Kang Zhang

Person

Singapore, SG

People

Patents Grantslast 30 patents

Information Patent Grant
High conductance inner shield for process chamber
- Patent number 12,100,577
- Issue date Sep 24, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Preclean chamber upper shield with showerhead
- Patent number 12,080,522
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,913,107
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Yueh Sheng Ow
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shutter disk
- Patent number 11,862,480
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Upper shield with showerhead for a process chamber
- Patent number D973609
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Lower shield for a substrate processing chamber
- Patent number D971167
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Shutter disk
- Patent number 11,171,017
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lower shield for a substrate processing chamber
- Patent number D931241
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Inner shield for a substrate processing chamber
- Patent number D913979
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Sarath Babu
- D13 - Equipment for production, distribution, or transformation of energy

Patents Applicationslast 30 patents

Information Patent Application
Shutter Disk
- Publication number 20240087913
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20220028702
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD
- Publication number 20210335581
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Sarath BABU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS
- Publication number 20210335582
- Publication date Oct 28, 2021
- Applied Materials, Inc.
- Yueh Sheng OW
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20210140029
- Publication date May 13, 2021
- Applied Materials, Inc.
- YUEH SHENG OW
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20210074552
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE INNER SHIELD FOR PROCESS CHAMBER
- Publication number 20210066050
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER
- Publication number 20210066051
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- Sarath Babu
- H01 - BASIC ELECTRIC ELEMENTS

Person

Patents Grantslast 30 patents

High conductance inner shield for process chamber

Preclean chamber upper shield with showerhead

Methods and apparatus for processing a substrate

Shutter disk

Upper shield with showerhead for a process chamber

Lower shield for a substrate processing chamber

Shutter disk

Lower shield for a substrate processing chamber

Inner shield for a substrate processing chamber

Patents Applicationslast 30 patents

Shutter Disk

Shutter Disk

PRECLEAN CHAMBER UPPER SHIELD WITH SHOWERHEAD

METHODS AND APPARATUS FOR REDUCING DEFECTS IN PRECLEAN CHAMBERS

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

Shutter Disk

HIGH CONDUCTANCE INNER SHIELD FOR PROCESS CHAMBER

HIGH CONDUCTANCE LOWER SHIELD FOR PROCESS CHAMBER