Joseph P. Kirk

Person

Chelsea, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Phase shifted test pattern for monitoring focus and aberrations in...
- Patent number 6,842,237
- Issue date Jan 11, 2005
- International Business Machines Corporation
- Christopher P. Ausschnitt
- G01 - MEASURING TESTING
Information Patent Grant
Grating patterns and method for determination of azimuthal and radi...
- Patent number 6,606,151
- Issue date Aug 12, 2003
- Infineon Technologies AG
- Gerhard Kunkel
- G01 - MEASURING TESTING
Information Patent Grant
Blazed grating measurements of lithographic lens aberrations
- Patent number 6,091,486
- Issue date Jul 18, 2000
- International Business Machines Corporation
- Joseph P. Kirk
- G02 - OPTICS
Information Patent Grant
Fresnel zone mask for pupilgram
- Patent number 6,048,651
- Issue date Apr 11, 2000
- International Business Machines Corporation
- Timothy A. Brunner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Point interferometer to measure phase shift in reticles
- Patent number 5,898,498
- Issue date Apr 27, 1999
- International Business Machines Corp.
- Joseph P. Kirk
- G01 - MEASURING TESTING
Information Patent Grant
System and method for visually determining the performance of a pho...
- Patent number 5,808,731
- Issue date Sep 15, 1998
- International Business Machines Corporation
- Joseph P. Kirk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Diffraction pupil filler modified illuminator for annular pupil fills
- Patent number 5,663,785
- Issue date Sep 2, 1997
- International Business Machines Corporation
- Joseph Pennell Kirk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system and technique for unambiguous film thickness monitoring
- Patent number 4,293,224
- Issue date Oct 6, 1981
- International Business Machines Corporation
- Charles A. Gaston
- G01 - MEASURING TESTING
Information Patent Grant
Metal etch rate analyzer
- Patent number 4,260,259
- Issue date Apr 7, 1981
- International Business Machines Corporation
- Joseph P. Kirk
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Phase shifted test pattern for monitoring focus and aberrations in...
- Publication number 20030123052
- Publication date Jul 3, 2003
- International Business Machines Corporation
- Christopher P. Ausschnitt
- G01 - MEASURING TESTING
Information Patent Application
Grating patterns and method for determination of azimuthal and radi...
- Publication number 20030020901
- Publication date Jan 30, 2003
- Gerhard Kunkel
- G01 - MEASURING TESTING

Joseph P. Kirk

Person

Patents Grantslast 30 patents

Phase shifted test pattern for monitoring focus and aberrations in...

Grating patterns and method for determination of azimuthal and radi...

Blazed grating measurements of lithographic lens aberrations

Fresnel zone mask for pupilgram

Point interferometer to measure phase shift in reticles

System and method for visually determining the performance of a pho...

Diffraction pupil filler modified illuminator for annular pupil fills

Optical system and technique for unambiguous film thickness monitoring

Metal etch rate analyzer

Patents Applicationslast 30 patents

Phase shifted test pattern for monitoring focus and aberrations in...

Grating patterns and method for determination of azimuthal and radi...