Ivelin Angelov

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Ultrahigh selective nitride etch to form FinFET devices
- Patent number 11,469,079
- Issue date Oct 11, 2022
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable depth edge ring for etch uniformity control
- Patent number 11,342,163
- Issue date May 24, 2022
- Lam Research Corporation
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber including multiple gas injection point...
- Patent number 10,825,659
- Issue date Nov 3, 2020
- Lam Research Corporation
- Jason Lee Treadwell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for selectively etching film
- Patent number 10,727,089
- Issue date Jul 28, 2020
- Lam Research Corporation
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber member of a plasma source and pedestal with radially outwar...
- Patent number 10,699,878
- Issue date Jun 30, 2020
- Lam Research Corporation
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable depth edge ring for etch uniformity control
- Patent number 10,651,015
- Issue date May 12, 2020
- Lam Research Corporation
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer lift ring system for wafer transfer
- Patent number 10,438,833
- Issue date Oct 8, 2019
- Lam Research Corporation
- Brian Severson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for increasing electron density levels in a plasm...
- Patent number 10,147,588
- Issue date Dec 4, 2018
- Lam Research Corporation
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for achieving ultra-high selectivity while etching silicon n...
- Patent number 9,911,620
- Issue date Mar 6, 2018
- Lam Research Corporation
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of the incidence angle of an ion beam on a substrate
- Patent number 9,812,349
- Issue date Nov 7, 2017
- Lam Research Corporation
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution device with actively cooled grid
- Patent number 9,679,749
- Issue date Jun 13, 2017
- Lam Research Corporation
- Ivelin Angelov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal covers
- Patent number 8,851,463
- Issue date Oct 7, 2014
- Novellus Systems, Inc.
- Ivelin Angelov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pedestal covers
- Patent number 8,371,567
- Issue date Feb 12, 2013
- Novellus Systems, Inc.
- Ivelin Angelov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Pedestal cover
- Patent number D671901
- Issue date Dec 4, 2012
- Novellus Systems, Inc.
- Ivelin Angelov
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma reactor showerhead face plate having concentric ridge pattern
- Patent number D641829
- Issue date Jul 19, 2011
- Novellus Systems, Inc.
- Ivelin A. Angelov
- D23 - Environmental heating and cooling
Information Patent Grant
Heated chuck for laser thermal processing
- Patent number 7,731,798
- Issue date Jun 8, 2010
- Ultratech, Inc.
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser thermal processing chuck with a thermal compensating heater m...
- Patent number 7,326,877
- Issue date Feb 5, 2008
- Ultratech, Inc.
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
- Publication number 20200273671
- Publication date Aug 27, 2020
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES
- Publication number 20180269070
- Publication date Sep 20, 2018
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICO...
- Publication number 20180158692
- Publication date Jun 7, 2018
- LAM RESEARCH CORPORATION
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Control Of The Incidence Angle Of An Ion Beam On A Substrate
- Publication number 20170330788
- Publication date Nov 16, 2017
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING PROCESS WITHIN WAFER UNIFORMITY
- Publication number 20170278679
- Publication date Sep 28, 2017
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER LIFT RING SYSTEM FOR WAFER TRANSFER
- Publication number 20170236743
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- Brian Severson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER MEMEBER OF A PLASMA SOURCE AND PEDESTAL WITH RADIALLY OUTWA...
- Publication number 20170236688
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL
- Publication number 20170236741
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR INCREASING ELECTRON DENSITY LEVELS IN A PLASM...
- Publication number 20170236694
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- Kwame Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM
- Publication number 20170236731
- Publication date Aug 17, 2017
- LAM RESEARCH CORPORATION
- James Eugene Caron
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER INCLUDING MULTIPLE GAS INJECTION POINT...
- Publication number 20170200586
- Publication date Jul 13, 2017
- LAM RESEARCH CORPORATION
- Jason Lee Treadwell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL OF THE INCIDENCE ANGLE OF AN ION BEAM ON A SUBSTRATE
- Publication number 20170154804
- Publication date Jun 1, 2017
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON N...
- Publication number 20160247688
- Publication date Aug 25, 2016
- LAM RESEARCH CORPORATION
- Helen H. Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELECTIVE NITRIDE ETCH
- Publication number 20160181116
- Publication date Jun 23, 2016
- LAM RESEARCH CORPORATION
- Ivan L. Berry
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
GAS DISTRIBUTION DEVICE WITH ACTIVELY COOLED GRID
- Publication number 20160093472
- Publication date Mar 31, 2016
- LAM RESEARCH CORPORATION
- Ivelin Angelov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PEDESTAL COVERS
- Publication number 20130122431
- Publication date May 16, 2013
- Ivelin Angelov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
PEDESTAL COVERS
- Publication number 20120264051
- Publication date Oct 18, 2012
- Novellus Systems, Inc.
- Ivelin Angelov
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS
- Publication number 20120108072
- Publication date May 3, 2012
- Ivelin A. Angelov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Partial Contact Wafer Retaining Ring Apparatus
- Publication number 20100120335
- Publication date May 13, 2010
- Novellus Systems, Inc.
- Haoquan Fang
- B24 - GRINDING POLISHING
Information Patent Application
Laser thermal processing chuck with a thermal compensating heater m...
- Publication number 20070004232
- Publication date Jan 4, 2007
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Heated chuck for laser thermal processing
- Publication number 20060113290
- Publication date Jun 1, 2006
- Iqbal A. Shareef
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Ivelin Angelov

Person

Patents Grantslast 30 patents

Ultrahigh selective nitride etch to form FinFET devices

Variable depth edge ring for etch uniformity control

Substrate processing chamber including multiple gas injection point...

Systems and methods for selectively etching film

Chamber member of a plasma source and pedestal with radially outwar...

Variable depth edge ring for etch uniformity control

Wafer lift ring system for wafer transfer

System and method for increasing electron density levels in a plasm...

Method for achieving ultra-high selectivity while etching silicon n...

Control of the incidence angle of an ion beam on a substrate

Gas distribution device with actively cooled grid

Pedestal covers

Pedestal covers

Pedestal cover

Plasma reactor showerhead face plate having concentric ridge pattern

Heated chuck for laser thermal processing

Laser thermal processing chuck with a thermal compensating heater m...

Patents Applicationslast 30 patents

VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL

ULTRAHIGH SELECTIVE NITRIDE ETCH TO FORM FINFET DEVICES

APPARATUS FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICO...

Control Of The Incidence Angle Of An Ion Beam On A Substrate

METHOD AND APPARATUS FOR CONTROLLING PROCESS WITHIN WAFER UNIFORMITY

WAFER LIFT RING SYSTEM FOR WAFER TRANSFER

CHAMBER MEMEBER OF A PLASMA SOURCE AND PEDESTAL WITH RADIALLY OUTWA...

VARIABLE DEPTH EDGE RING FOR ETCH UNIFORMITY CONTROL

SYSTEM AND METHOD FOR INCREASING ELECTRON DENSITY LEVELS IN A PLASM...

SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM

SUBSTRATE PROCESSING CHAMBER INCLUDING MULTIPLE GAS INJECTION POINT...

CONTROL OF THE INCIDENCE ANGLE OF AN ION BEAM ON A SUBSTRATE

METHOD FOR ACHIEVING ULTRA-HIGH SELECTIVITY WHILE ETCHING SILICON N...

SELECTIVE NITRIDE ETCH

GAS DISTRIBUTION DEVICE WITH ACTIVELY COOLED GRID

PEDESTAL COVERS

PEDESTAL COVERS

SHOWERHEAD CONFIGURATIONS FOR PLASMA REACTORS

Partial Contact Wafer Retaining Ring Apparatus

Laser thermal processing chuck with a thermal compensating heater m...

Heated chuck for laser thermal processing