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Atsugi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Laser irradiation method and laser irradiation apparatus
Patent number
10,369,658
Issue date
Aug 6, 2019
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Laser irradiation method and laser irradiation apparatus
Patent number
9,387,553
Issue date
Jul 12, 2016
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Laser irradiation apparatus and manufacturing method of semiconduct...
Patent number
8,891,170
Issue date
Nov 18, 2014
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Beam homogenizer, laser irradiation apparatus, and method for manuf...
Patent number
8,670,641
Issue date
Mar 11, 2014
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
8,580,700
Issue date
Nov 12, 2013
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Photomask
Patent number
8,512,917
Issue date
Aug 20, 2013
Semiconductor Energy Laboratory Co., Ltd.
Hideaki Shishido
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser irradiation apparatus, laser irradiation method, and manufact...
Patent number
8,455,790
Issue date
Jun 4, 2013
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Manufacturing method of memory element, laser irradiation apparatus...
Patent number
8,426,324
Issue date
Apr 23, 2013
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Manufacturing method of semiconductor device and laser processing a...
Patent number
8,372,762
Issue date
Feb 12, 2013
Semiconductor Energy Laboratory Co., Ltd.
Hirotada Oishi
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Information
Patent Grant
Beam homogenizer, laser irradiation apparatus, and method for manuf...
Patent number
8,326,102
Issue date
Dec 4, 2012
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Grant
Method for manufacturing semiconductor device and laser irradiation...
Patent number
8,309,443
Issue date
Nov 13, 2012
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Laser irradiation method and laser irradiation apparatus
Patent number
8,045,271
Issue date
Oct 25, 2011
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Laser irradiation apparatus and manufacturing method of semiconduct...
Patent number
8,000,016
Issue date
Aug 16, 2011
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Manufacturing method of memory element, laser irradiation apparatus...
Patent number
7,940,441
Issue date
May 10, 2011
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Beam homogenizer, laser irradiation apparatus, and method for manuf...
Patent number
7,916,987
Issue date
Mar 29, 2011
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Grant
Method for manufacturing display device
Patent number
7,807,483
Issue date
Oct 5, 2010
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
G02 - OPTICS
Information
Patent Grant
Manufacturing method of semiconductor device and laser processing a...
Patent number
7,732,351
Issue date
Jun 8, 2010
Semiconductor Energy Laboratory Co., Ltd.
Hirotada Oishi
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Information
Patent Grant
Method for manufacturing semiconductor device and laser irradiation...
Patent number
7,618,882
Issue date
Nov 17, 2009
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
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Information
Patent Grant
Laser irradiation method and laser irradiation apparatus
Patent number
7,595,932
Issue date
Sep 29, 2009
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser irradiation apparatus, method of laser irradiation, and metho...
Patent number
7,532,378
Issue date
May 12, 2009
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for manufacturing a semiconductor device and laser irradiati...
Patent number
7,524,712
Issue date
Apr 28, 2009
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam homogenizer and laser irradiation apparatus
Patent number
7,486,856
Issue date
Feb 3, 2009
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser irradiation apparatus and method of manufacturing semiconduct...
Patent number
7,405,114
Issue date
Jul 29, 2008
Semiconductor Energy Laboratory Co., Ltd.
Hirotada Oishi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Beam homogenizer, laser irradiation apparatus, and method for manuf...
Patent number
7,387,954
Issue date
Jun 17, 2008
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical component and laser irradiation apparatus
Patent number
7,187,507
Issue date
Mar 6, 2007
Semiconductor Energy Laboratory Co., Ltd.
Hirotada Oishi
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
Publication number
20160311057
Publication date
Oct 27, 2016
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
BEAM HOMOGENIZER, LASER IRRADIATION APPARATUS, AND METHOD FOR MANUF...
Publication number
20130084691
Publication date
Apr 4, 2013
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
Publication number
20110304920
Publication date
Dec 15, 2011
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Photomask
Publication number
20110269060
Publication date
Nov 3, 2011
Semiconductor Energy Laboratory Co., Ltd
Hideaki Shishido
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER IRRADIATION APPARATUS AND MANUFACTURING METHOD OF SEMICONDUCT...
Publication number
20110255172
Publication date
Oct 20, 2011
Semiconductor Energy Laboratory Co., Ltd.
Koichiro TANAKA
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Information
Patent Application
MANUFACTURING METHOD OF MEMORY ELEMENT, LASER IRRADIATION APPARATUS...
Publication number
20110183500
Publication date
Jul 28, 2011
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
BEAM HOMOGENIZER, LASER IRRADIATION APPARATUS, AND METHOD FOR MANUF...
Publication number
20110170198
Publication date
Jul 14, 2011
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Application
Manufacturing Method of Semiconductor Device and Laser Processing A...
Publication number
20100301026
Publication date
Dec 2, 2010
Semiconductor Energy Laboratory Co., Ltd
Hirotada Oishi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND LASER IRRADIATION...
Publication number
20100048036
Publication date
Feb 25, 2010
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER IRRADIATION METHOD AND LASER IRRADIATION APPARATUS
Publication number
20090291569
Publication date
Nov 26, 2009
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Beam homogenizer, laser irradiation apparatus, and method for manuf...
Publication number
20080267245
Publication date
Oct 30, 2008
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Application
Method for manufacturing display device
Publication number
20080227232
Publication date
Sep 18, 2008
Semiconductor Energy Laboratory Co., Ltd
Shunpei Yamazaki
G02 - OPTICS
Information
Patent Application
Manufacturing Method of Semiconductor Device and Laser Processing A...
Publication number
20080076267
Publication date
Mar 27, 2008
Hirotada Oishi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser irradiation apparatus, method of laser irradiation, and metho...
Publication number
20070195834
Publication date
Aug 23, 2007
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for manufacturing semiconductor device
Publication number
20070197049
Publication date
Aug 23, 2007
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Manufacturing method of memory element, laser irradiation apparatus...
Publication number
20070184639
Publication date
Aug 9, 2007
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for manufacturing a semiconductor device and laser irradiati...
Publication number
20070184590
Publication date
Aug 9, 2007
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Laser irradiation apparatus, laser irradiation method, and manufact...
Publication number
20070138151
Publication date
Jun 21, 2007
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Laser irradiation apparatus and manufacturing method of semiconduct...
Publication number
20070091978
Publication date
Apr 26, 2007
Semiconductor Energy Laboratory Co. Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for manufacturing semiconductor device and laser irradiation...
Publication number
20060246693
Publication date
Nov 2, 2006
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Beam homogenizer, laser irradiation apparatus, and method for manuf...
Publication number
20060072877
Publication date
Apr 6, 2006
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
G02 - OPTICS
Information
Patent Application
Laser irradiation method and laser irradiation apparatus
Publication number
20050254395
Publication date
Nov 17, 2005
Semiconductor Energy
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Beam homogenizer and laser irradiation apparatus
Publication number
20050213218
Publication date
Sep 29, 2005
Semiconductor Energy Laboratory Co., Ltd.
Koichiro Tanaka
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Optical component and laser irradiation apparatus
Publication number
20040240086
Publication date
Dec 2, 2004
Semiconductor Energy Laboratory Co., Ltd.
Hirotada Oishi
G02 - OPTICS
Information
Patent Application
Laser irradiation apparatus and method of manufacturing semiconduct...
Publication number
20040074881
Publication date
Apr 22, 2004
Semiconductor Energy Laboratory Co., Ltd.
Hirotada Oishi
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