Daniel J. Woodruff

Person

Kalispell, MT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 11,899,366
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 11,112,697
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microelectronic substrate electro processing system
- Patent number 10,837,119
- Issue date Nov 17, 2020
- Applied Materials, Inc.
- Robert B. Moore
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroplating dynamic edge control
- Patent number 10,494,731
- Issue date Dec 3, 2019
- Applied Materials, Inc.
- Paul McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 10,474,033
- Issue date Nov 12, 2019
- Applied Materials, Inc.
- Viachslav Babayan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electroplating tool with feedback of metal thickness distribution a...
- Patent number 10,260,855
- Issue date Apr 16, 2019
- Applied Materials, Inc.
- Todd J. Egan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method and apparatus for post exposure processing of photoresist wa...
- Patent number 10,203,604
- Issue date Feb 12, 2019
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electroplating apparatus
- Patent number 10,047,453
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Component cleaning in a metal plating apparatus
- Patent number 9,309,603
- Issue date Apr 12, 2016
- Applied Materials, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroplating processor with thin membrane support
- Patent number 9,068,272
- Issue date Jun 30, 2015
- Applied Materials, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electroplating processor with geometric electrolyte flow path
- Patent number 8,968,533
- Issue date Mar 3, 2015
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Single workpiece processing chamber
- Patent number 8,562,752
- Issue date Oct 22, 2013
- Applied Materials, Inc.
- Daniel J. Woodruff
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Deplating contacts in an electrochemical plating apparatus
- Patent number 8,500,968
- Issue date Aug 6, 2013
- Applied Materials, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and methods for electrochemical processing of microfeatur...
- Patent number 8,313,631
- Issue date Nov 20, 2012
- Applied Materials Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Single workpiece processing chamber with tilting load/unload upper rim
- Patent number 8,118,044
- Issue date Feb 21, 2012
- Applied Materials, Inc.
- Daniel J. Woodruff
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Single side workpiece processing
- Patent number 8,104,488
- Issue date Jan 31, 2012
- Applied Materials, Inc.
- Jason A. Rye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single side workpiece processing
- Patent number 8,082,932
- Issue date Dec 27, 2011
- Applied Materials, Inc.
- Jason Rye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-chemical processor
- Patent number 7,935,230
- Issue date May 3, 2011
- Semitool, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for agitating liquids in wet chemical processi...
- Patent number 7,931,786
- Issue date Apr 26, 2011
- Semitool, Inc.
- Gregory J. Wilson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Electro-chemical processor
- Patent number 7,927,469
- Issue date Apr 19, 2011
- Semitool, Inc.
- Nigel Stewart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electro-chemical processor
- Patent number 7,909,967
- Issue date Mar 22, 2011
- Semitool, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and methods for electrochemical processing of microfeatur...
- Patent number 7,842,173
- Issue date Nov 30, 2010
- Semitool, Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Integrated tool assemblies with intermediate processing modules for...
- Patent number 7,531,060
- Issue date May 12, 2009
- Semitool, Inc.
- Paul Wirth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus including a reactor for electrochemically etch...
- Patent number 7,524,406
- Issue date Apr 28, 2009
- Semitool, Inc.
- Daniel Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
End point detection in workpiece processing
- Patent number 7,420,690
- Issue date Sep 2, 2008
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated microfeature workpiece processing tools with registratio...
- Patent number 7,393,439
- Issue date Jul 1, 2008
- Semitool, Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Paddles and enclosures for enhancing mass transfer during processin...
- Patent number 7,390,383
- Issue date Jun 24, 2008
- Semitool, Inc.
- Paul R. McHugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactors having multiple electrodes and/or enclosed reciprocating p...
- Patent number 7,390,382
- Issue date Jun 24, 2008
- Semitool, Inc.
- Paul R. McHugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electroplating apparatus with segmented anode array
- Patent number 7,357,850
- Issue date Apr 15, 2008
- Semitool, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
End-effectors for handling microelectronic wafers
- Patent number 7,334,826
- Issue date Feb 26, 2008
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20220004104
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20190187563
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Viachslav Babayan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ELECTROPLATING DYNAMIC EDGE CONTROL
- Publication number 20190177869
- Publication date Jun 13, 2019
- Applied Materials, Inc.
- Paul McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20170363960
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...
- Publication number 20170154797
- Publication date Jun 1, 2017
- Applied Materials, Inc.
- Viachslav Babayan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROPLATING APPARATUS
- Publication number 20160348263
- Publication date Dec 1, 2016
- Applied Materials, Inc.
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH
- Publication number 20150075976
- Publication date Mar 19, 2015
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING TOOL WITH FEEDBACK OF METAL THICKNESS DISTRIBUTION A...
- Publication number 20140367267
- Publication date Dec 18, 2014
- Applied Materials, Inc.
- Todd J. Egan
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING PROCESSOR WITH VACUUM ROTOR
- Publication number 20140262795
- Publication date Sep 18, 2014
- Nolan L. Zimmerman
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DETECTING ELECTROLYTE MENISCUS IN ELECTROPLATING PROCESSORS
- Publication number 20140266219
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- Gregory J. Wilson
- G01 - MEASURING TESTING
Information Patent Application
ELECTROPLATING PROCESSOR WITH THIN MEMBRANE SUPPORT
- Publication number 20140151218
- Publication date Jun 5, 2014
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH
- Publication number 20130299343
- Publication date Nov 14, 2013
- Applied Materials, Inc.
- Randy A. Harris
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...
- Publication number 20130075265
- Publication date Mar 28, 2013
- Applied Materials Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
COMPONENT CLEANING IN A METAL PLATING APPARATUS
- Publication number 20130061875
- Publication date Mar 14, 2013
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SINGLE WORKPIECE PROCESSING CHAMBER
- Publication number 20120060869
- Publication date Mar 15, 2012
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
DEPLATING CONTACTS IN AN ELECTROCHEMICAL PLATING APPARATUS
- Publication number 20120037495
- Publication date Feb 16, 2012
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...
- Publication number 20110042224
- Publication date Feb 24, 2011
- Semitool, Inc.
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
ELECTRO-CHEMICAL PROCESSOR
- Publication number 20100078334
- Publication date Apr 1, 2010
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Protected magnets and magnet shielding for processing microfeature...
- Publication number 20080178460
- Publication date Jul 31, 2008
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and methods for electrochemical processing of microfeatur...
- Publication number 20080179180
- Publication date Jul 31, 2008
- Paul R. McHugh
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Microfeature workpiece transfer devices with rotational orientation...
- Publication number 20080181758
- Publication date Jul 31, 2008
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRO-CHEMICAL PROCESSOR
- Publication number 20080048306
- Publication date Feb 28, 2008
- Nigel Stewart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE SIDE WORKPIECE PROCESSING
- Publication number 20080011334
- Publication date Jan 17, 2008
- Jason A. Rye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRO-CHEMICAL PROCESSOR
- Publication number 20080003781
- Publication date Jan 3, 2008
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Apparatus and method for agitating liquids in wet chemical processi...
- Publication number 20070151844
- Publication date Jul 5, 2007
- Semitool, Inc.
- Gregory J. Wilson
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Linearly translating agitators for processing microfeature workpiec...
- Publication number 20070144912
- Publication date Jun 28, 2007
- Daniel J. Woodruff
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
End point detection in workpiece processing
- Publication number 20070121123
- Publication date May 31, 2007
- Semitool, Inc.
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE SIDE WORKPIECE PROCESSING
- Publication number 20070110895
- Publication date May 17, 2007
- Jason Rye
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
End-effectors for handling microelectronic workpieces
- Publication number 20070104559
- Publication date May 10, 2007
- Daniel J. Woodruff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
End-effectors and associated control and guidance systems and methods
- Publication number 20070014656
- Publication date Jan 18, 2007
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS

Daniel J. Woodruff

Person

Patents Grantslast 30 patents

Method and apparatus for post exposure processing of photoresist wa...

Method and apparatus for post exposure processing of photoresist wa...

Microelectronic substrate electro processing system

Electroplating dynamic edge control

Method and apparatus for post exposure processing of photoresist wa...

Electroplating tool with feedback of metal thickness distribution a...

Method and apparatus for post exposure processing of photoresist wa...

Electroplating apparatus

Component cleaning in a metal plating apparatus

Electroplating processor with thin membrane support

Electroplating processor with geometric electrolyte flow path

Single workpiece processing chamber

Deplating contacts in an electrochemical plating apparatus

Apparatus and methods for electrochemical processing of microfeatur...

Single workpiece processing chamber with tilting load/unload upper rim

Single side workpiece processing

Single side workpiece processing

Electro-chemical processor

Apparatus and method for agitating liquids in wet chemical processi...

Electro-chemical processor

Electro-chemical processor

Apparatus and methods for electrochemical processing of microfeatur...

Integrated tool assemblies with intermediate processing modules for...

Processing apparatus including a reactor for electrochemically etch...

End point detection in workpiece processing

Integrated microfeature workpiece processing tools with registratio...

Paddles and enclosures for enhancing mass transfer during processin...

Reactors having multiple electrodes and/or enclosed reciprocating p...

Electroplating apparatus with segmented anode array

End-effectors for handling microelectronic wafers

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

ELECTROPLATING DYNAMIC EDGE CONTROL

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

METHOD AND APPARATUS FOR POST EXPOSURE PROCESSING OF PHOTORESIST WA...

ELECTROPLATING APPARATUS

ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH

ELECTROPLATING TOOL WITH FEEDBACK OF METAL THICKNESS DISTRIBUTION A...

ELECTROPLATING PROCESSOR WITH VACUUM ROTOR

DETECTING ELECTROLYTE MENISCUS IN ELECTROPLATING PROCESSORS

ELECTROPLATING PROCESSOR WITH THIN MEMBRANE SUPPORT

ELECTROPLATING PROCESSOR WITH GEOMETRIC ELECTROLYTE FLOW PATH

APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...

COMPONENT CLEANING IN A METAL PLATING APPARATUS

SINGLE WORKPIECE PROCESSING CHAMBER

DEPLATING CONTACTS IN AN ELECTROCHEMICAL PLATING APPARATUS

APPARATUS AND METHODS FOR ELECTROCHEMICAL PROCESSING OF MICROFEATUR...

ELECTRO-CHEMICAL PROCESSOR

Protected magnets and magnet shielding for processing microfeature...

Apparatus and methods for electrochemical processing of microfeatur...

Microfeature workpiece transfer devices with rotational orientation...

ELECTRO-CHEMICAL PROCESSOR

SINGLE SIDE WORKPIECE PROCESSING

ELECTRO-CHEMICAL PROCESSOR

Apparatus and method for agitating liquids in wet chemical processi...

Linearly translating agitators for processing microfeature workpiec...

End point detection in workpiece processing

SINGLE SIDE WORKPIECE PROCESSING

End-effectors for handling microelectronic workpieces

End-effectors and associated control and guidance systems and methods