Hubert Benzel

Person

Pliezhausen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor unit including a decoupling structure and manufacturing meth...
- Patent number 9,926,188
- Issue date Mar 27, 2018
- Robert Bosch GmbH
- Johannes Classen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor system and corresponding manufacturing method
- Patent number 9,885,626
- Issue date Feb 6, 2018
- Robert Bosch GmbH
- Frieder Haag
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor, method for producing a sensor and method for mounting a sensor
- Patent number 9,632,104
- Issue date Apr 25, 2017
- Robert Bosch GmbH
- Hubert Benzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated diode array and corresponding manufacturing method
- Patent number 9,240,407
- Issue date Jan 19, 2016
- Robert Bosch GmbH
- Gregor Schuermann
- G01 - MEASURING TESTING
Information Patent Grant
Component having a via
- Patent number 9,082,831
- Issue date Jul 14, 2015
- Robert Bosch GmbH
- Marcus Ahles
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for a micromechanical component, corresponding...
- Patent number 8,901,684
- Issue date Dec 2, 2014
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having an inclined structure and correspo...
- Patent number 8,847,336
- Issue date Sep 30, 2014
- Robert Bosch GmbH
- Tjalf Pirk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number RE44995
- Issue date Jul 8, 2014
- Robert Bosch GmbH
- Hubert Benzel
- 216 - Etching a substrate: processes
Information Patent Grant
Method for creating monocrystalline piezoresistors
- Patent number 8,759,136
- Issue date Jun 24, 2014
- Robert Bosch GmbH
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Grant
Sensor and method for its production
- Patent number 8,749,013
- Issue date Jun 10, 2014
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a component, and sensor element
- Patent number 8,530,261
- Issue date Sep 10, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical diaphragm structure havi...
- Patent number 8,519,494
- Issue date Aug 27, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical capacitive pressure transducer and production method
- Patent number 8,492,855
- Issue date Jul 23, 2013
- Robert Bosch GmbH
- Gerhard Lammel
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a silicon substrate having modified surface pr...
- Patent number 8,492,850
- Issue date Jul 23, 2013
- Robert Bosch GmbH
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor system, method for operating a sensor system, and method for...
- Patent number 8,485,041
- Issue date Jul 16, 2013
- Robert Bosch GmbH
- Marcus Ahles
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing capped MEMS components
- Patent number 8,470,631
- Issue date Jun 25, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical pressure-sensor element and method for its production
- Patent number 8,429,977
- Issue date Apr 30, 2013
- Robert Bosch GmbH
- Marcus Ahles
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a plurality of chips and a chip produced accor...
- Patent number 8,405,210
- Issue date Mar 26, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing chips
- Patent number 8,389,327
- Issue date Mar 5, 2013
- Robert Bosch GmbH
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a plurality of thin chips and correspondin...
- Patent number 8,318,544
- Issue date Nov 27, 2012
- Robert Bosch GmbH
- Hubert Benzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure sensor having a cap above a first diaphragm connected to a...
- Patent number 8,256,299
- Issue date Sep 4, 2012
- Robert Bosch GmbH
- Michaela Mitschke
- G01 - MEASURING TESTING
Information Patent Grant
Workpiece composite having a preform and a gel
- Patent number 8,250,925
- Issue date Aug 28, 2012
- Robert Bosch GmbH
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Grant
Manufacturing method for a micromechanical component, corresponding...
- Patent number 8,232,126
- Issue date Jul 31, 2012
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor system and method for manufacturing a sensor system
- Patent number 8,146,439
- Issue date Apr 3, 2012
- Robert Bosch GmbH
- Marcus Ahles
- G01 - MEASURING TESTING
Information Patent Grant
Method for manufacturing a semiconductor structure, and a correspon...
- Patent number 8,148,234
- Issue date Apr 3, 2012
- Robert Bosch GmbH
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 8,123,963
- Issue date Feb 28, 2012
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor element
- Patent number 7,918,136
- Issue date Apr 5, 2011
- Robert Bosch GmbH
- Joerg Muchow
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor wafer having a multitude of sensor elements and metho...
- Patent number 7,872,487
- Issue date Jan 18, 2011
- Robert Bosch GmbH
- Holger Ross
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a sensor array including a monolithically...
- Patent number 7,858,424
- Issue date Dec 28, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical semiconductor sensor
- Patent number 7,843,025
- Issue date Nov 30, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SENSOR UNIT INCLUDING A DECOUPLING STRUCTURE AND MANUFACTURING METH...
- Publication number 20170203958
- Publication date Jul 20, 2017
- ROBERT BOSCH GmbH
- Johannes CLASSEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL SENSOR SYSTEM AND CORRESPONDING MANUFACTURING METHOD
- Publication number 20150059485
- Publication date Mar 5, 2015
- ROBERT BOSCH GmbH
- Frieder Haag
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED HUMIDITY SENSOR AND METHOD FOR THE MANUFACTURE THEREOF
- Publication number 20150047430
- Publication date Feb 19, 2015
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR D...
- Publication number 20140151885
- Publication date Jun 5, 2014
- ROBERT BOSCH GmbH
- Peter SCHMOLLNGRUBER
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED DIODE ARRAY AND CORRESPONDING MANUFACTURING METHOD
- Publication number 20140097511
- Publication date Apr 10, 2014
- ROBERT BOSCH GmbH
- Gregor Schuermann
- G01 - MEASURING TESTING
Information Patent Application
SENSOR, METHOD FOR PRODUCING A SENSOR AND METHOD FOR MOUNTING A SENSOR
- Publication number 20130257420
- Publication date Oct 3, 2013
- ROBERT BOSCH GmbH
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT, CORRESPONDING...
- Publication number 20130001711
- Publication date Jan 3, 2013
- Hubert BENZEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for creating monocrystalline piezoresistors
- Publication number 20120248552
- Publication date Oct 4, 2012
- Hubert BENZEL
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE, AND A CORRESPON...
- Publication number 20120132925
- Publication date May 31, 2012
- Gerhard Lammel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sensor system for detecting high pressures
- Publication number 20120073379
- Publication date Mar 29, 2012
- Marcus Ahles
- G01 - MEASURING TESTING
Information Patent Application
Component having a VIA
- Publication number 20120068356
- Publication date Mar 22, 2012
- Marcus Ahles
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR SYSTEM, METHOD FOR OPERATING A SENSOR SYSTEM, AND METHOD FOR...
- Publication number 20110259109
- Publication date Oct 27, 2011
- Marcus Ahles
- G01 - MEASURING TESTING
Information Patent Application
Micromechanical component and method for manufacturing a micromecha...
- Publication number 20110220471
- Publication date Sep 15, 2011
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical pressure-sensor element and method for its production
- Publication number 20110209555
- Publication date Sep 1, 2011
- Marcus Ahles
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a component, method for manufacturing a co...
- Publication number 20110169107
- Publication date Jul 14, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method for a micromechanical component, corresponding...
- Publication number 20110163396
- Publication date Jul 7, 2011
- ROBERT BOSCH GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CHIPS
- Publication number 20110151620
- Publication date Jun 23, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING AN INCLINED STRUCTURE AND CORRESPO...
- Publication number 20110147862
- Publication date Jun 23, 2011
- Tjalf Pirk
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micromechanical diaphragm structure havi...
- Publication number 20110147864
- Publication date Jun 23, 2011
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PLURALITY OF THIN CHIPS AND CORRESPONDIN...
- Publication number 20110115095
- Publication date May 19, 2011
- Hubert Benzel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micromechanical Capacitive Sensor Element
- Publication number 20110108932
- Publication date May 12, 2011
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
SENSOR SYSTEM AND METHOD FOR MANUFACTURING SAME
- Publication number 20110073969
- Publication date Mar 31, 2011
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR SYSTEM AND METHOD FOR MANUFACTURING A SENSOR SYSTEM
- Publication number 20110072906
- Publication date Mar 31, 2011
- Marcus AHLES
- G01 - MEASURING TESTING
Information Patent Application
SENSOR AND METHOD FOR PRODUCING THE SAME
- Publication number 20110002359
- Publication date Jan 6, 2011
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A PLURALITY OF CHIPS AND A CHIP PRODUCED ACCOR...
- Publication number 20100283147
- Publication date Nov 11, 2010
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING CAPPED MEMS COMPONENTS
- Publication number 20100267183
- Publication date Oct 21, 2010
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A COMPONENT, AND SENSOR ELEMENT
- Publication number 20100164027
- Publication date Jul 1, 2010
- Torsten Kramer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Construction of a pressure sensor
- Publication number 20100139409
- Publication date Jun 10, 2010
- Michaela Mitschke
- G01 - MEASURING TESTING
Information Patent Application
DIFFERENTIAL-PRESSURE SENSOR SYSTEM AND CORRESPONDING PRODUCTION ME...
- Publication number 20100133631
- Publication date Jun 3, 2010
- Hubert Benzel
- G01 - MEASURING TESTING
Information Patent Application
Workpiece Composite and Use of the Workpiece Composite
- Publication number 20100077862
- Publication date Apr 1, 2010
- Hubert Benzel
- G01 - MEASURING TESTING

Hubert Benzel

Person

Patents Grantslast 30 patents

Sensor unit including a decoupling structure and manufacturing meth...

Micromechanical sensor system and corresponding manufacturing method

Sensor, method for producing a sensor and method for mounting a sensor

Integrated diode array and corresponding manufacturing method

Component having a via

Manufacturing method for a micromechanical component, corresponding...

Micromechanical component having an inclined structure and correspo...

Method for producing a semiconductor component and a semiconductor...

Method for creating monocrystalline piezoresistors

Sensor and method for its production

Method for producing a component, and sensor element

Method for manufacturing a micromechanical diaphragm structure havi...

Micromechanical capacitive pressure transducer and production method

Method for producing a silicon substrate having modified surface pr...

Sensor system, method for operating a sensor system, and method for...

Method for manufacturing capped MEMS components

Micromechanical pressure-sensor element and method for its production

Method for producing a plurality of chips and a chip produced accor...

Method for manufacturing chips

Method for manufacturing a plurality of thin chips and correspondin...

Pressure sensor having a cap above a first diaphragm connected to a...

Workpiece composite having a preform and a gel

Manufacturing method for a micromechanical component, corresponding...

Sensor system and method for manufacturing a sensor system

Method for manufacturing a semiconductor structure, and a correspon...

Method for producing a semiconductor component and a semiconductor...

Micromechanical sensor element

Semiconductor wafer having a multitude of sensor elements and metho...

Method for manufacturing a sensor array including a monolithically...

Micromechanical semiconductor sensor

Patents Applicationslast 30 patents

SENSOR UNIT INCLUDING A DECOUPLING STRUCTURE AND MANUFACTURING METH...

MICROMECHANICAL SENSOR SYSTEM AND CORRESPONDING MANUFACTURING METHOD

INTEGRATED HUMIDITY SENSOR AND METHOD FOR THE MANUFACTURE THEREOF

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR D...

INTEGRATED DIODE ARRAY AND CORRESPONDING MANUFACTURING METHOD

SENSOR, METHOD FOR PRODUCING A SENSOR AND METHOD FOR MOUNTING A SENSOR

MANUFACTURING METHOD FOR A MICROMECHANICAL COMPONENT, CORRESPONDING...

Method for creating monocrystalline piezoresistors

METHOD FOR MANUFACTURING A SEMICONDUCTOR STRUCTURE, AND A CORRESPON...

Sensor system for detecting high pressures

Component having a VIA

SENSOR SYSTEM, METHOD FOR OPERATING A SENSOR SYSTEM, AND METHOD FOR...

Micromechanical component and method for manufacturing a micromecha...

Micromechanical pressure-sensor element and method for its production

Method for manufacturing a component, method for manufacturing a co...

Manufacturing method for a micromechanical component, corresponding...

METHOD FOR MANUFACTURING CHIPS

MICROMECHANICAL COMPONENT HAVING AN INCLINED STRUCTURE AND CORRESPO...

Method for manufacturing a micromechanical diaphragm structure havi...

METHOD FOR MANUFACTURING A PLURALITY OF THIN CHIPS AND CORRESPONDIN...

Micromechanical Capacitive Sensor Element

SENSOR SYSTEM AND METHOD FOR MANUFACTURING SAME

SENSOR SYSTEM AND METHOD FOR MANUFACTURING A SENSOR SYSTEM

SENSOR AND METHOD FOR PRODUCING THE SAME

METHOD FOR PRODUCING A PLURALITY OF CHIPS AND A CHIP PRODUCED ACCOR...

METHOD FOR MANUFACTURING CAPPED MEMS COMPONENTS

METHOD FOR PRODUCING A COMPONENT, AND SENSOR ELEMENT

Construction of a pressure sensor

DIFFERENTIAL-PRESSURE SENSOR SYSTEM AND CORRESPONDING PRODUCTION ME...

Workpiece Composite and Use of the Workpiece Composite