Kazunori Nakamoto

Person

Kudamatsu, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Electrode cover for a plasma processing apparatus
- Patent number D1005245
- Issue date Nov 21, 2023
- HITACHI HIGH-TECH CORPORATION
- Shintarou Nakatani
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma processing apparatus
- Patent number 11,424,106
- Issue date Aug 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Yuki Kondo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 11,315,759
- Issue date Apr 26, 2022
- HITACHI HIGH-TECH CORPORATION
- Takamasa Ichino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and sample stage thereof
- Patent number 10,796,890
- Issue date Oct 6, 2020
- HITACHI HIGH-TECH CORPORATION
- Hironori Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 10,763,088
- Issue date Sep 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Takashi Uemura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover ring for a plasma processing apparatus
- Patent number D840365
- Issue date Feb 12, 2019
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Electrode cover for a plasma processing apparatus
- Patent number D840364
- Issue date Feb 12, 2019
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Ring for a plasma processing apparatus
- Patent number D836573
- Issue date Dec 25, 2018
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma processing apparatus and sample stage thereof
- Patent number 10,141,165
- Issue date Nov 27, 2018
- Hitachi High-Technologies Corporation
- Hironori Kusumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode cover for a plasma processing apparatus
- Patent number D827592
- Issue date Sep 4, 2018
- Hitachi High-Technologies Corporation
- Takamasa Ichino
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Plasma processing apparatus
- Patent number 9,384,946
- Issue date Jul 5, 2016
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,343,336
- Issue date May 17, 2016
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 8,920,665
- Issue date Dec 30, 2014
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and operation method thereof
- Patent number 8,828,257
- Issue date Sep 9, 2014
- Hitachi High-Technologies Corporation
- Hiroho Kitada
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240282555
- Publication date Aug 22, 2024
- Hitachi High-Tech Corporation
- Kyohei HORIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210233744
- Publication date Jul 29, 2021
- Hitachi High-Technologies Corporation
- Takamasa ICHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210111002
- Publication date Apr 15, 2021
- Hitachi High-Technologies Corporation
- Yuki KONDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING DEVICE
- Publication number 20200083026
- Publication date Mar 12, 2020
- Hitachi High-Technologies Corporation
- Takamasa ICHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20190267219
- Publication date Aug 29, 2019
- Hitachi High-Technologies Corporation
- Takashi UEMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
- Publication number 20190057846
- Publication date Feb 21, 2019
- Hitachi High-Technologies Corporation
- Hironori KUSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
- Publication number 20160155617
- Publication date Jun 2, 2016
- Hitachi High-Technologies Corporation
- Hironori KUSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20150083329
- Publication date Mar 26, 2015
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF
- Publication number 20140216657
- Publication date Aug 7, 2014
- Hitachi High-Technologies Corporation
- Hironori KUSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140001154
- Publication date Jan 2, 2014
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20130180662
- Publication date Jul 18, 2013
- Hitachi High-Technologies Corporation
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20120000774
- Publication date Jan 5, 2012
- Ken Yoshioka
- G05 - CONTROLLING REGULATING
Information Patent Application
Plasma processing apparatus and operation method thereof
- Publication number 20100163403
- Publication date Jul 1, 2010
- Hiroho Kitada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080170969
- Publication date Jul 17, 2008
- Ken Yoshioka
- G05 - CONTROLLING REGULATING
Information Patent Application
Sample table and plasma processing apparatus provided with the same
- Publication number 20070267145
- Publication date Nov 22, 2007
- Hiroho Kitada
- H01 - BASIC ELECTRIC ELEMENTS

Kazunori Nakamoto

Person

Patents Grantslast 30 patents

Electrode cover for a plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus and sample stage thereof

Vacuum processing apparatus

Cover ring for a plasma processing apparatus

Electrode cover for a plasma processing apparatus

Ring for a plasma processing apparatus

Plasma processing apparatus and sample stage thereof

Electrode cover for a plasma processing apparatus

Plasma processing apparatus

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and plasma processing method

Plasma processing apparatus and operation method thereof

Patents Applicationslast 30 patents

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING DEVICE

VACUUM PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF

PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND SAMPLE STAGE THEREOF

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

PLASMA PROCESSING APPARATUS

Plasma Processing Apparatus

Plasma processing apparatus and operation method thereof

PLASMA PROCESSING APPARATUS

Sample table and plasma processing apparatus provided with the same