Cangshan Xu

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Air platen for leading edge and trailing edge control
- Patent number 7,018,276
- Issue date Mar 28, 2006
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Neural network control of chemical mechanical planarization
- Patent number 7,001,243
- Issue date Feb 21, 2006
- Lam Research Corporation
- Jingang Yi
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for edge polishing uniformity control
- Patent number 6,991,512
- Issue date Jan 31, 2006
- Lam Research Corporation
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for reducing slurry usage in a linear chemical mechanical p...
- Patent number 6,953,391
- Issue date Oct 11, 2005
- Lam Research Corporation
- Sabir A. Majumder
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for making reinforced wafer polishing pads and apparatuses...
- Patent number 6,949,020
- Issue date Sep 27, 2005
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for monitoring and controlling chemical mechanical planariz...
- Patent number 6,931,330
- Issue date Aug 16, 2005
- Lam Research Corporation
- Jingang Yi
- B24 - GRINDING POLISHING
Information Patent Grant
End point detection with imaging matching in semiconductor processing
- Patent number 6,930,782
- Issue date Aug 16, 2005
- Lam Research Corporation
- Jingang Yi
- B24 - GRINDING POLISHING
Information Patent Grant
Molded end point detection window for chemical mechanical planariza...
- Patent number 6,806,100
- Issue date Oct 19, 2004
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Fluid conserving platen for optimizing edge polishing
- Patent number 6,790,128
- Issue date Sep 14, 2004
- Lam Research Corporation
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Air platen for leading edge and trailing edge control
- Patent number 6,761,626
- Issue date Jul 13, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for controlling leading edge and trailing edge polishing
- Patent number 6,729,945
- Issue date May 4, 2004
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Platen assembly having a topographically altered platen surface
- Patent number 6,712,679
- Issue date Mar 30, 2004
- Lam Research Corporation
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Grant
Unsupported chemical mechanical polishing belt
- Patent number 6,656,030
- Issue date Dec 2, 2003
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Grooved rollers for a linear chemical mechanical planarization system
- Patent number 6,620,035
- Issue date Sep 16, 2003
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for making reinforced wafer polishing pads utilizing direct...
- Patent number 6,572,463
- Issue date Jun 3, 2003
- LAM Research Corp.
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Methods for making reinforced wafer polishing pads and apparatuses...
- Patent number 6,561,889
- Issue date May 13, 2003
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Method and system for measuring threshold length
- Patent number 6,552,812
- Issue date Apr 22, 2003
- Lam Research Corporation
- Cangshan Xu
- G01 - MEASURING TESTING
Information Patent Grant
Unsupported chemical mechanical polishing belt
- Patent number 6,406,363
- Issue date Jun 18, 2002
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Method of optimizing chemical mechanical planarization process
- Patent number 6,315,634
- Issue date Nov 13, 2001
- Lam Research Corporation
- Alan John Jensen
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Application of heated slurry for CMP
- Publication number 20040266192
- Publication date Dec 30, 2004
- LAM RESEARCH CORPORATION
- Gregory C. Lee
- B24 - GRINDING POLISHING
Information Patent Application
Air platen for leading edge and trailing edge control
- Publication number 20040242136
- Publication date Dec 2, 2004
- Lam Research Corporation
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Methods for making reinforced wafer polishing pads and apparatuses...
- Publication number 20030194963
- Publication date Oct 16, 2003
- LAM RESEARCH CORPORATION
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Application
GROOVED ROLLERS FOR A LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM
- Publication number 20030139124
- Publication date Jul 24, 2003
- Lam Research Corp.
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Application
Air platen for leading edge and trailing edge control
- Publication number 20030119433
- Publication date Jun 26, 2003
- Anthony de la Llera
- B24 - GRINDING POLISHING
Information Patent Application
Platen assembly having a topographically altered platen surface
- Publication number 20030032379
- Publication date Feb 13, 2003
- Lam Research Corportion
- Travis R. Taylor
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for edge polishing uniformity control
- Publication number 20020151256
- Publication date Oct 17, 2002
- Lam Research Corp.
- Travis Robert Taylor
- B24 - GRINDING POLISHING
Information Patent Application
Apparatus for controlling leading edge and trailing edge polishing
- Publication number 20020146972
- Publication date Oct 10, 2002
- Cangshan Xu
- B24 - GRINDING POLISHING
Information Patent Application
WINDOWLESS BELT AND METHOD FOR IMPROVED IN-SITU WAFER MONITORING
- Publication number 20020090819
- Publication date Jul 11, 2002
- CANGSHAN XU
- B24 - GRINDING POLISHING
Information Patent Application
Unsupported chemical mechanical polishing belt
- Publication number 20020068513
- Publication date Jun 6, 2002
- Lam Research Corporation
- Cangshan Xu
- B24 - GRINDING POLISHING

Cangshan Xu

Person

Patents Grantslast 30 patents

Air platen for leading edge and trailing edge control

Neural network control of chemical mechanical planarization

Apparatus for edge polishing uniformity control

Methods for reducing slurry usage in a linear chemical mechanical p...

Methods for making reinforced wafer polishing pads and apparatuses...

Methods for monitoring and controlling chemical mechanical planariz...

End point detection with imaging matching in semiconductor processing

Molded end point detection window for chemical mechanical planariza...

Fluid conserving platen for optimizing edge polishing

Air platen for leading edge and trailing edge control

Apparatus for controlling leading edge and trailing edge polishing

Platen assembly having a topographically altered platen surface

Unsupported chemical mechanical polishing belt

Grooved rollers for a linear chemical mechanical planarization system

Methods for making reinforced wafer polishing pads utilizing direct...

Methods for making reinforced wafer polishing pads and apparatuses...

Method and system for measuring threshold length

Unsupported chemical mechanical polishing belt

Method of optimizing chemical mechanical planarization process

Patents Applicationslast 30 patents

Application of heated slurry for CMP

Air platen for leading edge and trailing edge control

Methods for making reinforced wafer polishing pads and apparatuses...

GROOVED ROLLERS FOR A LINEAR CHEMICAL MECHANICAL PLANARIZATION SYSTEM

Air platen for leading edge and trailing edge control

Platen assembly having a topographically altered platen surface

Apparatus for edge polishing uniformity control

Apparatus for controlling leading edge and trailing edge polishing

WINDOWLESS BELT AND METHOD FOR IMPROVED IN-SITU WAFER MONITORING

Unsupported chemical mechanical polishing belt