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last 30 patents
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,915,961
Issue date
Feb 27, 2024
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,430,684
Issue date
Aug 30, 2022
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Suction device, carry-in method, carrier system and exposure appara...
Patent number
11,289,362
Issue date
Mar 29, 2022
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,274,919
Issue date
Mar 15, 2022
Nikon Corporation
Go Ichinose
G01 - MEASURING TESTING
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,107,718
Issue date
Aug 31, 2021
Nikon Corporation
Go Ichinose
G01 - MEASURING TESTING
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
11,069,552
Issue date
Jul 20, 2021
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate holding method, substrate holding apparatus, exposure app...
Patent number
RE48429
Issue date
Feb 9, 2021
Nikon Corporation
Go Ichinose
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Patent Grant
Measurement system, substrate processing system, and device manufac...
Patent number
10,777,441
Issue date
Sep 15, 2020
Nikon Corporation
Go Ichinose
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Suction device, carry-in method, carrier system and exposure appara...
Patent number
10,586,728
Issue date
Mar 10, 2020
Nikon Corporation
Go Ichinose
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Patent Grant
Suction device, carry-in method, carrier system and exposure appara...
Patent number
10,242,903
Issue date
Mar 26, 2019
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Substrate holding method, substrate holding apparatus, exposure app...
Patent number
9,865,494
Issue date
Jan 9, 2018
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Manufacturing method of exposure apparatus and device manufacturing...
Patent number
8,841,065
Issue date
Sep 23, 2014
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Movable body apparatus, exposure apparatus and device manufacturing...
Patent number
8,472,008
Issue date
Jun 25, 2013
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure apparatus, exposure method and device manufacturing method
Patent number
8,446,569
Issue date
May 21, 2013
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,355,116
Issue date
Jan 15, 2013
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,355,114
Issue date
Jan 15, 2013
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,294,878
Issue date
Oct 23, 2012
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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last 30 patents
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Patent Application
METHODS FOR LARGE-SCALE OPTICAL MANUFACTURING
Publication number
20240367257
Publication date
Nov 7, 2024
Nikon Corporation
Daniel Gene SMITH
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Patent Application
MOLD AND BLADE MEMBER
Publication number
20240293964
Publication date
Sep 5, 2024
NIKON CORPORTION
Go ICHINOSE
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
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Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20220367224
Publication date
Nov 17, 2022
Nikon Corporation
Go ICHINOSE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20220155062
Publication date
May 19, 2022
Nikon Corporation
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MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20210272833
Publication date
Sep 2, 2021
Nikon Corporation
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G01 - MEASURING TESTING
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Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20200266087
Publication date
Aug 20, 2020
Nikon Corporation
Go ICHINOSE
G01 - MEASURING TESTING
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Patent Application
SUCTION DEVICE, CARRY-IN METHOD, CARRIER SYSTEM AND EXPOSURE APPARA...
Publication number
20200176298
Publication date
Jun 4, 2020
Nikon Corporation
Go ICHINOSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20190287837
Publication date
Sep 19, 2019
Nikon Corporation
Go ICHINOSE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
MEASUREMENT SYSTEM, SUBSTRATE PROCESSING SYSTEM, AND DEVICE MANUFAC...
Publication number
20190257647
Publication date
Aug 22, 2019
Nikon Corporation
Go ICHINOSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUCTION DEVICE, CARRY-IN METHOD, CARRIER SYSTEM AND EXPOSURE APPARA...
Publication number
20190172745
Publication date
Jun 6, 2019
Nikon Corporation
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B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Patent Application
SUBSTRATE HOLDING METHOD, SUBSTRATE HOLDING APPARATUS, EXPOSURE APP...
Publication number
20180174884
Publication date
Jun 21, 2018
Nikon Corporation
Go ICHINOSE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE HOLDING METHOD, SUBSTRATE HOLDING APPARATUS, EXPOSURE APP...
Publication number
20160111318
Publication date
Apr 21, 2016
Nikon Corporation
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H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUCTION DEVICE, CARRY-IN METHOD, CARRIER SYSTEM AND EXPOSURE APPARA...
Publication number
20160005636
Publication date
Jan 7, 2016
Nikon Corporation
Go ICHINOSE
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
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Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, DEVICE-MANUFACTURING METHOD, P...
Publication number
20130057837
Publication date
Mar 7, 2013
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
MANUFACTURING METHOD OF EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
Publication number
20110200944
Publication date
Aug 18, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110102762
Publication date
May 5, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20110086315
Publication date
Apr 14, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20110085150
Publication date
Apr 14, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20110075120
Publication date
Mar 31, 2011
NIKON CORPORATION
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Exposure Apparatus and Device Manufacturing Method
Publication number
20110007291
Publication date
Jan 13, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110007325
Publication date
Jan 13, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
MOVABLE BODY APPARATUS, EXPOSURE APPARATUS AND DEVICE MANUFACTURING...
Publication number
20110007295
Publication date
Jan 13, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110008734
Publication date
Jan 13, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD AND DEVICE MANUFACTURING METHOD
Publication number
20110008717
Publication date
Jan 13, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110007290
Publication date
Jan 13, 2011
Nikon Corporation
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Maintenance method, exposure method and apparatus, and device manuf...
Publication number
20090109413
Publication date
Apr 30, 2009
Nikon Corporation
Yuichi Shibazaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Support Apparatus, Stage Apparatus, Exposure Apparatus, And Device...
Publication number
20080013060
Publication date
Jan 17, 2008
Nikon Corporation
Go Ichinose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY