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Masaaki Kotake
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Patents Grants
last 30 patents
Information
Patent Grant
Chemically amplified negative resist composition and resist pattern...
Patent number
12,164,227
Issue date
Dec 10, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemically amplified positive resist composition and resist pattern...
Patent number
12,164,231
Issue date
Dec 10, 2024
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Conductive polymer composition, coated product and patterning process
Patent number
11,852,974
Issue date
Dec 26, 2023
Shin-Etsu Chemical Co., Ltd.
Takayuki Nagasawa
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Monomer, polymer, negative resist composition, photomask blank, and...
Patent number
11,548,844
Issue date
Jan 10, 2023
Shin-Etsu Chemical Co., Ltd.
Daisuke Domon
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Onium salt, negative resist composition, and resist pattern forming...
Patent number
11,429,023
Issue date
Aug 30, 2022
Shin-Etsu Chemical Co., Ltd.
Daisuke Domon
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Chemically amplified negative resist composition and resist pattern...
Patent number
11,231,650
Issue date
Jan 25, 2022
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resist composition and resist patterning process
Patent number
11,131,926
Issue date
Sep 28, 2021
Shin-Etsu Chemical Co., Ltd.
Takahiro Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sulfonium compound, positive resist composition, and resist pattern...
Patent number
11,124,477
Issue date
Sep 21, 2021
Shin-Etsu Chemical Co., Ltd.
Naoya Inoue
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Chemically amplified negative resist composition and resist pattern...
Patent number
10,725,377
Issue date
Jul 28, 2020
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Chemically amplified positive resist composition and resist pattern...
Patent number
10,495,969
Issue date
Dec 3, 2019
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition, resist pattern forming process, and ph...
Patent number
10,416,558
Issue date
Sep 17, 2019
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Negative resist composition and resist pattern forming process
Patent number
10,120,279
Issue date
Nov 6, 2018
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Polymer compound, negative resist composition, laminate, patterning...
Patent number
9,969,829
Issue date
May 15, 2018
Shin-Etsu Chemical Co., Ltd.
Daisuke Domon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Polymer compound, positive resist composition, laminate, and resist...
Patent number
9,944,738
Issue date
Apr 17, 2018
Shin-Etsu Chemical Co., Ltd.
Daisuke Domon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemically amplified negative resist composition using novel onium...
Patent number
9,740,098
Issue date
Aug 22, 2017
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Chemically amplified positive resist composition and pattern formin...
Patent number
9,720,323
Issue date
Aug 1, 2017
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND R...
Publication number
20250110400
Publication date
Apr 3, 2025
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND R...
Publication number
20250068067
Publication date
Feb 27, 2025
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20250053089
Publication date
Feb 13, 2025
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
ACETAL MODIFIER, POLYMER, CHEMICALLY AMPLIFIED POSITIVE RESIST COMP...
Publication number
20250028244
Publication date
Jan 23, 2025
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
C07 - ORGANIC CHEMISTRY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20250004371
Publication date
Jan 2, 2025
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MONOMER, POLYMER, CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION,...
Publication number
20240427241
Publication date
Dec 26, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240402599
Publication date
Dec 5, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240385517
Publication date
Nov 21, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240377738
Publication date
Nov 14, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240377741
Publication date
Nov 14, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACETAL MODIFIER, POLYMER, CHEMICALLY AMPLIFIED POSITIVE RESIST COMP...
Publication number
20240329532
Publication date
Oct 3, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240329522
Publication date
Oct 3, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
ONIUM SALT, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND R...
Publication number
20240280900
Publication date
Aug 22, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Conductive Polymer Composition, Coated Product, And Patterning Process
Publication number
20240219836
Publication date
Jul 4, 2024
Shin-Etsu Chemical Co., Ltd.
Takayuki NAGASAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Polymer, Chemically Amplified Positive Resist Composition, Resist P...
Publication number
20240134280
Publication date
Apr 25, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240118613
Publication date
Apr 11, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20240094635
Publication date
Mar 21, 2024
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Novel Sulfonium Salt, Resist Composition, And Patterning Process
Publication number
20230418158
Publication date
Dec 28, 2023
Shin-Etsu Chemical Co., Ltd.
Masahiro FUKUSHIMA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230393461
Publication date
Dec 7, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230393465
Publication date
Dec 7, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230393466
Publication date
Dec 7, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230393470
Publication date
Dec 7, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MASK BLANK, RESIST PATTERN FORMING PROCESS AND CHEMICALLY AMPLIFIED...
Publication number
20230367213
Publication date
Nov 16, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230367214
Publication date
Nov 16, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230341775
Publication date
Oct 26, 2023
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20230194986
Publication date
Jun 22, 2023
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED RESIST COMPOSITION, PHOTOMASK BLANK, METHOD FO...
Publication number
20220404701
Publication date
Dec 22, 2022
Shin-Etsu Chemical Co., Ltd.
Keiichi MASUNAGA
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20220308451
Publication date
Sep 29, 2022
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20220276557
Publication date
Sep 1, 2022
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND RESIST PATTERN...
Publication number
20220269174
Publication date
Aug 25, 2022
Shin-Etsu Chemical Co., Ltd.
Masaaki Kotake
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY