KEITH MILLER

Person

Mountain View, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Arc management algorithm of RF generator and match box for CCP plas...
- Patent number 12,176,190
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Tiefeng Shi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 12,094,699
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-retained low friction pad
- Patent number D1037954
- Issue date Aug 6, 2024
- Applied Materials, Inc.
- Ilya Lavitsky
- D12 - Transportation
Information Patent Grant
Cleaning of SIN with CCP plasma or RPS clean
- Patent number 12,027,354
- Issue date Jul 2, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Waveform shape factor for pulsed PVD power
- Patent number 12,018,361
- Issue date Jun 25, 2024
- Applied Materials, Inc.
- Shouyin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature detachable very high frequency (VHF) electrostatic...
- Patent number 12,014,906
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- William R. Johanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collimator for a physical vapor deposition (PVD) chamber
- Patent number D1026054
- Issue date May 7, 2024
- Applied Materials, Inc.
- Martin Lee Riker
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,898,236
- Issue date Feb 13, 2024
- Applied Materials, Inc.
- Zhiyong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collimator for a physical vapor deposition chamber
- Patent number D1009816
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Martin Lee Riker
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,810,770
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
EM source for enhanced plasma control
- Patent number 11,692,262
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,676,801
- Issue date Jun 13, 2023
- Applied Materials, Inc.
- Tiefeng Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Isolator ring clamp and physical vapor deposition chamber incorpora...
- Patent number 11,670,493
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for passivating a target
- Patent number 11,661,651
- Issue date May 30, 2023
- Applied Materials, Inc.
- Chao Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD target having self-retained low friction pads
- Patent number 11,618,943
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for passivating a target
- Patent number 11,512,387
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Chao Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for improved anode-cathode ratio for rf chambers
- Patent number 11,492,697
- Issue date Nov 8, 2022
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heated shield for physical vapor deposition chamber
- Patent number 11,339,466
- Issue date May 24, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D941372
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- D15 - Machines not elsewhere specified
Information Patent Grant
Process shield for a substrate processing chamber
- Patent number D941371
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Ilya Lavitsky
- D15 - Machines not elsewhere specified
Information Patent Grant
Gas flow system
- Patent number 11,211,230
- Issue date Dec 28, 2021
- APPLIED MATERIALS, INC.
- Keith A. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition ring for a substrate processing chamber
- Patent number D934315
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- D15 - Machines not elsewhere specified
Information Patent Grant
Methods and apparatus for controlling ion fraction in physical vapo...
- Patent number 11,037,768
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xiaodong Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing chamber having improved process volume sealing
- Patent number 10,998,172
- Issue date May 4, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for asymmetric selective physical vapor deposi...
- Patent number 10,815,561
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Joung Joo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heated substrate support ring
- Patent number 10,727,092
- Issue date Jul 28, 2020
- Applied Materials, Inc.
- Keith A. Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collimator for use in a physical vapor deposition chamber
- Patent number 10,697,057
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Goichi Yoshidome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition (PVD) plasma energy control per dynamic m...
- Patent number 10,312,065
- Issue date Jun 4, 2019
- Applied Materials, Inc.
- Martin Lee Riker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PVD plasma control using a magnet edge lift mechanism
- Patent number 10,283,331
- Issue date May 7, 2019
- Applied Materials, Inc.
- Keith A. Miller
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Novel arc management algorithm of RF generator and match box for CC...
- Publication number 20240304429
- Publication date Sep 12, 2024
- Tiefeng SHI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Power Compensation in PVD Chambers
- Publication number 20240213007
- Publication date Jun 27, 2024
- Junjie PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BROADBAND SUPPLY CIRCUITRY FOR A PLASMA PROCESSING SYSTEM
- Publication number 20240112886
- Publication date Apr 4, 2024
- Applied Materials, Inc.
- Tiefeng SHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20230402271
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE DETACHABLE VERY HIGH FREQUENCY (VHF) ELECTROSTATIC...
- Publication number 20230162954
- Publication date May 25, 2023
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230122956
- Publication date Apr 20, 2023
- Zhiyong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220384149
- Publication date Dec 1, 2022
- Applied Materials, Inc.
- Tiefeng SHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAVEFORM SHAPE FACTOR FOR PULSED PVD POWER
- Publication number 20220356559
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Shouyin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20220341029
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PASSIVATING A TARGET
- Publication number 20220307126
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Chao DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220310364
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Halbert CHONG
- B08 - CLEANING
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220310363
- Publication date Sep 29, 2022
- Applied Materials, Inc.
- Halbert CHONG
- B08 - CLEANING
Information Patent Application
WAVEFORM SHAPE FACTOR FOR PULSED PVD POWER
- Publication number 20220162746
- Publication date May 26, 2022
- Applied Materials, Inc.
- Shouyin Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOLATOR RING CLAMP AND PHYSICAL VAPOR DEPOSITION CHAMBER INCORPORA...
- Publication number 20220154329
- Publication date May 19, 2022
- Applied Materials, Inc.
- Ilya LAVITSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TARGET HAVING SELF-RETAINED LOW FRICTION PADS
- Publication number 20220127714
- Publication date Apr 28, 2022
- Ilya LAVITSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20220020577
- Publication date Jan 20, 2022
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR IMPROVED ANODE-CATHODE RATIO FOR RF CHAMBERS
- Publication number 20210395877
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI-ENVIRONMENTS
- Publication number 20210375650
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Nitin Bharadwaj SATYAVOLU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PASSIVATING A TARGET
- Publication number 20210317568
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Chao DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20210319989
- Publication date Oct 14, 2021
- Applied Materials, Inc.
- Halbert CHONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20210292888
- Publication date Sep 23, 2021
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
- Publication number 20210071294
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Xiaodong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT SYSTEM
- Publication number 20210043432
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- John MAZZOCCO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APERTURE DESIGN FOR UNIFORMITY CONTROL IN SELECTIVE PHYSICAL VAPOR...
- Publication number 20210020484
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Keith Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EM SOURCE FOR ENHANCED PLASMA CONTROL
- Publication number 20210017639
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Alexander Jansen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW SYSTEM
- Publication number 20200335310
- Publication date Oct 22, 2020
- Applied Materials, Inc.
- Keith A. MILLER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELD KIT FOR PROCESS CHAMBER
- Publication number 20200321202
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT PEDESTAL
- Publication number 20200312683
- Publication date Oct 1, 2020
- Applied Materials, Inc.
- Ilya LAVITSKY
- H01 - BASIC ELECTRIC ELEMENTS

KEITH MILLER

Person

Patents Grantslast 30 patents

Arc management algorithm of RF generator and match box for CCP plas...

Methods and apparatus for controlling ion fraction in physical vapo...

Self-retained low friction pad

Cleaning of SIN with CCP plasma or RPS clean

Waveform shape factor for pulsed PVD power

High temperature detachable very high frequency (VHF) electrostatic...

Collimator for a physical vapor deposition (PVD) chamber

Cleaning of sin with CCP plasma or RPS clean

Methods and apparatus for processing a substrate

Collimator for a physical vapor deposition chamber

Methods and apparatus for controlling ion fraction in physical vapo...

EM source for enhanced plasma control

Methods and apparatus for processing a substrate

Isolator ring clamp and physical vapor deposition chamber incorpora...

Methods and apparatus for passivating a target

PVD target having self-retained low friction pads

Methods and apparatus for passivating a target

Apparatus for improved anode-cathode ratio for rf chambers

Heated shield for physical vapor deposition chamber

Process shield for a substrate processing chamber

Process shield for a substrate processing chamber

Gas flow system

Deposition ring for a substrate processing chamber

Methods and apparatus for controlling ion fraction in physical vapo...

Substrate processing chamber having improved process volume sealing

Method and apparatus for asymmetric selective physical vapor deposi...

Heated substrate support ring

Collimator for use in a physical vapor deposition chamber

Physical vapor deposition (PVD) plasma energy control per dynamic m...

PVD plasma control using a magnet edge lift mechanism

Patents Applicationslast 30 patents

Novel arc management algorithm of RF generator and match box for CC...

Power Compensation in PVD Chambers

BROADBAND SUPPLY CIRCUITRY FOR A PLASMA PROCESSING SYSTEM

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

HIGH TEMPERATURE DETACHABLE VERY HIGH FREQUENCY (VHF) ELECTROSTATIC...

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

WAVEFORM SHAPE FACTOR FOR PULSED PVD POWER

EM SOURCE FOR ENHANCED PLASMA CONTROL

METHODS AND APPARATUS FOR PASSIVATING A TARGET

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

WAVEFORM SHAPE FACTOR FOR PULSED PVD POWER

ISOLATOR RING CLAMP AND PHYSICAL VAPOR DEPOSITION CHAMBER INCORPORA...

PVD TARGET HAVING SELF-RETAINED LOW FRICTION PADS

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

APPARATUS FOR IMPROVED ANODE-CATHODE RATIO FOR RF CHAMBERS

HIGH TEMPERATURE AND VACUUM ISOLATION PROCESSING MINI-ENVIRONMENTS

METHODS AND APPARATUS FOR PASSIVATING A TARGET

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

HEATED SHIELD FOR PHYSICAL VAPOR DEPOSITION CHAMBER

METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...

SUBSTRATE SUPPORT SYSTEM

APERTURE DESIGN FOR UNIFORMITY CONTROL IN SELECTIVE PHYSICAL VAPOR...

EM SOURCE FOR ENHANCED PLASMA CONTROL

GAS FLOW SYSTEM

SHIELD KIT FOR PROCESS CHAMBER

SUBSTRATE SUPPORT PEDESTAL