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Kartik RAMASWAMY
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
In-situ semiconductor processing chamber temperature apparatus
Patent number
12,183,605
Issue date
Dec 31, 2024
Applied Materials, Inc.
Andrew Nguyen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Continuous liner for use in a processing chamber
Patent number
12,163,218
Issue date
Dec 10, 2024
Applied Materials, Inc.
James D. Carducci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cost effective radio frequency impedance matching networks
Patent number
12,136,537
Issue date
Nov 5, 2024
Applied Materials, Inc.
Yue Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas distribution plate with UV blocker
Patent number
12,130,561
Issue date
Oct 29, 2024
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for toroidal plasma generation
Patent number
12,125,689
Issue date
Oct 22, 2024
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ electric field detection method and apparatus
Patent number
12,111,341
Issue date
Oct 8, 2024
Applied Materials, Inc.
Yue Guo
G01 - MEASURING TESTING
Information
Patent Grant
Distortion current mitigation in a radio frequency plasma processin...
Patent number
12,106,938
Issue date
Oct 1, 2024
Applied Materials, Inc.
Yue Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chambers and coatings for reducing backside damage
Patent number
12,094,716
Issue date
Sep 17, 2024
Applied Materials, Inc.
Leonard M. Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Smart dynamic load simulator for RF power delivery control system
Patent number
12,080,519
Issue date
Sep 3, 2024
Applied Materials, Inc.
Jie Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
12,046,449
Issue date
Jul 23, 2024
Applied Materials, Inc.
Yue Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
RF impedance matching networks for substrate processing platform
Patent number
12,020,901
Issue date
Jun 25, 2024
Applied Materials, Inc.
Yue Guo
H03 - BASIC ELECTRONIC CIRCUITRY
Information
Patent Grant
Pulsed voltage source for plasma processing applications
Patent number
11,972,924
Issue date
Apr 30, 2024
Applied Materials, Inc.
A N M Wasekul Azad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma excitation with ion energy control
Patent number
11,967,483
Issue date
Apr 23, 2024
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High power electrostatic chuck design with radio frequency coupling
Patent number
11,948,826
Issue date
Apr 2, 2024
Applied Materials, Inc.
Jaeyong Cho
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Symmetric VHF source for a plasma reactor
Patent number
11,935,724
Issue date
Mar 19, 2024
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two channel cosine-theta coil assembly
Patent number
11,915,850
Issue date
Feb 27, 2024
Applied Materials, Inc.
Richard C. Fovell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sheath and temperature control of process kit
Patent number
11,894,255
Issue date
Feb 6, 2024
Applied Materials, Inc.
Jaeyong Cho
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing using pulsed-voltage and radio-frequency power
Patent number
11,848,176
Issue date
Dec 19, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hardware switch on main feed line in a radio frequency plasma proce...
Patent number
11,823,868
Issue date
Nov 21, 2023
Applied Materials, Inc.
Yue Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Continuous liner for use in a processing chamber
Patent number
11,814,724
Issue date
Nov 14, 2023
Applied Materials, Inc.
James D. Carducci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method of ion current compensation
Patent number
11,810,760
Issue date
Nov 7, 2023
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Carbon hard masks for patterning applications and methods related t...
Patent number
11,784,042
Issue date
Oct 10, 2023
Applied Materials, Inc.
Eswaranand Venkatasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pulsed voltage boost for substrate processing
Patent number
11,776,788
Issue date
Oct 3, 2023
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing assembly using pulsed-voltage and radio-frequency...
Patent number
11,776,789
Issue date
Oct 3, 2023
Applied Materials, Inc.
Leonid Dorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,749,505
Issue date
Sep 5, 2023
Applied Materials, Inc.
John Poulose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Process monitor device having a plurality of sensors arranged in co...
Patent number
11,735,486
Issue date
Aug 22, 2023
Applied Materials, Inc.
Leonard Tedeschi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sensorless RF impedance matching network
Patent number
11,721,525
Issue date
Aug 8, 2023
Applied Materials, Inc.
Yue Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,651,966
Issue date
May 16, 2023
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pulsed plasma (DC/RF) deposition of high quality C films for patter...
Patent number
11,603,591
Issue date
Mar 14, 2023
Applied Materials Inc.
Eswaranand Venkatasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Symmetric VHF source for a plasma reactor
Patent number
11,587,766
Issue date
Feb 21, 2023
Applied Materials, Inc.
Kartik Ramaswamy
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Remote Plasma Source and Plasma Processing Chamber Having Same
Publication number
20250006465
Publication date
Jan 2, 2025
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-SITU ELECTRIC FIELD DETECTION METHOD AND APPARATUS
Publication number
20240426888
Publication date
Dec 26, 2024
Applied Materials, Inc.
Yue GUO
G01 - MEASURING TESTING
Information
Patent Application
IMMERSED PLASMA SOURCE AND PROCESS CHAMBER FOR LARGE AREA SUBSTRATES
Publication number
20240420921
Publication date
Dec 19, 2024
Applied Materials, Inc.
Kenneth S. Collins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIO-FREQUENCY (RF) MATCHING NETWORK FOR FAST IMPEDANCE TUNING
Publication number
20240412947
Publication date
Dec 12, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBERS AND COATINGS FOR REDUCING BACKSIDE DAMAGE
Publication number
20240404835
Publication date
Dec 5, 2024
Applied Materials, Inc.
Leonard M. TEDESCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SMART DYNAMIC LOAD SIMULATOR FOR RF POWER DELIVERY CONTROL SYSTEM
Publication number
20240395505
Publication date
Nov 28, 2024
Applied Materials, Inc.
Jie Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FAST TUNING RADIO FREQUENCY (RF) MATCHING NETWORK
Publication number
20240371605
Publication date
Nov 7, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIO FREQUENCY DIVERTER ASSEMBLY ENABLING ON-DEMAND DIFFERENT SPAT...
Publication number
20240290578
Publication date
Aug 29, 2024
Applied Materials, Inc.
Kartik RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS
Publication number
20240266152
Publication date
Aug 8, 2024
Applied Materials, Inc.
Michael Andrew STEARNS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA UNIFORMITY CONTROL SYSTEM AND METHODS
Publication number
20240258070
Publication date
Aug 1, 2024
Applied Materials, Inc.
Michael Andrew STEARNS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA EXCITATION WITH ION ENERGY CONTROL
Publication number
20240249915
Publication date
Jul 25, 2024
Applied Materials, Inc.
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS
Publication number
20240234087
Publication date
Jul 11, 2024
Applied Materials, Inc.
A N M Wasekul AZAD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LEARNING BASED TUNING IN A RADIO FREQUENCY PLASMA PROCESSING CHAMBER
Publication number
20240194447
Publication date
Jun 13, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHODS FOR IMPLEMENTING A MICRO PULSING SCHEME USING DU...
Publication number
20240177968
Publication date
May 30, 2024
Applied Materials, Inc.
A N M Wasekul AZAD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLID-STATE SWITCH BASED HIGH-SPEED PULSER WITH PLASMA IEDF MODIFIC...
Publication number
20240177969
Publication date
May 30, 2024
Applied Materials, Inc.
Kartik RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20240162008
Publication date
May 16, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BOWED SUBSTRATE CLAMPING METHOD, APPARATUS, AND SYSTEM
Publication number
20240162066
Publication date
May 16, 2024
Arvinder S. CHADHA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RADIO FREQUENCY IMPEDANCE MATCHING NETWORK WITH FLEXIBLE TUNING ALG...
Publication number
20240152114
Publication date
May 9, 2024
Applied Materials, Inc.
Yue GUO
G05 - CONTROLLING REGULATING
Information
Patent Application
IN-SITU ELECTRIC FIELD DETECTION METHOD AND APPARATUS
Publication number
20240118328
Publication date
Apr 11, 2024
Applied Materials, Inc.
Yue GUO
G01 - MEASURING TESTING
Information
Patent Application
COST EFFECTIVE RADIO FREQUENCY IMPEDANCE MATCHING NETWORKS
Publication number
20240120178
Publication date
Apr 11, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WIDEBAND VARIABLE IMPEDANCE LOAD FOR HIGH VOLUME MANUFACTURING QUAL...
Publication number
20240094273
Publication date
Mar 21, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR TOROIDAL PLASMA GENERATION
Publication number
20240087859
Publication date
Mar 14, 2024
Kartik RAMASWAMY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCANNING IMPEDANCE MEASUREMENT IN A RADIO FREQUENCY PLASMA PROCESSI...
Publication number
20240079212
Publication date
Mar 7, 2024
Applied Materials, Inc.
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING ASSEMBLY USING PULSED-VOLTAGE AND RADIO-FREQUENCY...
Publication number
20240030002
Publication date
Jan 25, 2024
Applied Materials, Inc.
Leonid DORF
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTINUOUS LINER FOR USE IN A PROCESSING CHAMBER
Publication number
20240011153
Publication date
Jan 11, 2024
Applied Materials, Inc.
James D. Carducci
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SMART DYNAMIC LOAD SIMULATOR FOR RF POWER DELIVERY CONTROL SYSTEM
Publication number
20230411119
Publication date
Dec 21, 2023
Applied Materials, Inc.
Jie Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED VOLTAGE SOURCE FOR PLASMA PROCESSING APPLICATIONS
Publication number
20230402254
Publication date
Dec 14, 2023
Applied Materials, Inc.
A N M Wasekul AZAD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
Publication number
20230343555
Publication date
Oct 26, 2023
Yue GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOTE SURFACE WAVE PROPAGATION FOR SEMICONDUCTOR CHAMBERS
Publication number
20230335376
Publication date
Oct 19, 2023
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSED PLASMA (DC/RF) DEPOSITION OF HIGH QUALITY C FILMS FOR PATTER...
Publication number
20230220551
Publication date
Jul 13, 2023
Applied Materials, Inc.
Eswaranand VENKATASUBRAMANIAN
H01 - BASIC ELECTRIC ELEMENTS