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ARAVIND MIYAR KAMATH
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate position calibration for substrate supports in substrate...
Patent number
12,228,395
Issue date
Feb 18, 2025
Applied Materials, Inc.
Tomoharu Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Top magnets for decreased non-uniformity in PVD
Patent number
12,112,890
Issue date
Oct 8, 2024
Applied Materials, Inc.
Borui Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
Patent number
11,939,666
Issue date
Mar 26, 2024
Applied Materials, Inc.
Xiangjin Xie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process shield for a substrate processing chamber
Patent number
D942516
Issue date
Feb 1, 2022
Applied Materials, Inc.
Manjunatha P. Koppa
D15 - Machines not elsewhere specified
Information
Patent Grant
Substrate position calibration for substrate supports in substrate...
Patent number
11,201,078
Issue date
Dec 14, 2021
Applied Materials, Inc.
Tomoharu Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition ring for a substrate processing chamber
Patent number
D933725
Issue date
Oct 19, 2021
Applied Materials, Inc.
Manjunatha P. Koppa
D15 - Machines not elsewhere specified
Information
Patent Grant
Lift pin assembly
Patent number
10,892,180
Issue date
Jan 12, 2021
Applied Materials, Inc.
Bonnie T. Chia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process shield for a substrate processing chamber
Patent number
D891382
Issue date
Jul 28, 2020
Applied Materials, Inc.
Manjunatha P. Koppa
D13 - Equipment for production, distribution, or transformation of energy
Information
Patent Grant
Substrate support with improved RF return
Patent number
10,134,615
Issue date
Nov 20, 2018
Applied Materials, Inc.
Aravind Miyar Kamath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate support with multiple heating zones
Patent number
9,888,528
Issue date
Feb 6, 2018
Applied Materials, Inc.
Tomoharu Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
Publication number
20240183028
Publication date
Jun 6, 2024
Applied Materials, Inc.
Xiangjin XIE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process Chamber And Process Kits For Advanced Packaging
Publication number
20230307211
Publication date
Sep 28, 2023
Applied Materials, Inc.
Aravind Miyar Kamath
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOP MAGNETS FOR DECREASED NON-UNIFORMITY IN PVD
Publication number
20230088552
Publication date
Mar 23, 2023
Applied Materials, Inc.
Borui Xia
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...
Publication number
20220099426
Publication date
Mar 31, 2022
Tomoharu MATSUSHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
Publication number
20210371972
Publication date
Dec 2, 2021
Applied Materials, Inc.
Xiangjin XIE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE POSITION CALIBRATION FOR SUBSTRATE SUPPORTS IN SUBSTRATE...
Publication number
20180233396
Publication date
Aug 16, 2018
TOMOHARU MATSUSHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT WITH IMPROVED RF RETURN
Publication number
20160240426
Publication date
Aug 18, 2016
Applied Materials, Inc.
ARAVIND MIYAR KAMATH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE SUPPORT WITH MULTIPLE HEATING ZONES
Publication number
20160192444
Publication date
Jun 30, 2016
Applied Materials, Inc.
TOMOHARU MATSUSHITA
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SUBSTRATE SUPPORT WITH MORE UNIFORM EDGE PURGE
Publication number
20160002778
Publication date
Jan 7, 2016
Applied Materials, Inc.
JALLEPALLY RAVI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
LIFT PIN ASSEMBLY
Publication number
20150348823
Publication date
Dec 3, 2015
Applied Materials, Inc.
BONNIE T. CHIA
H01 - BASIC ELECTRIC ELEMENTS