Jens Ossmann

Person

Aalen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Illumination system for EUV lithography
- Patent number 9,671,608
- Issue date Jun 6, 2017
- Carl Zeiss SMT GmbH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric illumination system for microlithography tool
- Patent number 9,588,434
- Issue date Mar 7, 2017
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Component for setting a scan-integrated illumination energy in an o...
- Patent number 9,310,692
- Issue date Apr 12, 2016
- Carl Zeiss SMT GmbH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical system for projection lithography
- Patent number 9,110,378
- Issue date Aug 18, 2015
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optics for microlithography
- Patent number 8,937,708
- Issue date Jan 20, 2015
- Carl Zeiss SMT GmbH
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optics for EUV microlithography and related system and...
- Patent number 8,587,767
- Issue date Nov 19, 2013
- Carl Zeiss SMT GmbH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Catoptric illumination system for microlithography tool
- Patent number 8,253,925
- Issue date Aug 28, 2012
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV illumination system
- Patent number 8,227,770
- Issue date Jul 24, 2012
- Carl Zeiss SMT GmbH
- Martin Endres
- G02 - OPTICS
Information Patent Grant
Illumination optical system for microlithography
- Patent number 8,174,677
- Issue date May 8, 2012
- Carl Zeiss SMT GmbH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system with zoom objective
- Patent number 7,626,770
- Issue date Dec 1, 2009
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS
Information Patent Grant
EUV illumination system
- Patent number 7,586,113
- Issue date Sep 8, 2009
- Carl Zeiss SMT AG
- Martin Endres
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
ILLUMINATION SYSTEM FOR EUV LITHOGRAPHY
- Publication number 20150002925
- Publication date Jan 1, 2015
- Carl Zeiss SMT GMBH
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM FOR PROJECTION LITHOGRAPHY
- Publication number 20130250262
- Publication date Sep 26, 2013
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL
- Publication number 20120300185
- Publication date Nov 29, 2012
- Carl Zeiss SMT GMBH
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY
- Publication number 20110235015
- Publication date Sep 29, 2011
- Carl Zeiss GmbH
- Guenther Dengel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPONENT FOR SETTING A SCAN-INTEGRATED ILLUMINATION ENERGY IN AN O...
- Publication number 20110096317
- Publication date Apr 28, 2011
- Carl Zeiss SMT GMBH
- Ralf Stuetzle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...
- Publication number 20110063598
- Publication date Mar 17, 2011
- Carl Zeiss SMT GMBH
- Damian Fiolka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION OPTICS FOR MICROLITHOGRAPHY
- Publication number 20100253926
- Publication date Oct 7, 2010
- Carl Zeiss SMT AG
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL
- Publication number 20090323044
- Publication date Dec 31, 2009
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV ILLUMINATION SYSTEM
- Publication number 20090316130
- Publication date Dec 24, 2009
- Carl Zeiss SMT AG
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATING OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS FOR MIC...
- Publication number 20090251677
- Publication date Oct 8, 2009
- Carl Zeiss SMT AG
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY
- Publication number 20090091731
- Publication date Apr 9, 2009
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM FOR EUV LITHOGRAPHY
- Publication number 20090041182
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM FOR A PROJECTION EXPOSURE APPARATUS WITH WAVELE...
- Publication number 20080278704
- Publication date Nov 13, 2008
- Carl Zeiss SMT AG
- Martin Endres
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY
- Publication number 20080259303
- Publication date Oct 23, 2008
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM WITH A DETECTOR FOR REGISTERING A LIGHT INTENSITY
- Publication number 20080049206
- Publication date Feb 28, 2008
- Carl Zeiss SMT AG
- Jens Ossmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EUV ILLUMINATION SYSTEM
- Publication number 20070295919
- Publication date Dec 27, 2007
- Carl Zeiss SMT AG
- Martin Endres
- G02 - OPTICS
Information Patent Application
ILLUMINATION SYSTEM WITH ZOOM OBJECTIVE
- Publication number 20070236784
- Publication date Oct 11, 2007
- Carl Zeiss SMT AG
- Wolfgang Singer
- G02 - OPTICS

Jens Ossmann

Person

Patents Grantslast 30 patents

Illumination system for EUV lithography

Catoptric illumination system for microlithography tool

Component for setting a scan-integrated illumination energy in an o...

Illumination optical system for projection lithography

Illumination optics for microlithography

Illumination optics for EUV microlithography and related system and...

Catoptric illumination system for microlithography tool

EUV illumination system

Illumination optical system for microlithography

Illumination system with zoom objective

EUV illumination system

Patents Applicationslast 30 patents

ILLUMINATION SYSTEM FOR EUV LITHOGRAPHY

ILLUMINATION OPTICAL SYSTEM FOR PROJECTION LITHOGRAPHY

CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY

COMPONENT FOR SETTING A SCAN-INTEGRATED ILLUMINATION ENERGY IN AN O...

ILLUMINATION OPTICS FOR EUV MICROLITHOGRAPHY AND RELATED SYSTEM AND...

ILLUMINATION OPTICS FOR MICROLITHOGRAPHY

CATOPTRIC ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY TOOL

EUV ILLUMINATION SYSTEM

ILLUMINATING OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS FOR MIC...

ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM FOR EUV LITHOGRAPHY

ILLUMINATION SYSTEM FOR A PROJECTION EXPOSURE APPARATUS WITH WAVELE...

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY

ILLUMINATION SYSTEM WITH A DETECTOR FOR REGISTERING A LIGHT INTENSITY

EUV ILLUMINATION SYSTEM

ILLUMINATION SYSTEM WITH ZOOM OBJECTIVE