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Patents Grants
last 30 patents
Information
Patent Grant
Silicon nitride capped shallow trench isolation method for fabricat...
Patent number
6,350,661
Issue date
Feb 26, 2002
Chartered Semiconductor Manufacturing Ltd.
Chong Wee Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Silicon nitride capped shallow trench isolation method for fabricat...
Patent number
6,297,126
Issue date
Oct 2, 2001
Chartered Semiconductor Manufacturing Ltd.
Chong Wee Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optimized Co/Ti-salicide scheme for shallow junction deep sub-micro...
Patent number
6,271,133
Issue date
Aug 7, 2001
Chartered Semiconductor Manufacturing Ltd.
Chong Wee Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Partially recessed shallow trench isolation method for fabricating...
Patent number
6,265,302
Issue date
Jul 24, 2001
Chartered Semiconductor Manufacturing Ltd.
Chong Wee Lim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to form shallow trench isolations with rounded corners and r...
Patent number
6,228,727
Issue date
May 8, 2001
Chartered Semiconductor Manufacturing, Ltd.
Chong Wee Lim
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Silicon nitride capped shallow trench isolation method for fabricat...
Publication number
20010031540
Publication date
Oct 18, 2001
Chartered Semiconductor Manufacturing Ltd.
Chong Wee Lim
H01 - BASIC ELECTRIC ELEMENTS