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Lyndon W. Graham
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Hillsboro, OR, US
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Patents Grants
last 30 patents
Information
Patent Grant
Method for low temperature annealing of metallization micro-structu...
Patent number
7,462,269
Issue date
Dec 9, 2008
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platinum alloy using electrochemical deposition
Patent number
7,300,562
Issue date
Nov 27, 2007
Semitool, Inc.
Zhongmin Hu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Method for filling recessed micro-structures with metallization in...
Patent number
7,244,677
Issue date
Jul 17, 2007
Semitool Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for controlling and/or measuring additive concentration i...
Patent number
7,229,543
Issue date
Jun 12, 2007
Semitool, Inc.
Lyndon W. Graham
G01 - MEASURING TESTING
Information
Patent Grant
Method of submicron metallization using electrochemical deposition...
Patent number
7,144,805
Issue date
Dec 5, 2006
Semitool, Inc.
LinLin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for applying metal features onto barrier layers using electr...
Patent number
7,135,404
Issue date
Nov 14, 2006
Semitool, Inc.
Rajesh Baskaran
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for low-temperature annealing of metallization...
Patent number
7,001,471
Issue date
Feb 21, 2006
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for low temperature annealing of metallization...
Patent number
6,994,776
Issue date
Feb 7, 2006
Semitool Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for controlling and/or measuring additive concentration in...
Patent number
RE38931
Issue date
Jan 10, 2006
Semitool, Inc.
Lyndon W. Graham
205 - Electrolysis: processes, compositions used therein, and methods of prep...
Information
Patent Grant
Electroplating system having auxiliary electrode exterior to main r...
Patent number
6,921,468
Issue date
Jul 26, 2005
Semitool, Inc.
Lyndon W. Graham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated chemical management system executing improved electrolyte...
Patent number
6,899,805
Issue date
May 31, 2005
Semitool, Inc.
LinLin Chen
G01 - MEASURING TESTING
Information
Patent Grant
Automated chemical management system having improved analysis unit
Patent number
6,814,855
Issue date
Nov 9, 2004
Semitool, Inc.
Lyndon W. Graham
G01 - MEASURING TESTING
Information
Patent Grant
Submicron metallization using electrochemical deposition
Patent number
6,806,186
Issue date
Oct 19, 2004
Semitool, Inc.
Linlin Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for filling recessed micro-structures with metallization in...
Patent number
6,753,251
Issue date
Jun 22, 2004
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plating system workpiece support having workpiece engaging electrode
Patent number
6,663,762
Issue date
Dec 16, 2003
Semitool, Inc.
Martin C. Bleck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
In-situ cleaning processes for semiconductor electroplating electrodes
Patent number
6,599,412
Issue date
Jul 29, 2003
Semitool, Inc.
Lyndon W. Graham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for controlling and/or measuring additive concentration i...
Patent number
6,551,479
Issue date
Apr 22, 2003
Semitool, Inc.
Lyndon W. Graham
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus for low-temperature annealing of metallization microstruc...
Patent number
6,508,920
Issue date
Jan 21, 2003
Semitool, Inc.
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for controlling and/or measuring additive concentration in...
Patent number
6,365,033
Issue date
Apr 2, 2002
Semitoof, Inc.
Lyndon W. Graham
G01 - MEASURING TESTING
Information
Patent Grant
Plating system workpiece support having workpiece-engaging electrod...
Patent number
6,358,388
Issue date
Mar 19, 2002
Semitool, Inc.
Martin C. Bleck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electroplating system having auxiliary electrode exterior to main r...
Patent number
6,270,647
Issue date
Aug 7, 2001
Semitool, Inc.
Lyndon W. Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor plating bowl and method using anode shield
Patent number
6,099,712
Issue date
Aug 8, 2000
Semitool, Inc.
Thomas L. Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Semiconductor plating system workpiece support having workpiece eng...
Patent number
5,985,126
Issue date
Nov 16, 1999
Semitool, Inc.
Martin C. Bleck
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
IN-SITU CLEANING PROCESSES FOR SEMICONDUCTOR ELECTROPLATING ELECTRODES
Publication number
20070215481
Publication date
Sep 20, 2007
Lyndon W. Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for filling recessed micro-structures with metallization in...
Publication number
20070114133
Publication date
May 24, 2007
Semitool, Inc.
Thomas Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for filling recessed micro-structures with metallization in...
Publication number
20060208272
Publication date
Sep 21, 2006
Semitool, Inc.
Thomas L. Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for applying metal features onto metallized layers using ele...
Publication number
20060084264
Publication date
Apr 20, 2006
Semitool, Inc.
Rajesh Baskaran
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for applying metal features onto metallized layers using ele...
Publication number
20060079083
Publication date
Apr 13, 2006
Semitool, Inc.
Rajesh Baskaran
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for applying metal features onto metallized layers using ele...
Publication number
20060079085
Publication date
Apr 13, 2006
Semitool, Inc.
Rajesh Baskaran
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for applying metal features onto metallized layers using ele...
Publication number
20060079084
Publication date
Apr 13, 2006
Semitool, Inc.
Rajesh Baskaran
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Semiconductor plating system workpiece support having workpiece-eng...
Publication number
20050061675
Publication date
Mar 24, 2005
Martin C. Bleck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of submicron metallization using electrochemical deposition...
Publication number
20050051436
Publication date
Mar 10, 2005
Semitool, Inc.
Linlin Chen
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method, chemistry, and apparatus for noble metal electroplating on...
Publication number
20050000818
Publication date
Jan 6, 2005
Semitool, Inc.
Lyndon W. Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Apparatus and methods for transferring heat during chemical process...
Publication number
20040108212
Publication date
Jun 10, 2004
Lyndon Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method for applying metal features onto barrier layers using electr...
Publication number
20040072419
Publication date
Apr 15, 2004
Rajesh Baskaran
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Platinum alloy using electrochemical deposition
Publication number
20040055895
Publication date
Mar 25, 2004
Semitool, Inc.
Zhongmin Hu
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
In-situ cleaning processes for semiconductor electroplating electrodes
Publication number
20030201190
Publication date
Oct 30, 2003
Lyndon W. Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Apparatus for controlling and/or measuring additive concentration i...
Publication number
20030173224
Publication date
Sep 18, 2003
Lyndon W. Graham
G01 - MEASURING TESTING
Information
Patent Application
Method for filling recessed micro-structures with metallization in...
Publication number
20030045095
Publication date
Mar 6, 2003
Semitool, Inc.
Thomas L. Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Plating system workpiece support having workpiece engaging electrode
Publication number
20020148734
Publication date
Oct 17, 2002
Martin C. Bleck
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Automated chemical management system having improved analysis unit
Publication number
20020112970
Publication date
Aug 22, 2002
Lyndon W. Graham
G01 - MEASURING TESTING
Information
Patent Application
Method for filling recessed micro-structures with metallization in...
Publication number
20020102837
Publication date
Aug 1, 2002
Thomas L. Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Automated chemical management system executing improved electrolyte...
Publication number
20020084195
Publication date
Jul 4, 2002
Linlin Chen
G01 - MEASURING TESTING
Information
Patent Application
Method and apparatus for low temperature annealing of metallization...
Publication number
20020074233
Publication date
Jun 20, 2002
Semitool, Inc.
Thomas L. Ritzdorf
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electroplating system having auxiliary electrode exterior to main r...
Publication number
20020046952
Publication date
Apr 25, 2002
Lyndon W. Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Method and apparatus for low temperature annealing of metallization...
Publication number
20020037641
Publication date
Mar 28, 2002
Thomas L. Ritzdorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FILLING RECESSED MICRO-STRUCTURES WITH METALLIZATION IN...
Publication number
20020022363
Publication date
Feb 21, 2002
THOMAS L. RITZDORF
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Electroplating system having auxiliary electrode exterior to main r...
Publication number
20020017456
Publication date
Feb 14, 2002
Lyndon W. Graham
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Submicron metallization using electrochemical deposition
Publication number
20020004301
Publication date
Jan 10, 2002
Semitool, Inc.
Linlin Chen
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD, CHEMISTRY, AND APPARATUS FOR NOBLE METAL ELECTROPLATING ON...
Publication number
20020000380
Publication date
Jan 3, 2002
LYNDON W. GRAHAM
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND APPARATUS FOR LOW-TEMPERATURE ANNEALING OF METALLIZATION...
Publication number
20020000271
Publication date
Jan 3, 2002
Semitool, Inc.
THOMAS RITZDORF
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Methods and apparatus for controlling and/or measuring additive con...
Publication number
20010045356
Publication date
Nov 29, 2001
Lyndon W. Graham
G01 - MEASURING TESTING