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Berkeley, CA, US
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Patents Grants
last 30 patents
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Patent Grant
Methods for making hard masks useful in next-generation lithography
Patent number
11,921,427
Issue date
Mar 5, 2024
Lam Research Corporation
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
HALOGEN-AND ALIPHATIC-CONTAINING ORGANOTIN PHOTORESISTS AND METHODS...
Publication number
20240134274
Publication date
Apr 25, 2024
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST DEVELOPMENT WITH ORGANIC VAPOR
Publication number
20230416606
Publication date
Dec 28, 2023
LAM RESEARCH CORPORATION
Dries DICTUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PHOTO-SENSITIVE HYBRID FILMS
Publication number
20230314946
Publication date
Oct 5, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESISTS CONTAINING TANTALUM
Publication number
20230288798
Publication date
Sep 14, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL CHELATORS FOR DEVELOPMENT OF METAL-CONTAINING PHOTORESIST
Publication number
20230266670
Publication date
Aug 24, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESISTS FROM SN(II) PRECURSORS
Publication number
20230266664
Publication date
Aug 24, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRY DEPOSITED PHOTORESISTS WITH ORGANIC CO-REACTANTS
Publication number
20230259025
Publication date
Aug 17, 2023
LAM RESEARCH CORPORATION
Eric Calvin Hansen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRE-EXPOSURE PHOTORESIST CURING TO ENHANCE EUV LITHOGRAPHIC PERFORM...
Publication number
20230185196
Publication date
Jun 15, 2023
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE SURFACE MODIFICATION WITH HIGH EUV ABSORBERS FOR HIGH PER...
Publication number
20220365434
Publication date
Nov 17, 2022
LAM RESEARCH CORPORATION
Katie Lynn Nardi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRY CHAMBER CLEAN OF PHOTORESIST FILMS
Publication number
20220344136
Publication date
Oct 27, 2022
LAM RESEARCH CORPORATION
Daniel Peter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST WITH MULTIPLE PATTERNING RADIATION-ABSORBING ELEMENTS A...
Publication number
20220342301
Publication date
Oct 27, 2022
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS FOR PHOTORESIST DRY DEPOSITION
Publication number
20220308462
Publication date
Sep 29, 2022
LAM RESEARCH CORPORATION
Butch Berney
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BAKE STRATEGIES TO ENHANCE LITHOGRAPHIC PERFORMANCE OF METAL-CONTAI...
Publication number
20220308454
Publication date
Sep 29, 2022
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POSITIVE TONE DEVELOPMENT OF CVD EUV RESIST FILMS
Publication number
20220299877
Publication date
Sep 22, 2022
LAM RESEARCH CORPORATION
Timothy William Weidman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DRY DEVELOPMENT OF RESISTS
Publication number
20220020584
Publication date
Jan 20, 2022
LAM RESEARCH CORPORATION
Boris Volosskiy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR MAKING HARD MASKS USEFUL IN NEXT-GENERATION LITHOGRAPHY
Publication number
20210397085
Publication date
Dec 23, 2021
LAM RESEARCH CORPORATION
Timothy William Weidman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR MAKING EUV PATTERNABLE HARD MASKS
Publication number
20210013034
Publication date
Jan 14, 2021
LAM RESEARCH CORPORATION
Chenghao Wu
H01 - BASIC ELECTRIC ELEMENTS