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Lee Luo
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Fremont, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Tungsten nitride atomic layer deposition processes
Patent number
7,745,329
Issue date
Jun 29, 2010
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and devices to reduce defects in dielectric stack structures
Patent number
7,608,300
Issue date
Oct 27, 2009
Applied Materials, Inc.
Christopher Dennis Bencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Tungsten nitride atomic layer deposition processes
Patent number
7,429,516
Issue date
Sep 30, 2008
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a controlled and uniform lightly phosphorous dope...
Patent number
7,335,266
Issue date
Feb 26, 2008
Applied Materials, Inc.
Li Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclical deposition of tungsten nitride for metal oxide gate electrode
Patent number
7,115,499
Issue date
Oct 3, 2006
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Bi-layer silicon film and method of fabrication
Patent number
6,991,999
Issue date
Jan 31, 2006
Applied Materials, Inc.
Li Fu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a controlled and uniform lightly phosphorous dope...
Patent number
6,982,214
Issue date
Jan 3, 2006
Applied Materials, Inc.
Li Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System level in-situ integrated dielectric etch process particularl...
Patent number
6,949,203
Issue date
Sep 27, 2005
Applied Materials, Inc.
Chang-Lin Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming silicon comprising films using hexachlorodisila...
Patent number
6,884,464
Issue date
Apr 26, 2005
Applied Materials, Inc.
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Cyclical deposition of tungsten nitride for metal oxide gate electrode
Patent number
6,833,161
Issue date
Dec 21, 2004
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Emissivity-change-free pumping plate kit in a single wafer chamber
Patent number
6,802,906
Issue date
Oct 12, 2004
Applied Materials, Inc.
Xiaoliang Jin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System level in-situ integrated dielectric etch process particularl...
Patent number
6,793,835
Issue date
Sep 21, 2004
Lee Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of controlling the crystal structure of polycrystalline silicon
Patent number
6,726,955
Issue date
Apr 27, 2004
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for silicon oxide and oxynitride deposition using single wa...
Patent number
6,713,127
Issue date
Mar 30, 2004
Applied Materials, Inc.
Janardhanan Anand Subramony
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Emissivity-change-free pumping plate kit in a single wafer chamber
Patent number
6,582,522
Issue date
Jun 24, 2003
Applied Materials, Inc.
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of making a transistor, in particular spacers of the transistor
Patent number
6,566,183
Issue date
May 20, 2003
Steven A. Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Doped silicon deposition process in resistively heated single wafer...
Patent number
6,559,039
Issue date
May 6, 2003
Applied Materials, Inc.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming a silicon nitride layer on a substrate
Patent number
6,559,074
Issue date
May 6, 2003
Applied Materials, Inc.
Steven A. Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System level in-situ integrated dielectric etch process particularl...
Patent number
6,500,357
Issue date
Dec 31, 2002
Applied Materials Inc.
Lee Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma treatment of titanium nitride formed by chemical vapor depos...
Patent number
6,270,859
Issue date
Aug 7, 2001
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical vapor deposition vaporizer
Patent number
6,210,485
Issue date
Apr 3, 2001
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature, high flow rate chemical vapor deposition apparatu...
Patent number
6,189,482
Issue date
Feb 20, 2001
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for substrate processing with improved throughput and yield
Patent number
6,129,044
Issue date
Oct 10, 2000
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for depositing barium strontium titanate
Patent number
6,077,562
Issue date
Jun 20, 2000
Applied Materials, Inc.
Charles Dornfest
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature, high deposition rate process and apparatus for de...
Patent number
6,051,286
Issue date
Apr 18, 2000
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for ceramic pedestal and metal shaft assembly
Patent number
5,994,678
Issue date
Nov 30, 1999
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for substrate processing with improved throughput and yield
Patent number
5,993,916
Issue date
Nov 30, 1999
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and apparatus for a cleaning process in a high temperature,...
Patent number
5,983,906
Issue date
Nov 16, 1999
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
High temperature ceramic heater assembly with RF capability and rel...
Patent number
5,968,379
Issue date
Oct 19, 1999
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Removable pumping channel liners within a chemical vapor deposition...
Patent number
5,964,947
Issue date
Oct 12, 1999
Applied Materials, Inc.
Jun Zhao
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
TUNGSTEN NITRIDE ATOMIC LAYER DEPOSITION PROCESSES
Publication number
20080305629
Publication date
Dec 11, 2008
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and devices to reduce defects in dielectric stack structures
Publication number
20080257864
Publication date
Oct 23, 2008
Applied Materials, Inc.
Christopher Dennis Bencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TUNGSTEN NITRIDE ATOMIC LAYER DEPOSITION PROCESSES
Publication number
20070020924
Publication date
Jan 25, 2007
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a controlled and uniform lightly phosphorous dope...
Publication number
20060024926
Publication date
Feb 2, 2006
Li Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cyclical deposition of tungsten nitride for metal oxide gate electrode
Publication number
20050176240
Publication date
Aug 11, 2005
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods and devices to reduce defects in dielectric stack structures
Publication number
20050045099
Publication date
Mar 3, 2005
Applied Materials, Inc.
Christopher Dennis Bencher
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Integrated equipment set for forming a low K dielectric interconnec...
Publication number
20040206621
Publication date
Oct 21, 2004
Hongwen Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods for forming silicon comprising films using hexachlorodisila...
Publication number
20040086640
Publication date
May 6, 2004
APPLIED MATERIALS, INC.
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of forming a controlled and uniform lightly phosphorous dope...
Publication number
20040063301
Publication date
Apr 1, 2004
APPLIED MATERIALS, INC.
Li Fu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Seedless method of forming a silicon germanium layer on a gate diel...
Publication number
20040009680
Publication date
Jan 15, 2004
APPLIED MATERIALS, INC.
Lee Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System level in-situ integrated dielectric etch process particularl...
Publication number
20030164354
Publication date
Sep 4, 2003
Applied Materials, Inc.
Chang-Lin Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cyclical deposition of tungsten nitride for metal oxide gate electrode
Publication number
20030161952
Publication date
Aug 28, 2003
APPLIED MATERIALS, INC.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods for silicon oxide and oxynitride deposition using single wa...
Publication number
20030138562
Publication date
Jul 24, 2003
Janardhanan Anand Subramony
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for forming silicon containing films
Publication number
20030124818
Publication date
Jul 3, 2003
APPLIED MATERIALS, INC.
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of annealing an oxide film
Publication number
20030124873
Publication date
Jul 3, 2003
Guangcai Xing
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
System level in-situ integrated dielectric etch process particularl...
Publication number
20030057179
Publication date
Mar 27, 2003
Applied Materials, Inc.
Lee Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Cycling deposition of low temperature films in a cold wall single w...
Publication number
20030059535
Publication date
Mar 27, 2003
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Bi-layer silicon film and method of fabrication
Publication number
20030047734
Publication date
Mar 13, 2003
APPLIED MATERIALS, INC.
Li Fu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOPED SILICON DEPOSITION PROCESS IN RESISTIVELY HEATED SINGLE WAFER...
Publication number
20020173127
Publication date
Nov 21, 2002
APPLIED MATERIALS, INC.
Shulin Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Emissivity-change-free pumping plate kit in a single wafer chamber
Publication number
20020137312
Publication date
Sep 26, 2002
APPLIED MATERIALS, INC.
Lee Luo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Emissivity-change-free pumping plate kit in a single wafer chamber
Publication number
20020127508
Publication date
Sep 12, 2002
APPLIED MATERIALS, INC.
Xiaoliang Jin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA TREATMENT OF TITANIUM NITRIDE FORMED BY CHEMICAL VAPOR DEPOS...
Publication number
20010004478
Publication date
Jun 21, 2001
JUN ZHAO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...