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Hui-Jung Wu
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Pleasanton, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tin oxide mandrels in patterning
Patent number
12,183,589
Issue date
Dec 31, 2024
Lam Research Corporation
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
12,094,711
Issue date
Sep 17, 2024
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film stack simplification for high aspect ratio patterning and vert...
Patent number
12,080,592
Issue date
Sep 3, 2024
Lam Research Corporation
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chamfer-less via integration scheme
Patent number
11,987,876
Issue date
May 21, 2024
Lam Research Corporation
Sivananda Krishnan Kanakasabapathy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Self-aligned vertical integration of three-terminal memory devices
Patent number
11,792,987
Issue date
Oct 17, 2023
Lam Research Corporation
Thorsten Lill
Information
Patent Grant
Tin oxide mandrels in patterning
Patent number
11,355,353
Issue date
Jun 7, 2022
Lam Research Corporation
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
11,322,351
Issue date
May 3, 2022
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
10,546,748
Issue date
Jan 28, 2020
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liner and barrier applications for subtractive metal integration
Patent number
10,199,235
Issue date
Feb 5, 2019
Lam Research Corporation
Hui-Jung Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Liner and barrier applications for subtractive metal integration
Patent number
9,899,234
Issue date
Feb 20, 2018
Lam Research Corporation
Hui-Jung Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Selective formation of dielectric barriers for metal interconnects...
Patent number
9,418,889
Issue date
Aug 16, 2016
Lam Research Corporation
Thomas Weller Mountsier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal and silicon containing capping layers for interconnects
Patent number
8,753,978
Issue date
Jun 17, 2014
Novellus Systems, Inc.
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Interfacial capping layers for interconnects
Patent number
8,268,722
Issue date
Sep 18, 2012
Novellus Systems, Inc.
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for reducing UV and dielectric diffusion barrier interaction
Patent number
8,173,537
Issue date
May 8, 2012
Novellus Systems, Inc.
Kaushik Chattopadhyay
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reducing UV and dielectric diffusion barrier interaction through th...
Patent number
8,124,522
Issue date
Feb 28, 2012
Novellus Systems, Inc.
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective self-aligned buffer layers for damascene interconnects
Patent number
8,021,486
Issue date
Sep 20, 2011
Novellus Systems, Inc.
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition of doped copper seed layers having improved reliability
Patent number
8,017,523
Issue date
Sep 13, 2011
Novellus Systems, Inc.
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective self-aligned buffer layers for damascene interconnects
Patent number
7,704,873
Issue date
Apr 27, 2010
Novellus Systems, Inc.
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protective self-aligned buffer layers for damascene interconnects
Patent number
7,576,006
Issue date
Aug 18, 2009
Novellus Systems, Inc.
Yongsik Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Absorbing compounds for spin-on-glass anti-reflective coatings for...
Patent number
6,914,114
Issue date
Jul 5, 2005
Honeywell International Inc.
Teresa Baldwin
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Low dielectric constant polyorganosilicon materials generated from...
Patent number
6,841,256
Issue date
Jan 11, 2005
Honeywell International Inc.
Paul Apen
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Polycarbosilane adhesion promoters for low dielectric constant poly...
Patent number
6,780,517
Issue date
Aug 24, 2004
Honeywell International Inc.
Tian-An Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Use of multifunctional si-based oligomer/polymer for the surface mo...
Patent number
6,770,572
Issue date
Aug 3, 2004
AlliedSignal Inc.
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Polycarbosilane adhesion promoters for low dielectric constant poly...
Patent number
6,761,975
Issue date
Jul 13, 2004
Honeywell International Inc.
Tian-An Chen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Absorbing compounds for spin-on-glass anti-reflective coatings for...
Patent number
6,605,362
Issue date
Aug 12, 2003
Honeywell International Inc.
Teresa Baldwin
C03 - GLASS MINERAL OR SLAG WOOL
Information
Patent Grant
Multifunctional reagents for the surface modification of nanoporous...
Patent number
6,518,205
Issue date
Feb 11, 2003
AlliedSignal Inc.
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Simplified method to produce nanoporous silicon-based films
Patent number
6,495,479
Issue date
Dec 17, 2002
Honeywell International, Inc.
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Simplified process for producing nanoporous silica
Patent number
6,495,906
Issue date
Dec 17, 2002
AlliedSignal Inc.
Douglas M. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low dielectric constant films used as copper diffusion barrier
Patent number
6,489,030
Issue date
Dec 3, 2002
Honeywell International, Inc.
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low dielectric constant polyorganosilicon coatings generated from p...
Patent number
6,395,649
Issue date
May 28, 2002
Honeywell International Inc.
Hui-Jung Wu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Patents Applications
last 30 patents
Information
Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
Publication number
20240387258
Publication date
Nov 21, 2024
LAM RESEARCH CORPORATION
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMFER-LESS VIA INTEGRATION SCHEME
Publication number
20240263301
Publication date
Aug 8, 2024
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20220270877
Publication date
Aug 25, 2022
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20220165571
Publication date
May 26, 2022
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM STACK SIMPLIFICATION FOR HIGH ASPECT RATIO PATTERNING AND VERT...
Publication number
20220051938
Publication date
Feb 17, 2022
LAM RESEARCH CORPORATION
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF-ALIGNED VERTICAL INTEGRATION OF THREE-TERMINAL MEMORY DEVICES
Publication number
20210391355
Publication date
Dec 16, 2021
LAM RESEARCH CORPORATION
Thorsten LILL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20210265163
Publication date
Aug 26, 2021
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE MANDRELS IN PATTERNING
Publication number
20210265173
Publication date
Aug 26, 2021
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMFER-LESS VIA INTEGRATION SCHEME
Publication number
20210017643
Publication date
Jan 21, 2021
LAM RESEARCH CORPORATION
Sivananda Krishnan Kanakasabapathy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20200083044
Publication date
Mar 12, 2020
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE MANDRELS IN PATTERNING
Publication number
20190237341
Publication date
Aug 1, 2019
LAM RESEARCH CORPORATION
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20180240667
Publication date
Aug 23, 2018
LAM RESEARCH CORPORATION
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINER AND BARRIER APPLICATIONS FOR SUBTRACTIVE METAL INTEGRATION
Publication number
20180211846
Publication date
Jul 26, 2018
LAM RESEARCH CORPORATION
Hui-Jung Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SELECTIVE FORMATION OF DIELECTRIC BARRIERS FOR METAL INTERCONNECTS...
Publication number
20150380302
Publication date
Dec 31, 2015
LAM RESEARCH CORPORATION
Thomas Weller Mountsier
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINER AND BARRIER APPLICATIONS FOR SUBTRACTIVE METAL INTEGRATION
Publication number
20150380272
Publication date
Dec 31, 2015
LAM RESEARCH CORPORATION
Hui-Jung Wu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METAL AND SILICON CONTAINING CAPPING LAYERS FOR INTERCONNECTS
Publication number
20140216336
Publication date
Aug 7, 2014
Novellus Systems, Inc.
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL AND SILICON CONTAINING CAPPING LAYERS FOR INTERCONNECTS
Publication number
20130143401
Publication date
Jun 6, 2013
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MITIGATING SUBSTRATE DAMAGE DURING DEPOSITION PROCESSES
Publication number
20120083134
Publication date
Apr 5, 2012
Hui-Jung WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERFACIAL CAPPING LAYERS FOR INTERCONNECTS
Publication number
20100308463
Publication date
Dec 9, 2010
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Sequential chemical vapor deposition - spin-on dielectric depositio...
Publication number
20060068540
Publication date
Mar 30, 2006
Kyu S. Min
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low dielectric constant polyorganosilicon materials generated from...
Publication number
20050182151
Publication date
Aug 18, 2005
Paul Apen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Absorbing compounds for spin-on-glass anti-reflective coatings for...
Publication number
20030199659
Publication date
Oct 23, 2003
Teresa Baldwin
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Simplified method to produce nanoporous silicon-based films
Publication number
20030077918
Publication date
Apr 24, 2003
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Process for optimizing mechanical strength of nanoporous silica
Publication number
20030062600
Publication date
Apr 3, 2003
Hui-Jung Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Low dielectric constant polyorganosilicon materials generated from...
Publication number
20030017635
Publication date
Jan 23, 2003
Paul Apen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Polycarbosilane adhesion promoters for low dielectric constant poly...
Publication number
20020198353
Publication date
Dec 26, 2002
Honeywell International Inc.
Tian-An Chen
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Simplified process for producing nanoporous silica
Publication number
20020123242
Publication date
Sep 5, 2002
Douglas M. Smith
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Absorbing compounds for spin-on-glass anti-reflective coatings for...
Publication number
20020068181
Publication date
Jun 6, 2002
Teresa Baldwin
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Low dielectric constant polyorganosilicon coatings generated from p...
Publication number
20020064965
Publication date
May 30, 2002
Hui-Jung Wu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
Use of multifunctional si-based oligomer/polymer for the surface mo...
Publication number
20020001973
Publication date
Jan 3, 2002
Hui-Jung Wu
C01 - INORGANIC CHEMISTRY