Jun Zhao

Person

Milpitas, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for heating substrates
- Patent number 7,431,585
- Issue date Oct 7, 2008
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for transferring conductive pieces during sem...
- Patent number 7,407,081
- Issue date Aug 5, 2008
- Applied Materials, Inc.
- Michael R. Rice
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for heating substrates
- Patent number 7,381,052
- Issue date Jun 3, 2008
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for e-beam treatment used to fabricate integr...
- Patent number 7,256,139
- Issue date Aug 14, 2007
- Applied Materials, Inc.
- Farhad Moghadam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam treatment apparatus
- Patent number 7,049,606
- Issue date May 23, 2006
- Applied Materials, Inc.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam treatment apparatus
- Patent number 7,049,612
- Issue date May 23, 2006
- Applied Materials
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gapfill process using a combination of spin-on-glass deposition and...
- Patent number 6,992,024
- Issue date Jan 31, 2006
- Applied Materials, Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for E-beam treatment used to fabricate integr...
- Patent number 6,936,551
- Issue date Aug 30, 2005
- Applied Materials Inc.
- Farhad Moghadam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-stratification-solution delivery system for spin-on dielectrics
- Patent number 6,895,776
- Issue date May 24, 2005
- Applied Materials, Inc.
- Jun Zhao
- B24 - GRINDING POLISHING
Information Patent Grant
Multistep cure technique for spin-on-glass films
- Patent number 6,878,644
- Issue date Apr 12, 2005
- Applied Materials, Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Large area source for uniform electron beam generation
- Patent number 6,831,284
- Issue date Dec 14, 2004
- Applied Materials, Inc.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for fast-cycle atomic layer deposition
- Patent number 6,773,507
- Issue date Aug 10, 2004
- Applied Materials, Inc.
- Ravi Jallepally
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gapfill process using a combination of spin-on-glass deposition and...
- Patent number 6,693,050
- Issue date Feb 17, 2004
- Applied Materials Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High temperature filter for CVD apparatus
- Patent number 6,635,114
- Issue date Oct 21, 2003
- Applied Material, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature ceramic heater assembly with RF capability
- Patent number 6,616,767
- Issue date Sep 9, 2003
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for depositing layers on a semiconductor wafer
- Patent number 6,534,360
- Issue date Mar 18, 2003
- Applied Materials, Inc.
- Pravin Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled gas feedthrough
- Patent number 6,527,865
- Issue date Mar 4, 2003
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD ruthenium seed for CVD ruthenium deposition
- Patent number 6,479,100
- Issue date Nov 12, 2002
- Applied Materials, Inc.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support member for a processing chamber
- Patent number 6,464,795
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Semyon Sherstinsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for vaporization sequence for multiple liquid precursors...
- Patent number 6,464,782
- Issue date Oct 15, 2002
- Applied Materials, Inc.
- Visweswaren Sivaramakrishnam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of ruthenium films for metal electrode ap...
- Patent number 6,440,495
- Issue date Aug 27, 2002
- Applied Materials, Inc.
- Christopher P. Wade
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment of titanium nitride formed by chemical vapor depos...
- Patent number 6,270,859
- Issue date Aug 7, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporization and deposition apparatus
- Patent number 6,258,170
- Issue date Jul 10, 2001
- Applied Materials, Inc.
- Sasson Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition vaporizer
- Patent number 6,210,485
- Issue date Apr 3, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature, high flow rate chemical vapor deposition apparatu...
- Patent number 6,189,482
- Issue date Feb 20, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater for use in substrate processing apparatus to deposit tungsten
- Patent number 6,179,924
- Issue date Jan 30, 2001
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature controlled process and chamber lid
- Patent number 6,165,271
- Issue date Dec 26, 2000
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for substrate processing with improved throughput and yield
- Patent number 6,129,044
- Issue date Oct 10, 2000
- Applied Materials, Inc.
- Jun Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas manifold
- Patent number 6,123,773
- Issue date Sep 26, 2000
- Applied Materials, Inc.
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-aligning lift mechanism
- Patent number 6,120,609
- Issue date Sep 19, 2000
- Applied Materials, Inc.
- Leonid Selyutin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR TRANSFERRING CONDUCTIVE PIECES DURING SEM...
- Publication number 20080283387
- Publication date Nov 20, 2008
- APPLIED MATERIALS, INC.
- Michael R. Rice
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHODS AND APPARATUS FOR E-BEAM TREATMENT USED TO FABRICATE INTEGR...
- Publication number 20070275569
- Publication date Nov 29, 2007
- Farhad Moghadam
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Apparatus and method for heating substrates
- Publication number 20060223233
- Publication date Oct 5, 2006
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Megasonic cleaning with minimized interference
- Publication number 20060027248
- Publication date Feb 9, 2006
- APPLIED MATERIALS, INC.
- John S. Lewis
- B08 - CLEANING
Information Patent Application
Methods and apparatus for transferring conductive pieces during sem...
- Publication number 20050232728
- Publication date Oct 20, 2005
- Michael R. Rice
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electron beam treatment apparatus
- Publication number 20050194548
- Publication date Sep 8, 2005
- APPLIED MATERIALS, INC.
- David H. Quach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for e-beam treatment used to fabricate integr...
- Publication number 20050130404
- Publication date Jun 16, 2005
- APPLIED MATERIALS, INC.
- Farhad Moghadam
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
ELECTRON BEAM TREATMENT APPARATUS
- Publication number 20050092935
- Publication date May 5, 2005
- APPLIED MATERIALS, INC.
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-STRATIFICATION-SOLUTION DELIVERY SYSTEM FOR SPIN-ON DIELECTRICS
- Publication number 20050005629
- Publication date Jan 13, 2005
- Applied Materials, Inc.
- Jun Zhao
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Electron beam treatment of SixNy films
- Publication number 20040266123
- Publication date Dec 30, 2004
- APPLIED MATERIALS, INC.
- Zhenjiang Cui
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multistep cure technique for spin-on-glass films
- Publication number 20040224479
- Publication date Nov 11, 2004
- Applied Materials, Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Gapfill process using a combination of spin-on-glass deposition and...
- Publication number 20040224496
- Publication date Nov 11, 2004
- Applied Materials, Inc.
- Zhenjiang Cui
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Large area source for uniform electron beam generation
- Publication number 20040099817
- Publication date May 27, 2004
- Alexandros T. Demos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cluster tool for E-beam treated films
- Publication number 20040069410
- Publication date Apr 15, 2004
- Farhad Moghadam
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Process and an integrated tool for low k dielectric deposition incl...
- Publication number 20040020601
- Publication date Feb 5, 2004
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compact and high throughput semiconductor fabrication system
- Publication number 20040018070
- Publication date Jan 29, 2004
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and apparatus for E-beam treatment used to fabricate integr...
- Publication number 20030232495
- Publication date Dec 18, 2003
- Farhad Moghadam
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
Apparatus and method for heating substrates
- Publication number 20030138560
- Publication date Jul 24, 2003
- Applied Materials, Inc.
- Jun Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chemical vapor deposition of ruthenium films for metal electrode ap...
- Publication number 20030129306
- Publication date Jul 10, 2003
- Applied Materials, Inc.
- Christopher P. Wade
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for fast-cycle atomic layer deposition
- Publication number 20030106490
- Publication date Jun 12, 2003
- APPLIED MATERIALS, INC.
- Ravi Jallepally
- C30 - CRYSTAL GROWTH
Information Patent Application
HIGH TEMPERATURE CERAMIC HEATER ASSEMBLY WITH RF CAPABILITY
- Publication number 20030051665
- Publication date Mar 20, 2003
- JUN ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TERMPERATURE FILTER
- Publication number 20030033978
- Publication date Feb 20, 2003
- JUN ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD BST film composition and property control with thickness below...
- Publication number 20030012875
- Publication date Jan 16, 2003
- Shreyas Kher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low thermal budget metal oxide deposition for capacitor structures
- Publication number 20020197793
- Publication date Dec 26, 2002
- Charles N Dornfest
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD RUTHENIUM SEED FOR CVD RUTHENIUM DEPOSITION
- Publication number 20020146513
- Publication date Oct 10, 2002
- APPLIED MATERIALS, INC.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for depositing layers on a semiconductor wafer
- Publication number 20020146915
- Publication date Oct 10, 2002
- APPLIED MATERIALS, INC.
- Pravin Narwankar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Iridium and iridium oxide electrodes used in ferroelectric capacitors
- Publication number 20020075631
- Publication date Jun 20, 2002
- APPLIED MATERIALS, INC.
- Kaushal Kishore Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for depositing high dielectric constant materials...
- Publication number 20020015855
- Publication date Feb 7, 2002
- Talex Sajoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT OF TITANIUM NITRIDE FORMED BY CHEMICAL VAPOR DEPOS...
- Publication number 20010004478
- Publication date Jun 21, 2001
- JUN ZHAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Person

Patents Grantslast 30 patents

Apparatus and method for heating substrates

Methods and apparatus for transferring conductive pieces during sem...

Apparatus and method for heating substrates

Methods and apparatus for e-beam treatment used to fabricate integr...

Electron beam treatment apparatus

Electron beam treatment apparatus

Gapfill process using a combination of spin-on-glass deposition and...

Methods and apparatus for E-beam treatment used to fabricate integr...

Anti-stratification-solution delivery system for spin-on dielectrics

Multistep cure technique for spin-on-glass films

Large area source for uniform electron beam generation

Apparatus and method for fast-cycle atomic layer deposition

Gapfill process using a combination of spin-on-glass deposition and...

High temperature filter for CVD apparatus

High temperature ceramic heater assembly with RF capability

Process for depositing layers on a semiconductor wafer

Temperature controlled gas feedthrough

CVD ruthenium seed for CVD ruthenium deposition

Substrate support member for a processing chamber

Apparatus for vaporization sequence for multiple liquid precursors...

Chemical vapor deposition of ruthenium films for metal electrode ap...

Plasma treatment of titanium nitride formed by chemical vapor depos...

Vaporization and deposition apparatus

Chemical vapor deposition vaporizer

High temperature, high flow rate chemical vapor deposition apparatu...

Heater for use in substrate processing apparatus to deposit tungsten

Temperature controlled process and chamber lid

Apparatus for substrate processing with improved throughput and yield

Gas manifold

Self-aligning lift mechanism

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR TRANSFERRING CONDUCTIVE PIECES DURING SEM...

METHODS AND APPARATUS FOR E-BEAM TREATMENT USED TO FABRICATE INTEGR...

Apparatus and method for heating substrates

Megasonic cleaning with minimized interference

Methods and apparatus for transferring conductive pieces during sem...

Electron beam treatment apparatus

Methods and apparatus for e-beam treatment used to fabricate integr...

ELECTRON BEAM TREATMENT APPARATUS

ANTI-STRATIFICATION-SOLUTION DELIVERY SYSTEM FOR SPIN-ON DIELECTRICS

Electron beam treatment of SixNy films

Multistep cure technique for spin-on-glass films

Gapfill process using a combination of spin-on-glass deposition and...

Large area source for uniform electron beam generation

Cluster tool for E-beam treated films

Process and an integrated tool for low k dielectric deposition incl...

Compact and high throughput semiconductor fabrication system

Methods and apparatus for E-beam treatment used to fabricate integr...

Apparatus and method for heating substrates

Chemical vapor deposition of ruthenium films for metal electrode ap...

Apparatus and method for fast-cycle atomic layer deposition

HIGH TEMPERATURE CERAMIC HEATER ASSEMBLY WITH RF CAPABILITY

HIGH TERMPERATURE FILTER

CVD BST film composition and property control with thickness below...

Low thermal budget metal oxide deposition for capacitor structures

CVD RUTHENIUM SEED FOR CVD RUTHENIUM DEPOSITION

Process for depositing layers on a semiconductor wafer

Iridium and iridium oxide electrodes used in ferroelectric capacitors

System and method for depositing high dielectric constant materials...

PLASMA TREATMENT OF TITANIUM NITRIDE FORMED BY CHEMICAL VAPOR DEPOS...