Michael A. Todd

Person

Danbury, CT, US

People

Patents Grantslast 30 patents

Information Patent Grant
Deposition of amorphous silicon-containing films
- Patent number 8,921,205
- Issue date Dec 30, 2014
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for deposition of semiconductor films
- Patent number 8,360,001
- Issue date Jan 29, 2013
- ASM America, Inc.
- Michael A. Todd
- B82 - NANO-TECHNOLOGY
Information Patent Grant
System for control of gas injectors
- Patent number 8,088,223
- Issue date Jan 3, 2012
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for deposition of semiconductor films
- Patent number 8,067,297
- Issue date Nov 29, 2011
- ASM America, Inc.
- Michael A. Todd
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method to form ultra high quality silicon-containing compound layers
- Patent number 7,964,513
- Issue date Jun 21, 2011
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition from liquid sources
- Patent number 7,921,805
- Issue date Apr 12, 2011
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin films and methods of making them
- Patent number 7,893,433
- Issue date Feb 22, 2011
- ASM America, Inc.
- Michael A. Todd
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Integration of high k gate dielectric
- Patent number 7,790,556
- Issue date Sep 7, 2010
- ASM America, Inc.
- Christophe F. Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition from liquid sources
- Patent number 7,674,728
- Issue date Mar 9, 2010
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to form ultra high quality silicon-containing compound layers
- Patent number 7,651,953
- Issue date Jan 26, 2010
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for deposition of semiconductor films
- Patent number 7,585,752
- Issue date Sep 8, 2009
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition over mixed substrates using trisilane
- Patent number 7,547,615
- Issue date Jun 16, 2009
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for depositing low dielectric constant materials
- Patent number 7,544,827
- Issue date Jun 9, 2009
- ASM Japan K.K.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus, precursors and deposition methods for silicon-containing...
- Patent number 7,425,350
- Issue date Sep 16, 2008
- ASM Japan K.K.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method to form ultra high quality silicon-containing compound layers
- Patent number 7,297,641
- Issue date Nov 20, 2007
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low temperature silicon compound deposition
- Patent number 7,294,582
- Issue date Nov 13, 2007
- ASM International, NV.
- Ruben Haverkort
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin films and methods of making them
- Patent number 7,285,500
- Issue date Oct 23, 2007
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition over mixed substrates
- Patent number 7,273,799
- Issue date Sep 25, 2007
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition from liquid sources
- Patent number 7,253,084
- Issue date Aug 7, 2007
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for deposition of semiconductor films
- Patent number 7,186,582
- Issue date Mar 6, 2007
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of amorphous silicon-containing films
- Patent number 7,186,630
- Issue date Mar 6, 2007
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for depositing low dielectric constant materials
- Patent number 7,144,620
- Issue date Dec 5, 2006
- ASM Japan K.K.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing amorphous materials and using them as templa...
- Patent number 7,029,995
- Issue date Apr 18, 2006
- ASM America, Inc.
- Michael A. Todd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integration of high k gate dielectric
- Patent number 7,026,219
- Issue date Apr 11, 2006
- ASM America, Inc.
- Christophe F. Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing polycrystalline films with engineered grain...
- Patent number 7,005,160
- Issue date Feb 28, 2006
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin films and method of making them
- Patent number 6,962,859
- Issue date Nov 8, 2005
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for deposition of semiconductor films
- Patent number 6,958,253
- Issue date Oct 25, 2005
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-k dielectric materials and processes
- Patent number 6,905,981
- Issue date Jun 14, 2005
- ASM Japan K.K.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition over mixed substrates
- Patent number 6,900,115
- Issue date May 31, 2005
- ASM America, Inc.
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chemical synthesis
- Patent number 6,858,196
- Issue date Feb 22, 2005
- ASM America, Inc.
- Michael A. Todd
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION FROM LIQUID SOURCES
- Publication number 20100107978
- Publication date May 6, 2010
- ASM AMERICA, INC
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for Deposition of Semiconductor Films
- Publication number 20100012030
- Publication date Jan 21, 2010
- ASM AMERICA, INC
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS
- Publication number 20090311857
- Publication date Dec 17, 2009
- ASM AMERICA, INC
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS AND PROCESSES FOR LOW TEMPERATURE SELECTIVE EPITAXIAL GR...
- Publication number 20090087967
- Publication date Apr 2, 2009
- Michael A. Todd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THIN FILMS AND METHODS OF MAKING THEM
- Publication number 20080073645
- Publication date Mar 27, 2008
- ASM AMERICA, INC
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS
- Publication number 20080038936
- Publication date Feb 14, 2008
- ASM AMERICA, INC
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OVER MIXED SUBSTRATES USING TRISILANE
- Publication number 20080014725
- Publication date Jan 17, 2008
- ASM AMERICA, INC
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
DEPOSITION FROM LIQUID SOURCES
- Publication number 20070166966
- Publication date Jul 19, 2007
- ASM AMERICA, INC
- Michael A Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF AMORPHOUS SILICON-CONTAINING FILMS
- Publication number 20070117359
- Publication date May 24, 2007
- ASM AMERICA, INC
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Process for deposition of semiconductor films
- Publication number 20070102790
- Publication date May 10, 2007
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Process for depositing low dielectric constant materials
- Publication number 20070032676
- Publication date Feb 8, 2007
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus, precursors and deposition methods for silicon-containing...
- Publication number 20060247404
- Publication date Nov 2, 2006
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
System for control of gas injectors
- Publication number 20060216417
- Publication date Sep 28, 2006
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low temperature silicon compound deposition
- Publication number 20060088985
- Publication date Apr 27, 2006
- Ruben Haverkort
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition from liquid sources
- Publication number 20060051940
- Publication date Mar 9, 2006
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Thin films and methods of making them
- Publication number 20050250302
- Publication date Nov 10, 2005
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Integration of high k gate dielectric
- Publication number 20050233529
- Publication date Oct 20, 2005
- Christophe F. Pomarede
- C30 - CRYSTAL GROWTH
Information Patent Application
Process for deposition of semiconductor films
- Publication number 20050208740
- Publication date Sep 22, 2005
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Method and apparatus for chemical synthesis
- Publication number 20050142046
- Publication date Jun 30, 2005
- Michael A. Todd
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Method to form ultra high quality silicon-containing compound layers
- Publication number 20050118837
- Publication date Jun 2, 2005
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for deposition of semiconductor films
- Publication number 20050064684
- Publication date Mar 24, 2005
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Deposition over mixed substrates
- Publication number 20050048745
- Publication date Mar 3, 2005
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Methods for depositing amorphous materials and using them as templa...
- Publication number 20050026400
- Publication date Feb 3, 2005
- Michael A. Todd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods for depositing polycrystalline films with engineered grain...
- Publication number 20040213907
- Publication date Oct 28, 2004
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process for depositing low dielectric constant materials
- Publication number 20040161617
- Publication date Aug 19, 2004
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD OF POROUS DIELECTRIC MATERIALS
- Publication number 20040115954
- Publication date Jun 17, 2004
- Michael A. Todd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Deposition of amorphous silicon-containing films
- Publication number 20040033674
- Publication date Feb 19, 2004
- Michael A. Todd
- C30 - CRYSTAL GROWTH
Information Patent Application
Br2SbCH3 a solid source ion implant and CVD precursor
- Publication number 20040029367
- Publication date Feb 12, 2004
- Ziyun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of forming silicon-containing insulation film having low die...
- Publication number 20030176030
- Publication date Sep 18, 2003
- Naoto Tsuji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Improved Process for Deposition of Semiconductor Films
- Publication number 20030082300
- Publication date May 1, 2003
- Michael A. Todd
- C30 - CRYSTAL GROWTH

Michael A. Todd

Person

Patents Grantslast 30 patents

Deposition of amorphous silicon-containing films

Process for deposition of semiconductor films

System for control of gas injectors

Process for deposition of semiconductor films

Method to form ultra high quality silicon-containing compound layers

Deposition from liquid sources

Thin films and methods of making them

Integration of high k gate dielectric

Deposition from liquid sources

Method to form ultra high quality silicon-containing compound layers

Process for deposition of semiconductor films

Deposition over mixed substrates using trisilane

Process for depositing low dielectric constant materials

Apparatus, precursors and deposition methods for silicon-containing...

Method to form ultra high quality silicon-containing compound layers

Low temperature silicon compound deposition

Thin films and methods of making them

Deposition over mixed substrates

Deposition from liquid sources

Process for deposition of semiconductor films

Deposition of amorphous silicon-containing films

Process for depositing low dielectric constant materials

Methods for depositing amorphous materials and using them as templa...

Integration of high k gate dielectric

Methods for depositing polycrystalline films with engineered grain...

Thin films and method of making them

Process for deposition of semiconductor films

Low-k dielectric materials and processes

Deposition over mixed substrates

Method and apparatus for chemical synthesis

Patents Applicationslast 30 patents

DEPOSITION FROM LIQUID SOURCES

Process for Deposition of Semiconductor Films

METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS

PRECURSORS AND PROCESSES FOR LOW TEMPERATURE SELECTIVE EPITAXIAL GR...

THIN FILMS AND METHODS OF MAKING THEM

METHOD TO FORM ULTRA HIGH QUALITY SILICON-CONTAINING COMPOUND LAYERS

DEPOSITION OVER MIXED SUBSTRATES USING TRISILANE

DEPOSITION FROM LIQUID SOURCES

DEPOSITION OF AMORPHOUS SILICON-CONTAINING FILMS

Process for deposition of semiconductor films

Process for depositing low dielectric constant materials

Apparatus, precursors and deposition methods for silicon-containing...

System for control of gas injectors

Low temperature silicon compound deposition

Deposition from liquid sources

Thin films and methods of making them

Integration of high k gate dielectric

Process for deposition of semiconductor films

Method and apparatus for chemical synthesis

Method to form ultra high quality silicon-containing compound layers

Process for deposition of semiconductor films

Deposition over mixed substrates

Methods for depositing amorphous materials and using them as templa...

Methods for depositing polycrystalline films with engineered grain...

Process for depositing low dielectric constant materials

CVD OF POROUS DIELECTRIC MATERIALS

Deposition of amorphous silicon-containing films

Br2SbCH3 a solid source ion implant and CVD precursor

Method of forming silicon-containing insulation film having low die...

Improved Process for Deposition of Semiconductor Films