Konstantin Volodarsky

Person

San Francisco, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Constant low force wafer carrier for electrochemical mechanical pro...
- Patent number 7,316,602
- Issue date Jan 8, 2008
- Novellus Systems, Inc.
- Bulent M. Basol
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus of sealing wafer backside for full-face processing
- Patent number 6,988,932
- Issue date Jan 24, 2006
- ASM NuTool, Inc.
- Jalal Ashjaee
- B24 - GRINDING POLISHING
Information Patent Grant
Method of using vertically configured chamber used for multiple pro...
- Patent number 6,969,456
- Issue date Nov 29, 2005
- ASM NuTool, Inc.
- Konstantin Volodarsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus of sealing wafer backside for full-face electr...
- Patent number 6,939,206
- Issue date Sep 6, 2005
- ASM NuTool, Inc.
- Jalal Ashjaee
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for loading a wafer in polishing system
- Patent number 6,932,679
- Issue date Aug 23, 2005
- ASM NuTool, Inc.
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Grant
Vertically configured chamber used for multiple processes
- Patent number 6,884,334
- Issue date Apr 26, 2005
- ASM NuTool, Inc.
- Konstantin Volodarsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of sealing wafer backside for full-face electrochemical plating
- Patent number 6,855,037
- Issue date Feb 15, 2005
- ASM-Nutool, Inc.
- Jalal Ashjaee
- B24 - GRINDING POLISHING
Information Patent Grant
Anode assembly for plating and planarizing a conductive layer
- Patent number 6,773,576
- Issue date Aug 10, 2004
- Nutool, Inc.
- Rimma Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Carrier head for holding a wafer and allowing processing on a front...
- Patent number 6,716,084
- Issue date Apr 6, 2004
- Nutool, Inc.
- Bulent M. Basol
- B24 - GRINDING POLISHING
Information Patent Grant
Work piece carrier head for plating and polishing
- Patent number 6,612,915
- Issue date Sep 2, 2003
- NuTool Inc.
- Cyprian Uzoh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method with belt drive system adapted to ex...
- Patent number 6,604,988
- Issue date Aug 12, 2003
- Nutool, Inc.
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing head with removable subcarrier
- Patent number 6,533,646
- Issue date Mar 18, 2003
- Lam Research Corporation
- Konstantin Volodarsky
- B24 - GRINDING POLISHING
Information Patent Grant
Anode assembly for plating and planarizing a conductive layer
- Patent number 6,478,936
- Issue date Nov 12, 2002
- NuTool Inc.
- Rimma Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Polishing apparatus and method with a refreshing polishing belt and...
- Patent number 6,468,139
- Issue date Oct 22, 2002
- Nutool, Inc.
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method with belt drive system adapted to ex...
- Patent number 6,464,571
- Issue date Oct 15, 2002
- Nutool, Inc.
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and methods for handling a substrate
- Patent number 6,454,332
- Issue date Sep 24, 2002
- Applied Materials, Inc.
- Boris Govzman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing head for chemical mechanical polishing using linear plana...
- Patent number 6,425,812
- Issue date Jul 30, 2002
- Lam Research Corporation
- Anil K. Pant
- B24 - GRINDING POLISHING
Information Patent Grant
Vertically configured chamber used for multiple processes
- Patent number 6,352,623
- Issue date Mar 5, 2002
- Nutool, Inc.
- Konstantin Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Polishing head with removable subcarrier
- Patent number 6,244,946
- Issue date Jun 12, 2001
- Lam Research Corporation
- Konstantin Volodarsky
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and methods for handling a substrate
- Patent number 6,227,585
- Issue date May 8, 2001
- Applied Materials, Inc.
- Boris Govzman
Information Patent Grant
Method for dressing a polishing pad during polishing of a semicondu...
- Patent number 5,913,714
- Issue date Jun 22, 1999
- OnTrak Systems, Inc.
- Konstantin Volodarsky
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing head with pad dressing element
- Patent number 5,857,899
- Issue date Jan 12, 1999
- OnTrak Systems, Inc.
- Konstantin Volodarsky
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer polishing head
- Patent number 5,803,799
- Issue date Sep 8, 1998
- OnTrak Systems, Inc.
- Konstantin Volodarsky
- B24 - GRINDING POLISHING
Information Patent Grant
Control of chemical-mechanical polishing rate across a substrate su...
- Patent number 5,800,248
- Issue date Sep 1, 1998
- Ontrak Systems Inc.
- Anil K. Pant
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Anode assembly for plating and planarizing a conductive layer
- Publication number 20050040049
- Publication date Feb 24, 2005
- Rimma Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method of sealing wafer backside for full-face processing
- Publication number 20040166789
- Publication date Aug 26, 2004
- Jalal Ashjaee
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Constant low force wafer carrier for electrochemical mechanical pro...
- Publication number 20040112760
- Publication date Jun 17, 2004
- Bulent M. Basol
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Polishing apparatus and method with belt drive system adapted to ex...
- Publication number 20030096561
- Publication date May 22, 2003
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus and method with belt drive system adapted to ex...
- Publication number 20030022605
- Publication date Jan 30, 2003
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Application
Anode assembly for plating and planarizing a conductive layer
- Publication number 20030015435
- Publication date Jan 23, 2003
- Rimma Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method and apparatus of sealing wafer backside for full-face electr...
- Publication number 20030008602
- Publication date Jan 9, 2003
- Jalal Ashjaee
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Carrier head for holding a wafer and allowing processing on a front...
- Publication number 20020151257
- Publication date Oct 17, 2002
- Bulent M. Basol
- B24 - GRINDING POLISHING
Information Patent Application
Method of sealing wafer backside for full-face electrochemical plating
- Publication number 20020127956
- Publication date Sep 12, 2002
- Jalal Ashjaee
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Vertically configured chamber used for multiple processes
- Publication number 20020121435
- Publication date Sep 5, 2002
- Konstantin Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Vertically configured chamber used for multiple processes
- Publication number 20020056646
- Publication date May 16, 2002
- Konstantin Volodarsky
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Polishing apparatus and method with belt drive system adapted to ex...
- Publication number 20020009959
- Publication date Jan 24, 2002
- Homayoun Talieh
- B24 - GRINDING POLISHING
Information Patent Application
Polishing head with removable subcarrier
- Publication number 20010000774
- Publication date May 3, 2001
- Lam Research Corporation
- Konstantin Volodarsky
- B24 - GRINDING POLISHING

Konstantin Volodarsky

Person

Patents Grantslast 30 patents

Constant low force wafer carrier for electrochemical mechanical pro...

Apparatus of sealing wafer backside for full-face processing

Method of using vertically configured chamber used for multiple pro...

Method and apparatus of sealing wafer backside for full-face electr...

Apparatus and method for loading a wafer in polishing system

Vertically configured chamber used for multiple processes

Method of sealing wafer backside for full-face electrochemical plating

Anode assembly for plating and planarizing a conductive layer

Carrier head for holding a wafer and allowing processing on a front...

Work piece carrier head for plating and polishing

Polishing apparatus and method with belt drive system adapted to ex...

Polishing head with removable subcarrier

Anode assembly for plating and planarizing a conductive layer

Polishing apparatus and method with a refreshing polishing belt and...

Polishing apparatus and method with belt drive system adapted to ex...

Apparatus and methods for handling a substrate

Polishing head for chemical mechanical polishing using linear plana...

Vertically configured chamber used for multiple processes

Polishing head with removable subcarrier

Apparatus and methods for handling a substrate

Method for dressing a polishing pad during polishing of a semicondu...

Wafer polishing head with pad dressing element

Wafer polishing head

Control of chemical-mechanical polishing rate across a substrate su...

Patents Applicationslast 30 patents

Anode assembly for plating and planarizing a conductive layer

Method of sealing wafer backside for full-face processing

Constant low force wafer carrier for electrochemical mechanical pro...

Polishing apparatus and method with belt drive system adapted to ex...

Polishing apparatus and method with belt drive system adapted to ex...

Anode assembly for plating and planarizing a conductive layer

Method and apparatus of sealing wafer backside for full-face electr...

Carrier head for holding a wafer and allowing processing on a front...

Method of sealing wafer backside for full-face electrochemical plating

Vertically configured chamber used for multiple processes

Vertically configured chamber used for multiple processes

Polishing apparatus and method with belt drive system adapted to ex...

Polishing head with removable subcarrier