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Antti Niskanen

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  • Helsinki, FI
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    DEPOSITION OF OXIDE THIN FILMS
    • Publication number 20250037995
    • Publication date Jan 30, 2025
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND SYSTEMS FOR PRECURSOR LEVEL MONITORING
    • Publication number 20240425985
    • Publication date Dec 26, 2024
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD AND SYSTEM FOR DEPOSITING BORON CARBON NITRIDE
    • Publication number 20240222115
    • Publication date Jul 4, 2024
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSITION METAL DEPOSITION METHOD
    • Publication number 20240133032
    • Publication date Apr 25, 2024
    • ASM IP HOLDING B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESSING CHAMBER, ASSEMBLY AND A METHOD
    • Publication number 20230170187
    • Publication date Jun 1, 2023
    • ASM IP HOLDING, B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR FORMING DOPED SILICON OXIDE THIN FILMS
    • Publication number 20230031720
    • Publication date Feb 2, 2023
    • ASM INTERNATIONAL N.V.
    • Noboru Takamure
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DEPOSITION OF OXIDE THIN FILMS
    • Publication number 20220367173
    • Publication date Nov 17, 2022
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    APPARATUSES FOR THIN FILM DEPOSITION
    • Publication number 20220341040
    • Publication date Oct 27, 2022
    • ASM IP HOLDING B.V.
    • Jun Kawahara
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Container for efficient vaporization of precursor materials and met...
    • Publication number 20220205088
    • Publication date Jun 30, 2022
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TRANSITION METAL DEPOSITION METHOD
    • Publication number 20220195599
    • Publication date Jun 23, 2022
    • ASM IP HOLDING B.V.
    • Charles Dezelah
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS
    • Publication number 20220193720
    • Publication date Jun 23, 2022
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    GAS-PHASE CHEMICAL REACTOR AND METHOD OF USING SAME
    • Publication number 20220178025
    • Publication date Jun 9, 2022
    • ASM IP HOLDING B.V.
    • Antti Juhani Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SELECTIVE DEPOSITION USING HYDROPHOBIC PRECURSORS
    • Publication number 20210351031
    • Publication date Nov 11, 2021
    • ASM IP HOLDING B.V.
    • Elina Färm
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DUAL SELECTIVE DEPOSITION
    • Publication number 20210285097
    • Publication date Sep 16, 2021
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20210082684
    • Publication date Mar 18, 2021
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS FOR FORMING DOPED SILICON OXIDE THIN FILMS
    • Publication number 20200388487
    • Publication date Dec 10, 2020
    • ASM INTERNATIONAL N.V.
    • Noboru Takamure
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Deposition of SiN
    • Publication number 20200365392
    • Publication date Nov 19, 2020
    • ASM IP HOLDING B.V.
    • Shang Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    REMOVAL OF SURFACE PASSIVATION
    • Publication number 20200365416
    • Publication date Nov 19, 2020
    • ASM IP HOLDING B.V.
    • ANTTI JUHANI NISKANEN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS FOR DEPOSITING THIN FILMS COMPRISING INDIUM NITRIDE BY ATOM...
    • Publication number 20200335342
    • Publication date Oct 22, 2020
    • ASM INTERNATIONAL N.V.
    • Suvi Haukka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REACTION CHAMBER PASSIVATION AND SELECTIVE DEPOSITION OF METALLIC F...
    • Publication number 20200291511
    • Publication date Sep 17, 2020
    • ASM IP HOLDING B.V.
    • Delphine Longrie
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ORGANIC REACTANTS FOR ATOMIC LAYER DEPOSITION
    • Publication number 20200224311
    • Publication date Jul 16, 2020
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Methods for forming silicon nitride thin films
    • Publication number 20200203145
    • Publication date Jun 25, 2020
    • ASM IP HOLDING B.V.
    • Antti Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS FOR FORMING DOPED SILICON OXIDE THIN FILMS
    • Publication number 20200185218
    • Publication date Jun 11, 2020
    • ASM INTERNATIONAL N.V.
    • Noboru Takamure
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DUAL SELECTIVE DEPOSITION
    • Publication number 20200181766
    • Publication date Jun 11, 2020
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SELECTIVE DEPOSITION OF METALS, METAL OXIDES, AND DIELECTRICS
    • Publication number 20200122191
    • Publication date Apr 23, 2020
    • ASM IP HOLDING B.V.
    • Suvi P. Haukka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TEMPERATURE-INDEXED THIN FILM DEPOSITION REACTORS
    • Publication number 20200071828
    • Publication date Mar 5, 2020
    • ASM IP HOLDING B.V.
    • Bert Jongbloed
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20200013611
    • Publication date Jan 9, 2020
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS-PHASE CHEMICAL REACTOR AND METHOD OF USING SAME
    • Publication number 20190376180
    • Publication date Dec 12, 2019
    • ASM IP HOLDING B.V.
    • Antti Juhani Niskanen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES
    • Publication number 20190371594
    • Publication date Dec 5, 2019
    • ASM IP HOLDING B.V.
    • Antti J. Niskanen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Deposition of SiN
    • Publication number 20190295838
    • Publication date Sep 26, 2019
    • ASM IP HOLDING B.V.
    • Shang Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...