Gopalakrishna B. Prabhu

Person

Sunnyvale, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Parameter sensing and computer modeling for gas delivery health mon...
- Patent number 11,768,984
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Ala Moradian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Feedback control of a chemical mechanical polishing device providin...
- Patent number 8,694,145
- Issue date Apr 8, 2014
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Method to form a device by constructing a support element on a thin...
- Patent number 8,518,724
- Issue date Aug 27, 2013
- GTAT Corporation
- Christopher J. Petti
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Retaining ring with shaped profile
- Patent number 8,388,412
- Issue date Mar 5, 2013
- Applied Materials, Inc.
- Gopalakrishna B. Prabhu
- B24 - GRINDING POLISHING
Information Patent Grant
Creation of low-relief texture for a photovoltaic cell
- Patent number 8,349,626
- Issue date Jan 8, 2013
- GTAT Corporation
- Zhiyong Li
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Solar panel edge deletion module
- Patent number 8,231,431
- Issue date Jul 31, 2012
- Applied Materials, Inc.
- Dhruv Gajaria
- B24 - GRINDING POLISHING
Information Patent Grant
Method to form a device by constructing a support element on a thin...
- Patent number 8,173,452
- Issue date May 8, 2012
- Twin Creeks Technologies, Inc.
- Christopher J Petti
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method to form a device including an annealed lamina and having amo...
- Patent number 8,101,451
- Issue date Jan 24, 2012
- Twin Creeks Technologies, Inc.
- Venkatesan Murali
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Feedback control of chemical mechanical polishing device providing...
- Patent number 8,070,909
- Issue date Dec 6, 2011
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Retaining ring with shaped profile
- Patent number 8,033,895
- Issue date Oct 11, 2011
- Applied Materials, Inc.
- Gopalakrishna B. Prabhu
- B24 - GRINDING POLISHING
Information Patent Grant
Method for forming an electrical connection
- Patent number 7,908,743
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- Zhiyong Li
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Polishing article with integrated window stripe
- Patent number 7,841,925
- Issue date Nov 30, 2010
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with grooved subpad
- Patent number 7,601,050
- Issue date Oct 13, 2009
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing article with integrated window stripe
- Patent number 7,553,214
- Issue date Jun 30, 2009
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Grant
Materials for chemical mechanical polishing
- Patent number 7,429,210
- Issue date Sep 30, 2008
- Applied Materials, Inc.
- Benjamin A. Bonner
- B24 - GRINDING POLISHING
Information Patent Grant
Materials for chemical mechanical polishing
- Patent number 7,179,159
- Issue date Feb 20, 2007
- Applied Materials, Inc.
- Benjamin A. Bonner
- B24 - GRINDING POLISHING
Information Patent Grant
Feedback control of a chemical mechanical polishing device providin...
- Patent number 7,160,739
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Arulkumar P. Shanmugasundram
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing processes for shallow trench isolation substrates
- Patent number 7,063,597
- Issue date Jun 20, 2006
- Applied Materials
- Gopalakrishna B. Prabhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carbonation of pH controlled KOH solution for improved polishing of...
- Patent number 7,040,966
- Issue date May 9, 2006
- Applied Materials
- Joseph F. Salfelder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and compositions for chemical mechanical polishing
- Patent number 6,677,239
- Issue date Jan 13, 2004
- Applied Materials Inc.
- Wei-Yung Hsu
- B24 - GRINDING POLISHING
Information Patent Grant
CMP platen with patterned surface
- Patent number 6,592,438
- Issue date Jul 15, 2003
- Applied Materials Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
CMP polishing pad
- Patent number 6,575,825
- Issue date Jun 10, 2003
- Applied Materials Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for chemical mechanical polishing
- Patent number 6,558,236
- Issue date May 6, 2003
- Applied Materials, Inc.
- Timothy James Donohue
- B24 - GRINDING POLISHING
Information Patent Grant
Method of chemical mechanical polishing with edge control
- Patent number 6,361,420
- Issue date Mar 26, 2002
- Applied Materials, Inc.
- Steven Zuniga
- B24 - GRINDING POLISHING
Information Patent Grant
Method of post CMP defect stability improvement
- Patent number 6,220,941
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Boris Fishkin
- B24 - GRINDING POLISHING
Information Patent Grant
CMP platen with patterned surface
- Patent number 6,220,942
- Issue date Apr 24, 2001
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
CMP polishing pad
- Patent number 6,217,426
- Issue date Apr 17, 2001
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with edge control for chemical mechanical polishing
- Patent number 6,132,298
- Issue date Oct 17, 2000
- Applied Materials, Inc.
- Steven Zuniga
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...
- Publication number 20230011748
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Application
PARAMETER SENSING AND COMPUTER MODELING FOR GAS DELIVERY HEALTH MON...
- Publication number 20220092241
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Ala Moradian
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF FORMING POLISHING SHEET
- Publication number 20140237905
- Publication date Aug 28, 2014
- Applied Materials, Inc.
- Benjamin A. Bonner
- B24 - GRINDING POLISHING
Information Patent Application
Method to Form a Device by Constructing a Support Element on a Thin...
- Publication number 20120220068
- Publication date Aug 30, 2012
- TWIN CREEKS TECHNOLOGIES, INC.
- Christopher J. Petti
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
SEMICONDUCTOR ASSEMBLY WITH A METAL OXIDE LAYER HAVING INTERMEDIATE...
- Publication number 20120080083
- Publication date Apr 5, 2012
- TWIN CREEKS TECHNOLOGIES, INC.
- Kathy J. Liang
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDIN...
- Publication number 20120053721
- Publication date Mar 1, 2012
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
RETAINING RING WITH SHAPED PROFILE
- Publication number 20120028548
- Publication date Feb 2, 2012
- Gopalakrishna B. Prabhu
- B24 - GRINDING POLISHING
Information Patent Application
REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME
- Publication number 20120021671
- Publication date Jan 26, 2012
- Applied Materials, Inc.
- Peter McReynolds
- B24 - GRINDING POLISHING
Information Patent Application
Creation of Low-Relief Texture for a Photovoltaic Cell
- Publication number 20110237013
- Publication date Sep 29, 2011
- TWIN CREEKS TECHNOLOGIES, INC.
- Zhiyong Li
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
MONOLITHIC LINEAR POLISHING SHEET
- Publication number 20100112919
- Publication date May 6, 2010
- APPLIED MATERIALS, INC.
- Benjamin A. Bonner
- B24 - GRINDING POLISHING
Information Patent Application
METHOD FOR FORMING AN ELECTRICAL CONNECTION
- Publication number 20090277006
- Publication date Nov 12, 2009
- Applied Materials, Inc.
- Zhiyong Li
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE
- Publication number 20090253358
- Publication date Oct 8, 2009
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
SOLAR PANEL EDGE DELETION MODULE
- Publication number 20090221217
- Publication date Sep 3, 2009
- Applied Materials, Inc.
- DHRUV GAJARIA
- B24 - GRINDING POLISHING
Information Patent Application
LEADER AND TRAILER FOR LINEAR POLISHING SHEET
- Publication number 20090088051
- Publication date Apr 2, 2009
- APPLIED MATERIALS, INC.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
Retaining Ring with Shaped Profile
- Publication number 20090021024
- Publication date Jan 22, 2009
- Gopalakrishna B. Prabhu
- B24 - GRINDING POLISHING
Information Patent Application
SELECTIVE CHEMISTRY FOR FIXED ABRASIVE CMP
- Publication number 20080182413
- Publication date Jul 31, 2008
- GREGORY E. MENK
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Smart polishing media assembly for planarizing substrates
- Publication number 20070212976
- Publication date Sep 13, 2007
- APPLIED MATERIALS, INC.
- Peter McReynolds
- B24 - GRINDING POLISHING
Information Patent Application
Polishing article with window stripe
- Publication number 20070197145
- Publication date Aug 23, 2007
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
Polishing article with integrated window stripe
- Publication number 20070197134
- Publication date Aug 23, 2007
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus with grooved subpad
- Publication number 20070197141
- Publication date Aug 23, 2007
- Applied Materials, Inc.
- Steven M. Zuniga
- B24 - GRINDING POLISHING
Information Patent Application
Polishing system with spiral-grooved subpad
- Publication number 20070197147
- Publication date Aug 23, 2007
- Applied Materials, Inc.
- Erik S. Rondum
- B24 - GRINDING POLISHING
Information Patent Application
Polishing article with integrated window stripe
- Publication number 20070197133
- Publication date Aug 23, 2007
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
Dechuck using subpad with recess
- Publication number 20070197132
- Publication date Aug 23, 2007
- Applied Materials, Inc.
- Gregory E. Menk
- B24 - GRINDING POLISHING
Information Patent Application
MATERIALS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20070117500
- Publication date May 24, 2007
- APPLIED MATERIALS, INC.
- BENJAMIN A. BONNER
- B24 - GRINDING POLISHING
Information Patent Application
Feedback control of chemical mechanical polishing device providing...
- Publication number 20070102116
- Publication date May 10, 2007
- APPLIED MATERIALS, INC.
- Arulkumar P. Shanmugasundram
- G05 - CONTROLLING REGULATING
Information Patent Application
Materials for chemical mechanical polishing
- Publication number 20060246831
- Publication date Nov 2, 2006
- Benjamin A. Bonner
- B24 - GRINDING POLISHING
Information Patent Application
Carbonation of pH controlled KOH solution for improved polishing of...
- Publication number 20050042877
- Publication date Feb 24, 2005
- Joseph F. Salfelder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Polishing processes for shallow trench isolation substrates
- Publication number 20040142640
- Publication date Jul 22, 2004
- APPLIED MATERIALS, INC.
- Gopalakrishna B. Prabhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Platen with patterned surface for chemical mechanical polishing
- Publication number 20040072518
- Publication date Apr 15, 2004
- APPLIED MATERIALS, INC.
- Gopalakrishna B. Prabhu
- B24 - GRINDING POLISHING
Information Patent Application
CMP platen with patterned surface
- Publication number 20040053566
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Robert D. Tolles
- B24 - GRINDING POLISHING

Gopalakrishna B. Prabhu

Person

Patents Grantslast 30 patents

Parameter sensing and computer modeling for gas delivery health mon...

Feedback control of a chemical mechanical polishing device providin...

Method to form a device by constructing a support element on a thin...

Retaining ring with shaped profile

Creation of low-relief texture for a photovoltaic cell

Solar panel edge deletion module

Method to form a device by constructing a support element on a thin...

Method to form a device including an annealed lamina and having amo...

Feedback control of chemical mechanical polishing device providing...

Retaining ring with shaped profile

Method for forming an electrical connection

Polishing article with integrated window stripe

Polishing apparatus with grooved subpad

Polishing article with integrated window stripe

Materials for chemical mechanical polishing

Materials for chemical mechanical polishing

Feedback control of a chemical mechanical polishing device providin...

Polishing processes for shallow trench isolation substrates

Carbonation of pH controlled KOH solution for improved polishing of...

Methods and compositions for chemical mechanical polishing

CMP platen with patterned surface

CMP polishing pad

Method and apparatus for chemical mechanical polishing

Method of chemical mechanical polishing with edge control

Method of post CMP defect stability improvement

CMP platen with patterned surface

CMP polishing pad

Carrier head with edge control for chemical mechanical polishing

Patents Applicationslast 30 patents

SYSTEM AND METHOD TO MAP THICKNESS VARIATIONS OF SUBSTRATES INMANUF...

PARAMETER SENSING AND COMPUTER MODELING FOR GAS DELIVERY HEALTH MON...

METHOD OF FORMING POLISHING SHEET

Method to Form a Device by Constructing a Support Element on a Thin...

SEMICONDUCTOR ASSEMBLY WITH A METAL OXIDE LAYER HAVING INTERMEDIATE...

FEEDBACK CONTROL OF A CHEMICAL MECHANICAL POLISHING DEVICE PROVIDIN...

RETAINING RING WITH SHAPED PROFILE

REAL-TIME MONITORING OF RETAINING RING THICKNESS AND LIFETIME

Creation of Low-Relief Texture for a Photovoltaic Cell

MONOLITHIC LINEAR POLISHING SHEET

METHOD FOR FORMING AN ELECTRICAL CONNECTION

POLISHING ARTICLE WITH INTEGRATED WINDOW STRIPE

SOLAR PANEL EDGE DELETION MODULE

LEADER AND TRAILER FOR LINEAR POLISHING SHEET

Retaining Ring with Shaped Profile

SELECTIVE CHEMISTRY FOR FIXED ABRASIVE CMP

Smart polishing media assembly for planarizing substrates

Polishing article with window stripe

Polishing article with integrated window stripe

Polishing apparatus with grooved subpad

Polishing system with spiral-grooved subpad

Polishing article with integrated window stripe

Dechuck using subpad with recess

MATERIALS FOR CHEMICAL MECHANICAL POLISHING

Feedback control of chemical mechanical polishing device providing...

Materials for chemical mechanical polishing

Carbonation of pH controlled KOH solution for improved polishing of...

Polishing processes for shallow trench isolation substrates

Platen with patterned surface for chemical mechanical polishing

CMP platen with patterned surface