Michael S. Lacy

Person

Pleasanton, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for providing a signal port in a polishing pad...
- Patent number 6,953,515
- Issue date Oct 11, 2005
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Subaperture chemical mechanical planarization with polishing pad co...
- Patent number 6,945,856
- Issue date Sep 20, 2005
- Strasbaugh
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for fixed abrasive substrate preparation and u...
- Patent number 6,936,133
- Issue date Aug 30, 2005
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad with sonic en...
- Patent number 6,875,091
- Issue date Apr 5, 2005
- Lam Research Corporation
- Allan M. Radman
- B24 - GRINDING POLISHING
Information Patent Grant
Method for manufacturing a reclaimable test pattern wafer for CMP a...
- Patent number 6,809,031
- Issue date Oct 26, 2004
- Lam Research Corporation
- Michael S. Lacy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for fixed abrasive substrate preparation and u...
- Patent number 6,733,615
- Issue date May 11, 2004
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Chemical mechanical planarization belt assembly and method of assembly
- Patent number 6,609,961
- Issue date Aug 26, 2003
- Lam Research Corporation
- Michael S. Lacy
- B24 - GRINDING POLISHING
Information Patent Grant
Apparatus and method for providing a signal port in a polishing pad...
- Patent number 6,599,765
- Issue date Jul 29, 2003
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for conditioning a polishing pad with sonic en...
- Patent number 6,554,688
- Issue date Apr 29, 2003
- Lam Research Corporation
- Michael S. Lacy
- B24 - GRINDING POLISHING
Information Patent Grant
Subaperture chemical mechanical planarization with polishing pad co...
- Patent number 6,547,651
- Issue date Apr 15, 2003
- Strasbaugh
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Grant
Method and apparatus for fixed abrasive substrate preparation and u...
- Patent number 6,495,464
- Issue date Dec 17, 2002
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and method for providing a signal port in a polishing pad...
- Publication number 20030205325
- Publication date Nov 6, 2003
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Application
Subaperture chemical mechanical planarization with polishing pad co...
- Publication number 20030153250
- Publication date Aug 14, 2003
- Strasbaugh
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for fixed abrasive substrate preparation and u...
- Publication number 20030036274
- Publication date Feb 20, 2003
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for fixed abrasive substrate preparation and u...
- Publication number 20030032287
- Publication date Feb 13, 2003
- Lam Research Corporation
- John M. Boyd
- B24 - GRINDING POLISHING
Information Patent Application
Chemical mechanical planarization belt assembly and method of assembly
- Publication number 20020090899
- Publication date Jul 11, 2002
- Lam Research Corporation
- Michael S. Lacy
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for conditioning a polishing pad with sonic en...
- Publication number 20020086620
- Publication date Jul 4, 2002
- Lam Research Corporation
- Michael S. Lacy
- B24 - GRINDING POLISHING
Information Patent Application
Method and apparatus for conditioning a polishing pad with sonic en...
- Publication number 20020086622
- Publication date Jul 4, 2002
- Lam Research Corporation
- Allan M. Radman
- B24 - GRINDING POLISHING

Michael S. Lacy

Person

Patents Grantslast 30 patents

Apparatus and method for providing a signal port in a polishing pad...

Subaperture chemical mechanical planarization with polishing pad co...

Method and apparatus for fixed abrasive substrate preparation and u...

Method and apparatus for conditioning a polishing pad with sonic en...

Method for manufacturing a reclaimable test pattern wafer for CMP a...

Method and apparatus for fixed abrasive substrate preparation and u...

Chemical mechanical planarization belt assembly and method of assembly

Apparatus and method for providing a signal port in a polishing pad...

Method and apparatus for conditioning a polishing pad with sonic en...

Subaperture chemical mechanical planarization with polishing pad co...

Method and apparatus for fixed abrasive substrate preparation and u...

Patents Applicationslast 30 patents

Apparatus and method for providing a signal port in a polishing pad...

Subaperture chemical mechanical planarization with polishing pad co...

Method and apparatus for fixed abrasive substrate preparation and u...

Method and apparatus for fixed abrasive substrate preparation and u...

Chemical mechanical planarization belt assembly and method of assembly

Method and apparatus for conditioning a polishing pad with sonic en...

Method and apparatus for conditioning a polishing pad with sonic en...