication number 20080141941
- Publication date Jun 19, 2008
- LAM RESEARCH CORPORATION
- Jason Augustino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Components for a plasma processing apparatus
- Publication number 20080087641
- Publication date Apr 17, 2008
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Upper electrode backing member with particle reducing features
- Publication number 20080090417
- Publication date Apr 17, 2008
- LAM RESEARCH CORPORATION
- Anthony De La Llera
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Air platen for leading edge and trailing edge control
- Publication number 20040242136
- Publication date Dec 2, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for applying downward force on wafer during CMP
- Publication number 20030139115
- Publication date Jul 24, 2003
- LAM RESEARCH CORPORATION
- Anthony de la Llera
- B24 - GRINDING POLISHING

Anthony de la Llera

Person

Patents Grantslast 30 patents

Showerhead faceplates with angled gas distribution passages for sem...

Multi zone gas injection upper electrode system

Edge-clamped and mechanically fastened inner electrode of showerhea...

Dual zone temperature control of upper electrodes

Edge-clamped and mechanically fastened inner electrode of showerhea...

Gas feed insert in a plasma processing chamber and methods therefor

Showerhead electrode assembly with gas flow modification for extend...

Plasma confinement ring assembly for plasma processing chambers

Movable grounding arrangements in a plasma processing chamber and m...

Upper electrode backing member with particle reducing features

Showerhead electrode assembly with gas flow modification for extend...

Cam lock electrode clamp

Showerhead electrode

Cam-locked showerhead electrode and assembly

Clamped monolithic showerhead electrode

Showerhead electrode with centering feature

Clamped showerhead electrode assembly

Showerhead electrode assemblies for plasma processing apparatuses

Showerhead electrode

Clamped showerhead electrode assembly

Upper electrode backing member with particle reducing features

Substrate holding and spinning assembly and methods for making the...

Air platen for leading edge and trailing edge control

Gimballed conditioning apparatus

Air platen for leading edge and trailing edge control

Polishing head assembly in an apparatus for chemical mechanical pla...

Method and apparatus for applying downward force on wafer during CMP

Patents Applicationslast 30 patents

IMPROVED THERMAL AND ELECTRICAL INTERFACE BETWEEN PARTS IN AN ETCH...

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

MAGNETIC FIELD CONTROL SYSTEM

PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL

GAS DISTRIBUTION FACEPLATE WITH OBLIQUE FLOW PATHS

DUAL-PHASE COOLING IN SEMICONDUCTOR MANUFACTURING

MULTI ZONE GAS INJECTION UPPER ELECTRODE SYSTEM

EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...

SHOWERHEAD ELECTRODE ASSEMBLY WITH GAS FLOW MODIFICATION FOR EXTEND...

GAS FEED INSERT IN A PLASMA PROCESSING CHAMBER AND METHODS THEREFOR

MOVABLE GROUNDING ARRANGEMENTS IN A PLASMA PROCESSING CHAMBER AND M...

CAM-LOCKED SHOWERHEAD ELECTRODE AND ASSEMBLY

PLASMA CONFINEMENT RING ASSEMBLY FOR PLASMA PROCESSING CHAMBERS

SHOWERHEAD ELECTRODE

EDGE-CLAMPED AND MECHANICALLY FASTENED INNER ELECTRODE OF SHOWERHEA...

UPPER ELECTRODE BACKING MEMBER WITH PARTICLE REDUCING FEATURES

SHOWERHEAD ELECTRODE ASSEMBLIES FOR PLASMA PROCESSING APPARATUSES

CLAMPED MONOLITHIC SHOWERHEAD ELECTRODE

CAM LOCK ELECTRODE CLAMP

Showerhead electrode

Clamped showerhead electrode assembly

Showerhead electrode assemblies for plasma processing apparatuses

Showerhead electrode assembly with gas flow modification for extend...

Components for a plasma processing apparatus

Upper electrode backing member with particle reducing features

Air platen for leading edge and trailing edge control

Method and apparatus for applying downward force on wafer during CMP