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Positive resist composition
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Patent number 6,383,708
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Issue date May 7, 2002
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Sumitomo Chemical Company, Limited
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Yasunori Uetani
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Positive resist composition
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Patent number 5,843,616
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Issue date Dec 1, 1998
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Sumitomo Chemical Company, Ltd.
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Kunishige Edamatsu
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Positive resist composition
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Patent number 5,468,590
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Issue date Nov 21, 1995
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Sumitomo Chemical Company, Limited
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Kazuhiko Hashimoto
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Positive resist composition
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Patent number 5,451,484
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Issue date Sep 19, 1995
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Sumitomo Chemical Company, Ltd.
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Kyoko Nagase
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Positive resist composition
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Patent number 5,429,904
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Issue date Jul 4, 1995
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Sumitomo Chemical Company, Ltd.
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Kyoko Nagase
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Positive type resist composition
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Patent number 5,326,665
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Issue date Jul 5, 1994
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Sumitomo Chemical Company, Limited
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Haruyoshi Osaki
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
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Novolak resin for positive photoresist
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Patent number 4,812,551
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Issue date Mar 14, 1989
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Sumitomo Chemical Company, Limited
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Fumio Oi
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C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...