Kazuyoshi Sugihara

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Printing device, printing method and computer-readable storage medi...
- Patent number 8,943,962
- Issue date Feb 3, 2015
- Tokyo Electron Limited
- Kazuyoshi Sugihara
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Grant
Method for manufacturing a semiconductor device, stencil mask and m...
- Patent number 7,745,073
- Issue date Jun 29, 2010
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 7,569,838
- Issue date Aug 4, 2009
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device, stencil mask and m...
- Patent number 7,459,246
- Issue date Dec 2, 2008
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 7,351,969
- Issue date Apr 1, 2008
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device, stencil mask and m...
- Patent number 7,179,569
- Issue date Feb 20, 2007
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron beam inspection system and inspection method and method of...
- Patent number 6,992,290
- Issue date Jan 31, 2006
- Ebara Corporation
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photomask repair method and apparatus
- Patent number 6,991,878
- Issue date Jan 31, 2006
- Kabushiki Kaisha Toshiba
- Shingo Kanamitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method
- Patent number 6,941,008
- Issue date Sep 6, 2005
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing a semiconductor device, stencil mask and m...
- Patent number 6,770,402
- Issue date Aug 3, 2004
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Assembly part with wiring and for manufacturing system, method of m...
- Patent number 6,633,045
- Issue date Oct 14, 2003
- Kabushiki Kaisha Toshiba
- Kazuyoshi Sugihara
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle beam system and pattern slant observing method
- Patent number 6,534,766
- Issue date Mar 18, 2003
- Kabushiki Kaisha Toshiba
- Hideaki Abe
- G01 - MEASURING TESTING
Information Patent Grant
Charged beam drawing apparatus
- Patent number 6,495,841
- Issue date Dec 17, 2002
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern forming method
- Patent number 6,316,163
- Issue date Nov 13, 2001
- Kabushiki Kaisha Toshiba
- Shunko Magoshi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method
- Patent number 6,147,355
- Issue date Nov 14, 2000
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern-forming method and lithographic system
- Patent number 6,093,931
- Issue date Jul 25, 2000
- Kabushiki Kaisha Toshiba
- Kazuyoshi Sugihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask defect repair system and method which controls a dose of a par...
- Patent number 6,028,953
- Issue date Feb 22, 2000
- Kabushiki Kaisha Toshiba
- Hiroko Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Pattern-forming method and lithographic system
- Patent number 5,994,030
- Issue date Nov 30, 1999
- Kabushiki Kaisha Toshiba
- Kazuyoshi Sugihara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern forming method using alignment from latent image or base pa...
- Patent number 5,989,759
- Issue date Nov 23, 1999
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Charged beam applying apparatus
- Patent number 5,949,076
- Issue date Sep 7, 1999
- Kabushiki Kaisha Toshiba
- Kenji Ohtoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of evaluating shaped beam of charged beam writer and method...
- Patent number 5,843,603
- Issue date Dec 1, 1998
- Kabushiki Kaisha Toshiba
- Atsushi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Mask defect repair system and method
- Patent number 5,799,104
- Issue date Aug 25, 1998
- Kabushiki Kaisha Toshiba
- Hiroko Nakamura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Focused ion beam deposition using TMCTS
- Patent number 5,639,699
- Issue date Jun 17, 1997
- Kabushiki Kaisha Toshiba
- Hiroko Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged beam apparatus
- Patent number 5,591,970
- Issue date Jan 7, 1997
- Kabushiki Kaisha Toshiba
- Haruki Komano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged beam apparatus having cleaning function and method of clean...
- Patent number 5,539,211
- Issue date Jul 23, 1996
- Kabushiki Kaisha Toshiba
- Kenji Ohtoshi
- B08 - CLEANING
Information Patent Grant
Charged beam drawing apparatus
- Patent number 5,523,576
- Issue date Jun 4, 1996
- Kabushiki Kaisha Toshiba
- Tooru Koike
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of repairing defect of structure
- Patent number 5,429,730
- Issue date Jul 4, 1995
- Kabushiki Kaisha Toshiba
- Hiroko Nakamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piezoelectric precise rotation mechanism for slightly rotating an o...
- Patent number 4,578,607
- Issue date Mar 25, 1986
- Kabushiki Kaisha Toshiba
- Toru Tojo
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electron beam pattern transfer system having an autofocusing mechanism
- Patent number 4,572,956
- Issue date Feb 25, 1986
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toru Tojo
- B82 - NANO-TECHNOLOGY
Information Patent Grant
IC Tester using an electron beam capable of easily setting a probe...
- Patent number 4,532,423
- Issue date Jul 30, 1985
- Tokyo Shibaura Denki Kabushiki Kaisha
- Toru Tojo
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
PRINTING DEVICE, PRINTING METHOD AND COMPUTER-READABLE STORAGE MEDI...
- Publication number 20130025482
- Publication date Jan 31, 2013
- TOKYO ELECTRON LIMITED
- Kazuyoshi SUGIHARA
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
Method for manufacturing a semiconductor device, stencil mask and m...
- Publication number 20090139449
- Publication date Jun 4, 2009
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electron beam inspection system and inspection method and method of...
- Publication number 20080173814
- Publication date Jul 24, 2008
- EBARA CORPORATION
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device, stencil mask and m...
- Publication number 20070111114
- Publication date May 17, 2007
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electron beam inspection system and inspection method and method of...
- Publication number 20060118719
- Publication date Jun 8, 2006
- EBARA CORPORATION
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device, stencil mask and m...
- Publication number 20040248044
- Publication date Dec 9, 2004
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Photomask repair method and apparatus
- Publication number 20030215722
- Publication date Nov 20, 2003
- Shingo Kanamitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern forming method
- Publication number 20030190070
- Publication date Oct 9, 2003
- KABUSHIKI KAISHA TOSHIBA
- Atsushi Ando
- B82 - NANO-TECHNOLOGY
Information Patent Application
Electron beam inspection system and inspection method and method of...
- Publication number 20020088940
- Publication date Jul 11, 2002
- Kenji Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for manufacturing a semiconductor device, stencil mask and m...
- Publication number 20020058400
- Publication date May 16, 2002
- Kabushiki Kaisha Toshiba
- Kyoichi Suguro
- B82 - NANO-TECHNOLOGY
Information Patent Application
Charged particle beam system and pattern slant observing method
- Publication number 20010025925
- Publication date Oct 4, 2001
- Kabushiki Kaisha Toshiba
- Hideaki Abe
- G01 - MEASURING TESTING

Kazuyoshi Sugihara

Person

Patents Grantslast 30 patents

Printing device, printing method and computer-readable storage medi...

Method for manufacturing a semiconductor device, stencil mask and m...

Electron beam inspection system and inspection method and method of...

Method for manufacturing a semiconductor device, stencil mask and m...

Electron beam inspection system and inspection method and method of...

Method for manufacturing a semiconductor device, stencil mask and m...

Electron beam inspection system and inspection method and method of...

Photomask repair method and apparatus

Pattern forming method

Method for manufacturing a semiconductor device, stencil mask and m...

Assembly part with wiring and for manufacturing system, method of m...

Charged particle beam system and pattern slant observing method

Charged beam drawing apparatus

Pattern forming method

Pattern forming method

Pattern-forming method and lithographic system

Mask defect repair system and method which controls a dose of a par...

Pattern-forming method and lithographic system

Pattern forming method using alignment from latent image or base pa...

Charged beam applying apparatus

Method of evaluating shaped beam of charged beam writer and method...

Mask defect repair system and method

Focused ion beam deposition using TMCTS

Charged beam apparatus

Charged beam apparatus having cleaning function and method of clean...

Charged beam drawing apparatus

Method of repairing defect of structure

Piezoelectric precise rotation mechanism for slightly rotating an o...

Electron beam pattern transfer system having an autofocusing mechanism

IC Tester using an electron beam capable of easily setting a probe...

Patents Applicationslast 30 patents

PRINTING DEVICE, PRINTING METHOD AND COMPUTER-READABLE STORAGE MEDI...

Method for manufacturing a semiconductor device, stencil mask and m...

Electron beam inspection system and inspection method and method of...

Method for manufacturing a semiconductor device, stencil mask and m...

Electron beam inspection system and inspection method and method of...

Method for manufacturing a semiconductor device, stencil mask and m...

Photomask repair method and apparatus

Pattern forming method

Electron beam inspection system and inspection method and method of...

Method for manufacturing a semiconductor device, stencil mask and m...

Charged particle beam system and pattern slant observing method