Number | Name | Date | Kind |
---|---|---|---|
5175594 | Campbell | Dec 1992 | |
5300786 | Brunner et al. | Apr 1994 |
Entry |
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Joseph P. Kirk, "Astigmatism and Field Curvature from Pin-bars" SPIE vol. 1463 Optical/Laser Microlithography IV (1991), pp. 282-287. |
Joseph P. Kirk, et al., "DUV Diagnostics Using Continuous Tone Photoresist" SPIE vol. 1463, Optical/Laser Microlithography IV (1991), pp. 575-579. |