Ju-Hyung Lee

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for cleaning a CVD chamber
- Patent number 7,654,224
- Issue date Feb 2, 2010
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for cleaning a CVD chamber
- Patent number 7,500,445
- Issue date Mar 10, 2009
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning a CVD chamber
- Patent number 7,464,717
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Computer-readable medium that contains software for executing a met...
- Patent number 7,465,357
- Issue date Dec 16, 2008
- Applied Materials, Inc.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Skew cancellation for source synchronous clock and data signals
- Patent number 7,301,996
- Issue date Nov 27, 2007
- Lattice Semiconductor Corporation
- Kuang-Kai Chi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Hermetic low dielectric constant layer for barrier applications
- Patent number 7,288,205
- Issue date Oct 30, 2007
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing low k films
- Patent number 7,160,821
- Issue date Jan 9, 2007
- Applied Materials, Inc.
- Tzu-Fang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric materials including oxygen-doped si...
- Patent number 7,151,053
- Issue date Dec 19, 2006
- Applied Materials, Inc.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated gas distribution plate for a processing chamber
- Patent number 6,946,033
- Issue date Sep 20, 2005
- Applied Materials Inc.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of CVD chambers using remote source with cxfyoz based chem...
- Patent number 6,923,189
- Issue date Aug 2, 2005
- Applied Materials, Inc.
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for cleaning a process chamber
- Patent number 6,902,629
- Issue date Jun 7, 2005
- Applied Materials, Inc.
- Yi Zheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing dielectric materials in damascene applications
- Patent number 6,890,850
- Issue date May 10, 2005
- Applied Materials, Inc.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing low K films
- Patent number 6,806,207
- Issue date Oct 19, 2004
- Applied Materials Inc.
- Tzu-Fang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Seek trajectory adaptation in sinusoidal seek servo hard disk drives
- Patent number 6,744,590
- Issue date Jun 1, 2004
- Samsung Electronics Co., Inc.
- Sang Hoon Chu
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of depositing low dielectric constant carbon doped silicon o...
- Patent number 6,632,735
- Issue date Oct 14, 2003
- Applied Materials, Inc.
- Wai-Fan Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing low k films using an oxidizing plasma
- Patent number 6,593,247
- Issue date Jul 15, 2003
- Applied Materials, Inc.
- Tzu-Fang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20170121813
- Publication date May 4, 2017
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20140158048
- Publication date Jun 12, 2014
- Applied Materials, Inc.
- Maosheng ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20100095891
- Publication date Apr 22, 2010
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20090145360
- Publication date Jun 11, 2009
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20060231205
- Publication date Oct 19, 2006
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER
- Publication number 20060225767
- Publication date Oct 12, 2006
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Hermetic low dielectric constant layer for barrier applications
- Publication number 20060006140
- Publication date Jan 12, 2006
- Annamalai Lakshmanan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing low k films
- Publication number 20050260864
- Publication date Nov 24, 2005
- APPLIED MATERIALS, INC.
- Tzu-Fang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing dielectric materials in damascene applications
- Publication number 20050233576
- Publication date Oct 20, 2005
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for cleaning a process chamber
- Publication number 20050211265
- Publication date Sep 29, 2005
- APPLIED MATERIALS, INC.
- Yi Zheng
- B08 - CLEANING
Information Patent Application
Nanostructure augmentation of surfaces for enhanced thermal transfe...
- Publication number 20050129928
- Publication date Jun 16, 2005
- Koila, Inc.
- Ju-Hyung Lee
- B82 - NANO-TECHNOLOGY
Information Patent Application
Nanostructure augmentation of surfaces for enhanced thermal transfe...
- Publication number 20050126766
- Publication date Jun 16, 2005
- Koila,Inc.
- Ju-Hyung Lee
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Method and apparatus for cleaning a CVD chamber
- Publication number 20040144490
- Publication date Jul 29, 2004
- APPLIED MATERIALS, INC.
- Maosheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cleaning of CVD chambers using remote source with CXFYOZ based chem...
- Publication number 20040139983
- Publication date Jul 22, 2004
- APPLIED MATERIALS, INC.
- Annamalai Lakshmanan
- B08 - CLEANING
Information Patent Application
Blocker plate bypass design to improve clean rate at the edge of th...
- Publication number 20040118519
- Publication date Jun 24, 2004
- APPLIED MATERIALS, INC.
- Soovo Sen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods for operating a chemical vapor deposition chamber using a h...
- Publication number 20040052969
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heated gas distribution plate for a processing chamber
- Publication number 20040050492
- Publication date Mar 18, 2004
- APPLIED MATERIALS, INC.
- Lun Tsuei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for cleaning a process chamber
- Publication number 20030192568
- Publication date Oct 16, 2003
- APPLIED MATERIALS, INC.
- Yi Zheng
- B08 - CLEANING
Information Patent Application
Method of depositing low K films
- Publication number 20030162410
- Publication date Aug 28, 2003
- APPLIED MATERIALS, INC.
- Tzu-Fang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing dielectric materials in damascene applications
- Publication number 20030129827
- Publication date Jul 10, 2003
- APPLIED MATERIALS, INC.
- Ju-Hyung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing low dielectric constant carbon doped silicon o...
- Publication number 20030032305
- Publication date Feb 13, 2003
- APPLIED MATERIALS, INC.
- Wai-Fan Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Seek trajectory adaptation in sinusoidal seek servo hard disk drives
- Publication number 20020054450
- Publication date May 9, 2002
- Sang Hoon Chu
- G11 - INFORMATION STORAGE

Ju-Hyung Lee

Person

Patents Grantslast 30 patents

Method and apparatus for cleaning a CVD chamber

Method and apparatus for cleaning a CVD chamber

Method for cleaning a CVD chamber

Computer-readable medium that contains software for executing a met...

Skew cancellation for source synchronous clock and data signals

Hermetic low dielectric constant layer for barrier applications

Method of depositing low k films

Method of depositing dielectric materials including oxygen-doped si...

Heated gas distribution plate for a processing chamber

Cleaning of CVD chambers using remote source with cxfyoz based chem...

Method for cleaning a process chamber

Method of depositing dielectric materials in damascene applications

Method of depositing low K films

Seek trajectory adaptation in sinusoidal seek servo hard disk drives

Method of depositing low dielectric constant carbon doped silicon o...

Method of depositing low k films using an oxidizing plasma

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

METHOD AND APPARATUS FOR CLEANING A CVD CHAMBER

Hermetic low dielectric constant layer for barrier applications

Method of depositing low k films

Method of depositing dielectric materials in damascene applications

Method for cleaning a process chamber

Nanostructure augmentation of surfaces for enhanced thermal transfe...

Nanostructure augmentation of surfaces for enhanced thermal transfe...

Method and apparatus for cleaning a CVD chamber

Cleaning of CVD chambers using remote source with CXFYOZ based chem...

Blocker plate bypass design to improve clean rate at the edge of th...

Methods for operating a chemical vapor deposition chamber using a h...

Heated gas distribution plate for a processing chamber

Method for cleaning a process chamber

Method of depositing low K films

Method of depositing dielectric materials in damascene applications

Method of depositing low dielectric constant carbon doped silicon o...

Seek trajectory adaptation in sinusoidal seek servo hard disk drives