Demetrius Sarigiannis

Person

Medina, OH, US

People

Patents Grantslast 30 patents

Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 8,257,497
- Issue date Sep 4, 2012
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of titanium deposition
- Patent number 7,947,597
- Issue date May 24, 2011
- Micron Technology, Inc.
- Joel A. Drewes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing materials over substrates, and methods of for...
- Patent number 7,794,787
- Issue date Sep 14, 2010
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of titanium deposition
- Patent number 7,700,480
- Issue date Apr 20, 2010
- Micron Technology, Inc.
- Joel A. Drewes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing residual contaminants from an environment
- Patent number 7,611,971
- Issue date Nov 3, 2009
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing materials over substrates, and methods of for...
- Patent number 7,544,388
- Issue date Jun 9, 2009
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition methods
- Patent number 7,498,057
- Issue date Mar 3, 2009
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition methods
- Patent number 7,378,354
- Issue date May 27, 2008
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming materials
- Patent number 7,368,381
- Issue date May 6, 2008
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition methods
- Patent number 7,368,382
- Issue date May 6, 2008
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method of forming an oxide comprising layer...
- Patent number 7,329,615
- Issue date Feb 12, 2008
- Micron Technology, Inc.
- Garo J. Derderian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition methods
- Patent number 7,303,991
- Issue date Dec 4, 2007
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for depositing material onto microfeature workp...
- Patent number 7,282,239
- Issue date Oct 16, 2007
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for control...
- Patent number 7,279,398
- Issue date Oct 9, 2007
- Micron Technology, Inc.
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of removing residual contaminants from an environment
- Patent number 7,247,561
- Issue date Jul 24, 2007
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method of forming an oxide comprising layer...
- Patent number 7,119,034
- Issue date Oct 10, 2006
- Micron Technology, Inc.
- Garo J. Derderian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming layers over substrates
- Patent number 7,087,525
- Issue date Aug 8, 2006
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition method of forming an oxide comprising layer...
- Patent number 7,067,438
- Issue date Jun 27, 2006
- Micron Technology, Inc.
- Garo J. Derderian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microfeature workpiece processing apparatus and methods for control...
- Patent number 7,056,806
- Issue date Jun 6, 2006
- Micron Technology, Inc.
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of depositing materials over substrates, and methods of for...
- Patent number 7,048,968
- Issue date May 23, 2006
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and methods
- Patent number 6,896,730
- Issue date May 24, 2005
- Micron Technology, Inc.
- Garo J. Derderian
- C30 - CRYSTAL GROWTH
Information Patent Grant
Deposition methods
- Patent number 6,890,596
- Issue date May 10, 2005
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Insitu post atomic layer deposition destruction of active species
- Patent number 6,844,260
- Issue date Jan 18, 2005
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming trenched isolation regions
- Patent number 6,835,664
- Issue date Dec 28, 2004
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition methods
- Patent number 6,753,271
- Issue date Jun 22, 2004
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Methods of Titanium Deposition
- Publication number 20100167542
- Publication date Jul 1, 2010
- Micron Technology, Inc.
- Joel A. Drewes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Depositing Materials Over Substrates, and Methods of For...
- Publication number 20090215252
- Publication date Aug 27, 2009
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Titanium Deposition
- Publication number 20080268633
- Publication date Oct 30, 2008
- Joel A. Drewes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic Layer Deposition Methods
- Publication number 20080241386
- Publication date Oct 2, 2008
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR DEPOSITING MATERIAL ONTO MICROFEATURE WORKP...
- Publication number 20080029028
- Publication date Feb 7, 2008
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION RESISTANT WAFER PROCESSING APPARATUS AND METHOD FOR MAKIN...
- Publication number 20080016684
- Publication date Jan 24, 2008
- GENERAL ELECTRIC COMPANY
- Benjamin J. Olechnowicz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of removing residual contaminants from an environment
- Publication number 20060240646
- Publication date Oct 26, 2006
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of depositing materials over substrates, and methods of for...
- Publication number 20060222770
- Publication date Oct 5, 2006
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of forming materials
- Publication number 20060216933
- Publication date Sep 28, 2006
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition methods
- Publication number 20060205227
- Publication date Sep 14, 2006
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition methods
- Publication number 20060205228
- Publication date Sep 14, 2006
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High temperature chemical vapor deposition apparatus
- Publication number 20060185590
- Publication date Aug 24, 2006
- General Electric Company
- Marc Schaepkens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High temperature chemical vapor deposition apparatus
- Publication number 20060185591
- Publication date Aug 24, 2006
- General Electric Company
- Lakshmipathy Muralidharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20060121689
- Publication date Jun 8, 2006
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20060115957
- Publication date Jun 1, 2006
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition method of forming an oxide comprising layer...
- Publication number 20060029737
- Publication date Feb 9, 2006
- Micron Technology, Inc.
- Garo J. Derderian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition method of forming an oxide comprising layer...
- Publication number 20060003102
- Publication date Jan 5, 2006
- Garo J. Derderian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatuses and methods for producing chemically reactive vapors us...
- Publication number 20050249873
- Publication date Nov 10, 2005
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition method of forming an oxide comprising layer...
- Publication number 20050186731
- Publication date Aug 25, 2005
- Garo J. Derderian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insitu post atomic layer deposition destruction of active species
- Publication number 20050150460
- Publication date Jul 14, 2005
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition methods
- Publication number 20050147751
- Publication date Jul 7, 2005
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of removing residual contaminants from an environment
- Publication number 20050126585
- Publication date Jun 16, 2005
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and methods for depositing material onto microfeature workp...
- Publication number 20050061243
- Publication date Mar 24, 2005
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microfeature workpiece processing apparatus and methods for control...
- Publication number 20050059261
- Publication date Mar 17, 2005
- Cem Basceri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition apparatus
- Publication number 20050048792
- Publication date Mar 3, 2005
- Garo J. Derderian
- C30 - CRYSTAL GROWTH
Information Patent Application
Methods of depositing materials over substrates, and methods of for...
- Publication number 20050042374
- Publication date Feb 24, 2005
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING LAYERS OVER SUBSTRATES; AND METHODS OF FORMING T...
- Publication number 20040266197
- Publication date Dec 30, 2004
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING LAYERS OVER SUBSTRATES
- Publication number 20040266219
- Publication date Dec 30, 2004
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Atomic layer deposition methods
- Publication number 20040224527
- Publication date Nov 11, 2004
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Insitu post atomic layer deposition destruction of active species
- Publication number 20040152304
- Publication date Aug 5, 2004
- Micron Technology, Inc.
- Demetrius Sarigiannis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Demetrius Sarigiannis

Person

Patents Grantslast 30 patents

Insitu post atomic layer deposition destruction of active species

Methods of titanium deposition

Methods of depositing materials over substrates, and methods of for...

Methods of titanium deposition

Method of removing residual contaminants from an environment

Methods of depositing materials over substrates, and methods of for...

Deposition methods

Atomic layer deposition methods

Methods of forming materials

Atomic layer deposition methods

Atomic layer deposition method of forming an oxide comprising layer...

Atomic layer deposition methods

Systems and methods for depositing material onto microfeature workp...

Microfeature workpiece processing apparatus and methods for control...

Method of removing residual contaminants from an environment

Atomic layer deposition method of forming an oxide comprising layer...

Methods of forming layers over substrates

Atomic layer deposition method of forming an oxide comprising layer...

Microfeature workpiece processing apparatus and methods for control...

Methods of depositing materials over substrates, and methods of for...

Atomic layer deposition apparatus and methods

Deposition methods

Insitu post atomic layer deposition destruction of active species

Methods of forming trenched isolation regions

Atomic layer deposition methods

Patents Applicationslast 30 patents

Methods of Titanium Deposition

Methods of Depositing Materials Over Substrates, and Methods of For...

Methods of Titanium Deposition

Atomic Layer Deposition Methods

SYSTEMS AND METHODS FOR DEPOSITING MATERIAL ONTO MICROFEATURE WORKP...

CORROSION RESISTANT WAFER PROCESSING APPARATUS AND METHOD FOR MAKIN...

Method of removing residual contaminants from an environment

Methods of depositing materials over substrates, and methods of for...

Methods of forming materials

Atomic layer deposition methods

Atomic layer deposition methods

High temperature chemical vapor deposition apparatus

High temperature chemical vapor deposition apparatus

Microfeature workpiece processing apparatus and methods for control...

Microfeature workpiece processing apparatus and methods for control...

Atomic layer deposition method of forming an oxide comprising layer...

Atomic layer deposition method of forming an oxide comprising layer...

Apparatuses and methods for producing chemically reactive vapors us...

Atomic layer deposition method of forming an oxide comprising layer...

Insitu post atomic layer deposition destruction of active species

Deposition methods

Method of removing residual contaminants from an environment

Systems and methods for depositing material onto microfeature workp...

Microfeature workpiece processing apparatus and methods for control...

Atomic layer deposition apparatus

Methods of depositing materials over substrates, and methods of for...

METHODS OF FORMING LAYERS OVER SUBSTRATES; AND METHODS OF FORMING T...

METHODS OF FORMING LAYERS OVER SUBSTRATES

Atomic layer deposition methods

Insitu post atomic layer deposition destruction of active species