Ilya Perlov

Person

Santa Clara, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 8,079,894
- Issue date Dec 20, 2011
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus for storing and moving a cassette
- Patent number 7,637,707
- Issue date Dec 29, 2009
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 7,614,939
- Issue date Nov 10, 2009
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 7,255,632
- Issue date Aug 14, 2007
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus having a trough
- Patent number 7,238,090
- Issue date Jul 3, 2007
- Applied Materials, Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical polishing system having multiple polishing stat...
- Patent number 7,097,544
- Issue date Aug 29, 2006
- Applied Materials Inc.
- Robert D. Tolles
- B24 - GRINDING POLISHING
Information Patent Grant
Method of controlling carrier head with multiple chambers
- Patent number 6,896,584
- Issue date May 24, 2005
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a flexible membrane to form multiple chambers
- Patent number 6,648,740
- Issue date Nov 18, 2003
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for improved substrate handling
- Patent number 6,575,737
- Issue date Jun 10, 2003
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for orienting substrates
- Patent number 6,532,866
- Issue date Mar 18, 2003
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier head with a flexible membrane
- Patent number 6,506,104
- Issue date Jan 14, 2003
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for improved substrate handling
- Patent number 6,468,353
- Issue date Oct 22, 2002
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for orienting substrates
- Patent number 6,393,337
- Issue date May 21, 2002
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for aligning a substrate on a support member
- Patent number 6,374,508
- Issue date Apr 23, 2002
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioner apparatus for chemical mechanical polishing
- Patent number 6,293,853
- Issue date Sep 25, 2001
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carousel wafer transfer system
- Patent number 6,287,386
- Issue date Sep 11, 2001
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for storing and moving a cassette
- Patent number 6,283,692
- Issue date Sep 4, 2001
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Carrier head with a flexible membrane for a chemical mechanical pol...
- Patent number 6,277,010
- Issue date Aug 21, 2001
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Thermal CVD/PECVD reactor and use for thermal chemical vapor deposi...
- Patent number 6,167,834
- Issue date Jan 2, 2001
- Applied Materials, Inc.
- David Nin-Kou Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for aligning a substrate on a support member
- Patent number 6,146,463
- Issue date Nov 14, 2000
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier head with a retaining ring for a chemical mechanical polish...
- Patent number 6,143,127
- Issue date Nov 7, 2000
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
System for chemical mechanical polishing having multiple polishing...
- Patent number 6,126,517
- Issue date Oct 3, 2000
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING
Information Patent Grant
Chemical vapor deposition chamber
- Patent number 6,103,014
- Issue date Aug 15, 2000
- Applied Materials, Inc.
- Lawrence Chung-Lai Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Washing transfer station in a system for chemical mechanical polishing
- Patent number 6,086,457
- Issue date Jul 11, 2000
- Applied Materials, Inc.
- Ilya Perlov
- B08 - CLEANING
Information Patent Grant
Wafer cassette load station
- Patent number 6,082,951
- Issue date Jul 4, 2000
- Applied Materials, Inc.
- Eric A. Nering
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Underwater wafer storage and wafer picking for chemical mechanical...
- Patent number 6,080,046
- Issue date Jun 27, 2000
- Applied Materials, Inc.
- Norm Shendon
- B08 - CLEANING
Information Patent Grant
Process for PECVD of silicon oxide using TEOS decomposition
- Patent number RE36623
- Issue date Mar 21, 2000
- Applied Materials, Inc.
- David Nin-Kou Wang
- 427 - Coating processes
Information Patent Grant
Conditioner head in a substrate polisher and method
- Patent number 6,036,583
- Issue date Mar 14, 2000
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carrier head with a flexible membrane for a chemical mechanical pol...
- Patent number 5,964,653
- Issue date Oct 12, 1999
- Applied Materials, Inc.
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Grant
Carousel wafer transfer system
- Patent number 5,951,770
- Issue date Sep 14, 1999
- Applied Materials, Inc.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...
- Publication number 20100035526
- Publication date Feb 11, 2010
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...
- Publication number 20070238399
- Publication date Oct 11, 2007
- Applied Materials, Inc.
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
Chemical mechanical polishing system having multiple polishing stat...
- Publication number 20060194525
- Publication date Aug 31, 2006
- Applied Materials, Inc., a Delaware corporation
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
Apparatus for storing and moving a cassette
- Publication number 20060072986
- Publication date Apr 6, 2006
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of controlling carrier head with multiple chambers
- Publication number 20050142995
- Publication date Jun 30, 2005
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Application
Chemical mechanical polishing system having multiple polishing stat...
- Publication number 20050048880
- Publication date Mar 3, 2005
- Applied Materials, Inc., a Delaware corporation
- Robert D. Tolles
- B08 - CLEANING
Information Patent Application
Method of controlling carrier head with multiple chambers
- Publication number 20040063385
- Publication date Apr 1, 2004
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Application
Carrier head with a flexible membrane to form multiple chambers
- Publication number 20030022609
- Publication date Jan 30, 2003
- Applied Materials, Inc., a Delaware corporation
- Ilya Perlov
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for improved substrate handling
- Publication number 20020170672
- Publication date Nov 21, 2002
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for wafer exchange employing stacked robot blades
- Publication number 20020154975
- Publication date Oct 24, 2002
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for orienting substrates
- Publication number 20020111710
- Publication date Aug 15, 2002
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pod door opener
- Publication number 20020006322
- Publication date Jan 17, 2002
- APPLIED MATERIALS, INC.
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for storing and moving a cassette
- Publication number 20010043849
- Publication date Nov 22, 2001
- Ilya Perlov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Single chamber vacuum processing tool
- Publication number 20010041121
- Publication date Nov 15, 2001
- Howard E. Grunes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Carrier head with a flexible membrane for a chemical mechanical pol...
- Publication number 20010041526
- Publication date Nov 15, 2001
- Applied Materials, Inc. a Delaware Corporation
- Ilya Perlov
- B24 - GRINDING POLISHING

Ilya Perlov

Person

Patents Grantslast 30 patents

Chemical mechanical polishing system having multiple polishing stat...

Apparatus for storing and moving a cassette

Chemical mechanical polishing system having multiple polishing stat...

Chemical mechanical polishing system having multiple polishing stat...

Polishing apparatus having a trough

Chemical mechanical polishing system having multiple polishing stat...

Method of controlling carrier head with multiple chambers

Carrier head with a flexible membrane to form multiple chambers

Method and apparatus for improved substrate handling

Method and apparatus for orienting substrates

Carrier head with a flexible membrane

Method and apparatus for improved substrate handling

Method and apparatus for orienting substrates

Apparatus and method for aligning a substrate on a support member

Conditioner apparatus for chemical mechanical polishing

Carousel wafer transfer system

Apparatus for storing and moving a cassette

Carrier head with a flexible membrane for a chemical mechanical pol...

Thermal CVD/PECVD reactor and use for thermal chemical vapor deposi...

Apparatus and method for aligning a substrate on a support member

Carrier head with a retaining ring for a chemical mechanical polish...

System for chemical mechanical polishing having multiple polishing...

Chemical vapor deposition chamber

Washing transfer station in a system for chemical mechanical polishing

Wafer cassette load station

Underwater wafer storage and wafer picking for chemical mechanical...

Process for PECVD of silicon oxide using TEOS decomposition

Conditioner head in a substrate polisher and method

Carrier head with a flexible membrane for a chemical mechanical pol...

Carousel wafer transfer system

Patents Applicationslast 30 patents

CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...

CHEMICAL MECHANICAL POLISHING SYSTEM HAVING MULTIPLE POLISHING STAT...

Chemical mechanical polishing system having multiple polishing stat...

Apparatus for storing and moving a cassette

Method of controlling carrier head with multiple chambers

Chemical mechanical polishing system having multiple polishing stat...

Method of controlling carrier head with multiple chambers

Carrier head with a flexible membrane to form multiple chambers

Method and apparatus for improved substrate handling

Method and apparatus for wafer exchange employing stacked robot blades

Method and apparatus for orienting substrates

Pod door opener

Apparatus for storing and moving a cassette

Single chamber vacuum processing tool

Carrier head with a flexible membrane for a chemical mechanical pol...