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Hideyoshi Tsuruta

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  • Nagoya, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    WAFER HOLDER AND METHOD FOR MANUFACTURING THE SAME
    • Publication number 20160196999
    • Publication date Jul 7, 2016
    • NGK Insulators, Ltd.
    • Takuya YANOH
    • B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
  • Information Patent Application

    HEATING APPARATUS
    • Publication number 20090159588
    • Publication date Jun 25, 2009
    • NGK Insulators, Ltd.
    • Ikuhisa Morioka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATING DEVICE
    • Publication number 20080142501
    • Publication date Jun 19, 2008
    • NGK Insulators, Ltd.
    • Ikuhisa Morioka
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20070223175
    • Publication date Sep 27, 2007
    • NGK Insulators, Ltd.
    • Ikuhisa Morioka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ELECTROSTATIC CHUCK
    • Publication number 20070146961
    • Publication date Jun 28, 2007
    • NGK Insulators, Ltd.
    • Ikuhisa Morioka
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic chuck
    • Publication number 20060279899
    • Publication date Dec 14, 2006
    • NGK Insulators, Ltd.
    • Yasufumi Aihara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Power-supplying member and heating apparatus using the same
    • Publication number 20060237442
    • Publication date Oct 26, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Power-supplying member and heating apparatus using the same
    • Publication number 20060231034
    • Publication date Oct 19, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Plasma processing member
    • Publication number 20060191879
    • Publication date Aug 31, 2006
    • NGK Insulators, Ltd.
    • Yasumitsu Tomita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    HEATING SYSTEMS
    • Publication number 20060186109
    • Publication date Aug 24, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate heating apparatus and manufacturing method for the same
    • Publication number 20060011610
    • Publication date Jan 19, 2006
    • NGK Insulators, Ltd.
    • Nobuyuki Kondou
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate heating apparatus
    • Publication number 20060011611
    • Publication date Jan 19, 2006
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Substrate heating device
    • Publication number 20050258160
    • Publication date Nov 24, 2005
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate heater and fabrication method for the same
    • Publication number 20050082274
    • Publication date Apr 21, 2005
    • NGK Insulators, Ltd.
    • Nobuyuki Kondou
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Systems for supporting ceramic susceptors
    • Publication number 20050006374
    • Publication date Jan 13, 2005
    • NGK Insulators, Ltd.
    • Kazuaki Yamaguchi
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Heating systems
    • Publication number 20040177812
    • Publication date Sep 16, 2004
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Systems for producing semiconductors and members therefor
    • Publication number 20040144312
    • Publication date Jul 29, 2004
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Systems for producing semiconductors and members therefor
    • Publication number 20040144767
    • Publication date Jul 29, 2004
    • NGK Insulators, Ltd.
    • Yoshinobu Goto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic chucks and electrostatically attracting structures
    • Publication number 20040070916
    • Publication date Apr 15, 2004
    • NGK Insulators, Ltd.
    • Hideyoshi Tsuruta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Joined bodies and a method of producing the same
    • Publication number 20040016792
    • Publication date Jan 29, 2004
    • NGK Insulators, Ltd.
    • Tomoyuki Fujii
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Electrostatic chucks
    • Publication number 20030095370
    • Publication date May 22, 2003
    • NGK Insulators, Ltd.
    • Hideyoshi Tsuruta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic adsorption device
    • Publication number 20030059627
    • Publication date Mar 27, 2003
    • NGK Insulators, Ltd.
    • Hideyoshi Tsuruta
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Aluminum nitride sintered bodies and members for semiconductor-prod...
    • Publication number 20020165079
    • Publication date Nov 7, 2002
    • NGK Insulators, Ltd.
    • Yuji Katsuda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Electrostatic chuck and substrate processing apparatus
    • Publication number 20020159217
    • Publication date Oct 31, 2002
    • NGK Insulators, Ltd.
    • Hideyoshi Tsuruta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrostatic chucks and process for producing the same
    • Publication number 20020109954
    • Publication date Aug 15, 2002
    • NGK Insulators, Ltd.
    • Hideyoshi Tsuruta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Electrostatic chucks and electrostatically adsorbing structures
    • Publication number 20020012219
    • Publication date Jan 31, 2002
    • NGK Insulators, Ltd.
    • Hideyoshi Tsuruta
    • H01 - BASIC ELECTRIC ELEMENTS