Ernst Hendrik August Granneman

Person

Almere, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition apparatus and method for processing substra...
- Patent number 11,339,474
- Issue date May 24, 2022
- ASM International N.V.
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for contactlessly advancing substrates
- Patent number 10,837,107
- Issue date Nov 17, 2020
- ASM International N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,738,382
- Issue date Aug 11, 2020
- ASM International N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition apparatus and method for processing substra...
- Patent number 10,648,078
- Issue date May 12, 2020
- ASM International N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Floating substrate monitoring and control device, and method for th...
- Patent number 9,478,449
- Issue date Oct 25, 2016
- ASM International N.V.
- Pascal Gustaaf Vermont
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for high-throughput atomic layer deposition
- Patent number 9,243,330
- Issue date Jan 26, 2016
- ASM International N.V.
- Ernst H. A. Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for high-throughput atomic layer deposition
- Patent number 9,238,867
- Issue date Jan 19, 2016
- ASM International N.V.
- Ernst H. A. Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective oxidation process
- Patent number 9,127,340
- Issue date Sep 8, 2015
- ASM International N.V.
- Jerome Noiray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective removal of oxygen from metal-containing materials
- Patent number 8,889,565
- Issue date Nov 18, 2014
- ASM International N.V.
- Jerome Noiray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stable silicide films and methods for making the same
- Patent number 8,367,548
- Issue date Feb 5, 2013
- ASM America, Inc.
- Vladimir Machkaoutsan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective inserts to line holes in parts for semiconductor process...
- Patent number 8,034,410
- Issue date Oct 11, 2011
- ASM International N.V.
- Vladimir Kuznetsov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for determining the temperature of a substrate
- Patent number 8,002,463
- Issue date Aug 23, 2011
- ASM International N.V
- Ernst H. A. Granneman
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for atomic layer deposition on substrates
- Patent number 7,754,013
- Issue date Jul 13, 2010
- ASM International N.V.
- Ernst H. A. Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal lining layers for damascene metallization
- Patent number 7,670,944
- Issue date Mar 2, 2010
- ASM International N.V.
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control for single substrate semiconductor processing r...
- Patent number 7,427,329
- Issue date Sep 23, 2008
- ASM International N.V
- Vladimir Kuznetsov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the heat treatment of substrates
- Patent number 7,410,355
- Issue date Aug 12, 2008
- ASM International N.V.
- Ernst H. A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Trench isolation structures for integrated circuits
- Patent number 7,276,774
- Issue date Oct 2, 2007
- ASM International N.V
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming silicide films in semiconductor devices
- Patent number 7,153,772
- Issue date Dec 26, 2006
- ASM International N.V.
- Ernst H. A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal lining layers for damascene metallization
- Patent number 7,102,235
- Issue date Sep 5, 2006
- ASM International N.V
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for the heat treatment of substrates
- Patent number 7,022,627
- Issue date Apr 4, 2006
- ASM International N.V
- Ernst H. A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating trench isolation structures for integrated ci...
- Patent number 6,861,334
- Issue date Mar 1, 2005
- ASM International, N.V.
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature control for single substrate semiconductor processing r...
- Patent number 6,843,201
- Issue date Jan 18, 2005
- ASM International N.V
- Vladimir Kuznetsov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal thin films over textured capacitor electrodes
- Patent number 6,831,315
- Issue date Dec 14, 2004
- ASM International N.V.
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Atomic layer deposition reactor
- Patent number 6,820,570
- Issue date Nov 23, 2004
- Nobel Biocare Services AG
- Olli Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for supporting a semiconductor wafer during pr...
- Patent number 6,805,749
- Issue date Oct 19, 2004
- ASM International, N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conformal thin films over textured capacitor electrodes
- Patent number 6,780,704
- Issue date Aug 24, 2004
- ASM International N.V.
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the treatment of substrates
- Patent number 6,770,851
- Issue date Aug 3, 2004
- ASM International N.V
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing porous structures
- Patent number 6,759,325
- Issue date Jul 6, 2004
- ASM Microchemistry OY
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of making conformal lining layers for damascene metallization
- Patent number 6,727,169
- Issue date Apr 27, 2004
- ASM International, N.V.
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for controlling conformality with alternating layer deposition
- Patent number 6,699,783
- Issue date Mar 2, 2004
- ASM International N.V
- Ivo Raaijmakers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...
- Publication number 20200263300
- Publication date Aug 20, 2020
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...
- Publication number 20170167020
- Publication date Jun 15, 2017
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FLOATING WAFER TRACK WITH LATERAL STABILIZATION MECHANISM
- Publication number 20170076935
- Publication date Mar 16, 2017
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20160281233
- Publication date Sep 29, 2016
- ASM INTERNATIONAL N.V.
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION
- Publication number 20160102399
- Publication date Apr 14, 2016
- ASM INTERNATIONAL N.V.
- Ernst H.A. Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Floating substrate monitoring and control device, and method for th...
- Publication number 20140199788
- Publication date Jul 17, 2014
- Levitech B.V.
- Pascal Gustaaf Vermont
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CONTACTLESSLY ADVANCING SUBSTRATES
- Publication number 20130199448
- Publication date Aug 8, 2013
- Ernst Hendrik August Granneman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION
- Publication number 20110268879
- Publication date Nov 3, 2011
- Ernst H. A. Granneman
- C30 - CRYSTAL GROWTH
Information Patent Application
APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION
- Publication number 20110124199
- Publication date May 26, 2011
- Ernst H. A. Granneman
- C30 - CRYSTAL GROWTH
Information Patent Application
SELECTIVE OXIDATION PROCESS
- Publication number 20100209597
- Publication date Aug 19, 2010
- ASM INTERNATIONAL N.V.
- Jerome Noiray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE REMOVAL OF OXYGEN FROM METAL-CONTAINING MATERIALS
- Publication number 20100210117
- Publication date Aug 19, 2010
- ASM INTERNATIONAL N.V.
- Jerome Noiray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE
- Publication number 20090310648
- Publication date Dec 17, 2009
- ASM INTERNATIONAL N.V.
- Ernst H.A. GRANNEMAN
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION
- Publication number 20090291209
- Publication date Nov 26, 2009
- ASM INTERNATIONAL N.V.
- Ernst H.A. Granneman
- C30 - CRYSTAL GROWTH
Information Patent Application
PROTECTIVE INSERTS TO LINE HOLES IN PARTS FOR SEMICONDUCTOR PROCESS...
- Publication number 20090023302
- Publication date Jan 22, 2009
- ASM INTERNATIONAL N.V.
- Vladimir Kuznetsov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE SILICIDE FILMS AND METHODS FOR MAKING THE SAME
- Publication number 20080224317
- Publication date Sep 18, 2008
- ASM AMERICA, INC
- Vladimir Machkaoutsan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PRO...
- Publication number 20080124470
- Publication date May 29, 2008
- ASM INTERNATIONAL N.V.
- Jannes Remco van den Berg
- C30 - CRYSTAL GROWTH
Information Patent Application
TRENCH ISOLATION STRUCTURES FOR INTEGRATED CIRCUITS
- Publication number 20070287261
- Publication date Dec 13, 2007
- ASM INTERNATIONAL N.V.
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conformal lining layers for damascene metallization
- Publication number 20070096321
- Publication date May 3, 2007
- Ivo Raaijmakers
- C30 - CRYSTAL GROWTH
Information Patent Application
Methods of forming films in semiconductor devices with solid state...
- Publication number 20070059932
- Publication date Mar 15, 2007
- Ernst H.A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for atomic layer deposition on substrates
- Publication number 20070015374
- Publication date Jan 18, 2007
- Ernst H. A. Granneman
- C30 - CRYSTAL GROWTH
Information Patent Application
Method for the heat treatment of substrates
- Publication number 20060141808
- Publication date Jun 29, 2006
- ASM International N.V., a Netherlands corporation
- Ernst H.A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for the heat treatment of substrates
- Publication number 20050095873
- Publication date May 5, 2005
- Ernst H. A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Atomic layer deposition reactor
- Publication number 20050092249
- Publication date May 5, 2005
- Olli Kilpela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of forming silicide films in semiconductor devices
- Publication number 20050017310
- Publication date Jan 27, 2005
- Ernst H.A. Granneman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trench isolation structures for integrated circuits
- Publication number 20040222490
- Publication date Nov 11, 2004
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conformal thin films over textured capacitor electrodes
- Publication number 20040175586
- Publication date Sep 9, 2004
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and method for atomic layer deposition on substrates
- Publication number 20040142558
- Publication date Jul 22, 2004
- Ernst H. A. Granneman
- C30 - CRYSTAL GROWTH
Information Patent Application
Conformal lining layers for damascene metallization
- Publication number 20040130029
- Publication date Jul 8, 2004
- Ivo Raaijmakers
- C30 - CRYSTAL GROWTH
Information Patent Application
Temperature control for single substrate semiconductor processing r...
- Publication number 20030209327
- Publication date Nov 13, 2003
- Vladamir Kuznetsov
- C30 - CRYSTAL GROWTH
Information Patent Application
Temperature control for single substrate semiconductor processing r...
- Publication number 20030209200
- Publication date Nov 13, 2003
- Vladimir Kuznetsov
- C30 - CRYSTAL GROWTH

Ernst Hendrik August Granneman

Person

Patents Grantslast 30 patents

Atomic layer deposition apparatus and method for processing substra...

Method and apparatus for contactlessly advancing substrates

Substrate processing apparatus

Atomic layer deposition apparatus and method for processing substra...

Floating substrate monitoring and control device, and method for th...

Apparatus and method for high-throughput atomic layer deposition

Apparatus and method for high-throughput atomic layer deposition

Selective oxidation process

Selective removal of oxygen from metal-containing materials

Stable silicide films and methods for making the same

Protective inserts to line holes in parts for semiconductor process...

Method and device for determining the temperature of a substrate

Apparatus and method for atomic layer deposition on substrates

Conformal lining layers for damascene metallization

Temperature control for single substrate semiconductor processing r...

Method for the heat treatment of substrates

Trench isolation structures for integrated circuits

Methods of forming silicide films in semiconductor devices

Conformal lining layers for damascene metallization

Method for the heat treatment of substrates

Method of fabricating trench isolation structures for integrated ci...

Temperature control for single substrate semiconductor processing r...

Conformal thin films over textured capacitor electrodes

Atomic layer deposition reactor

Method and apparatus for supporting a semiconductor wafer during pr...

Conformal thin films over textured capacitor electrodes

Method and apparatus for the treatment of substrates

Sealing porous structures

Method of making conformal lining layers for damascene metallization

Method for controlling conformality with alternating layer deposition

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...

ATOMIC LAYER DEPOSITION APPARATUS AND METHOD FOR PROCESSING SUBSTRA...

FLOATING WAFER TRACK WITH LATERAL STABILIZATION MECHANISM

SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION

Floating substrate monitoring and control device, and method for th...

METHOD AND APPARATUS FOR CONTACTLESSLY ADVANCING SUBSTRATES

APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION

APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION

SELECTIVE OXIDATION PROCESS

SELECTIVE REMOVAL OF OXYGEN FROM METAL-CONTAINING MATERIALS

METHOD AND DEVICE FOR DETERMINING THE TEMPERATURE OF A SUBSTRATE

APPARATUS AND METHOD FOR HIGH-THROUGHPUT ATOMIC LAYER DEPOSITION

PROTECTIVE INSERTS TO LINE HOLES IN PARTS FOR SEMICONDUCTOR PROCESS...

STABLE SILICIDE FILMS AND METHODS FOR MAKING THE SAME

SUSCEPTOR WITH SURFACE ROUGHNESS FOR HIGH TEMPERATURE SUBSTRATE PRO...

TRENCH ISOLATION STRUCTURES FOR INTEGRATED CIRCUITS

Conformal lining layers for damascene metallization

Methods of forming films in semiconductor devices with solid state...

Apparatus and method for atomic layer deposition on substrates

Method for the heat treatment of substrates

Method for the heat treatment of substrates

Atomic layer deposition reactor

Methods of forming silicide films in semiconductor devices

Trench isolation structures for integrated circuits

Conformal thin films over textured capacitor electrodes

Apparatus and method for atomic layer deposition on substrates

Conformal lining layers for damascene metallization

Temperature control for single substrate semiconductor processing r...

Temperature control for single substrate semiconductor processing r...