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Wafer support system
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Patent number 7,655,093
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Issue date Feb 2, 2010
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 7,186,298
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Issue date Mar 6, 2007
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,692,576
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Issue date Feb 17, 2004
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,491,757
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Issue date Dec 10, 2002
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,454,866
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Issue date Sep 24, 2002
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,343,183
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Issue date Jan 29, 2002
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,203,622
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Issue date Mar 20, 2001
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,113,702
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Issue date Sep 5, 2000
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Process chamber with inner support
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Patent number 6,093,252
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Issue date Jul 25, 2000
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ASM America, Inc.
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John F. Wengert
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer support system
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Patent number 6,053,982
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Issue date Apr 25, 2000
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ASM America, Inc.
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Michael W. Halpin
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor processing system with gas curtain
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Patent number 5,997,588
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Issue date Dec 7, 1999
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Advanced Semiconductor Materials America, Inc.
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Dennis L. Goodwin
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F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...