Michael W. Judy

Person

Ipswich, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Stress-isolated MEMS device comprising substrate having cavity and...
- Patent number 11,981,560
- Issue date May 14, 2024
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Magnetic multi-turn sensor and method of manufacture
- Patent number 11,953,567
- Issue date Apr 9, 2024
- Analog Devices International Unlimited Company
- Peter Meehan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Accelerometer with translational motion of masses
- Patent number 11,892,467
- Issue date Feb 6, 2024
- Analog Devices, Inc.
- Kemiao Jia
- G01 - MEASURING TESTING
Information Patent Grant
Coherent summation in wireless sensor platforms
- Patent number 11,805,396
- Issue date Oct 31, 2023
- Analog Devices, Inc.
- Eugene Oh Hwang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Pseudo-extensional mode MEMS ring gyroscope
- Patent number 11,656,077
- Issue date May 23, 2023
- Analog Devices, Inc.
- Igor P. Prikhodko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple anchor high frequency accelerometer
- Patent number 11,415,595
- Issue date Aug 16, 2022
- Analog Devices, Inc.
- Gaurav Vohra
- G01 - MEASURING TESTING
Information Patent Grant
Increased sensitivity z-axis accelerometer
- Patent number 11,255,873
- Issue date Feb 22, 2022
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Stress isolation platform for MEMS devices
- Patent number 10,759,659
- Issue date Sep 1, 2020
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiple-axis resonant accelerometers
- Patent number 10,545,167
- Issue date Jan 28, 2020
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Anchor tracking apparatus for in-plane accelerometers and related m...
- Patent number 10,203,352
- Issue date Feb 12, 2019
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress isolation platform for MEMS devices
- Patent number 10,167,189
- Issue date Jan 1, 2019
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-based MEMS devices including wells embedded with high densi...
- Patent number 10,073,113
- Issue date Sep 11, 2018
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with stress relief structures
- Patent number 9,676,614
- Issue date Jun 13, 2017
- Analog Devices, Inc.
- Houri Johari-Galle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with dynamically variable reference capacitance
- Patent number 9,410,981
- Issue date Aug 9, 2016
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tilt mode accelerometer with improved offset and noise performance
- Patent number 9,297,825
- Issue date Mar 29, 2016
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method of wafer bonding using compatible alloy
- Patent number 8,956,904
- Issue date Feb 17, 2015
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with movable Z-axis sensing element
- Patent number 8,939,029
- Issue date Jan 27, 2015
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for anchoring electrodes in MEMS devices
- Patent number 8,919,199
- Issue date Dec 30, 2014
- Analog Devices, Inc.
- Michael W. Judy
- G01 - MEASURING TESTING
Information Patent Grant
Non-degenerate mode MEMS gyroscope
- Patent number 8,794,068
- Issue date Aug 5, 2014
- Analog Devices, Inc.
- Michael W. Judy
- G01 - MEASURING TESTING
Information Patent Grant
Multi-stage stopper system for MEMS devices
- Patent number 8,516,891
- Issue date Aug 27, 2013
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for determining resonant frequency and quality...
- Patent number 8,464,571
- Issue date Jun 18, 2013
- Analog Devices, Inc.
- Andrew Sparks
- G01 - MEASURING TESTING
Information Patent Grant
Microphone with variable low frequency cutoff
- Patent number 8,447,054
- Issue date May 21, 2013
- Analog Devices, Inc.
- Sushil Bharatan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Stress mitigation in packaged microchips
- Patent number 8,344,487
- Issue date Jan 1, 2013
- Analog Devices, Inc.
- Xin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microphone with backside cavity that impedes bubble formation
- Patent number 8,208,671
- Issue date Jun 26, 2012
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with movable z-axis sensing element
- Patent number 8,146,425
- Issue date Apr 3, 2012
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Microphone with pressure relief
- Patent number 8,111,871
- Issue date Feb 7, 2012
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor system
- Patent number 7,821,084
- Issue date Oct 26, 2010
- Analog Devices, Inc.
- John R. Martin
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Capped sensor
- Patent number 7,795,723
- Issue date Sep 14, 2010
- Analog Devices, Inc.
- Kevin H.-L. Chau
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a MEMS device
- Patent number 7,718,457
- Issue date May 18, 2010
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Camera with acceleration sensor
- Patent number 7,720,376
- Issue date May 18, 2010
- Analog Devices, Inc.
- Harvey Weinberg
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
- Publication number 20240300808
- Publication date Sep 12, 2024
- Analog Devices, Inc.
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS ISOLATION FOR INTEGRATED CIRCUIT PACKAGE INTEGRATION
- Publication number 20230234835
- Publication date Jul 27, 2023
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELEROMETER WITH TRANSLATIONAL MOTION OF MASSES
- Publication number 20220196699
- Publication date Jun 23, 2022
- Analog Devices, Inc.
- Kemiao Jia
- G01 - MEASURING TESTING
Information Patent Application
MAGNETIC MULTI-TURN SENSOR AND METHOD OF MANUFACTURE
- Publication number 20220075010
- Publication date Mar 10, 2022
- Analog Devices International Unlimited Company
- Peter Meehan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRESS-ISOLATED MEMS DEVICE COMPRISING SUBSTRATE HAVING CAVITY AND...
- Publication number 20210380403
- Publication date Dec 9, 2021
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTIPLE ANCHOR HIGH FREQUENCY ACCELEROMETER
- Publication number 20200408801
- Publication date Dec 31, 2020
- Analog Devices, Inc.
- Gaurav Vohra
- G01 - MEASURING TESTING
Information Patent Application
COHERENT SUMMATION IN WIRELESS SENSOR PLATFORMS
- Publication number 20200314607
- Publication date Oct 1, 2020
- Analog Devices, Inc.
- Eugene Oh Hwang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
PSEUDO-EXTENSIONAL MODE MEMS RING GYROSCOPE
- Publication number 20200249020
- Publication date Aug 6, 2020
- Analog Devices, Inc.
- Igor P. Prikhodko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INCREASED SENSITIVITY Z-AXIS ACCELEROMETER
- Publication number 20200081029
- Publication date Mar 12, 2020
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
STRESS ISOLATION PLATFORM FOR MEMS DEVICES
- Publication number 20190047846
- Publication date Feb 14, 2019
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR TRACKING APPARATUS FOR IN-PLANE ACCELEROMETERS AND RELATED M...
- Publication number 20180038887
- Publication date Feb 8, 2018
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE-AXIS RESONANT ACCELEROMETERS
- Publication number 20170108529
- Publication date Apr 20, 2017
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
Silicon-Based MEMS Devices Including Wells Embedded with High Densi...
- Publication number 20160178656
- Publication date Jun 23, 2016
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
Time Multiplexed Electrodes in MEMS Inertial Sensors
- Publication number 20160131480
- Publication date May 12, 2016
- Analog Devices, Inc.
- Jeffrey A. Gregory
- G01 - MEASURING TESTING
Information Patent Application
Stress Isolation Platform for MEMS Devices
- Publication number 20160090297
- Publication date Mar 31, 2016
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Sensor With Dynamically Variable Reference Capacitance
- Publication number 20150355222
- Publication date Dec 10, 2015
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Tilt Mode Accelerometer with improved Offset and Noise Performance
- Publication number 20140251011
- Publication date Sep 11, 2014
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
MEMS Device With Stress Relief Structures
- Publication number 20140217521
- Publication date Aug 7, 2014
- Analog Devices, Inc.
- Houri Johari-Galle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method of Wafer Bonding Using Compatible Alloy
- Publication number 20130023082
- Publication date Jan 24, 2013
- Analog Devices, Inc.
- John R. Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Multi-Stage Stopper System for MEMS Devices
- Publication number 20120228725
- Publication date Sep 13, 2012
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Sensor with Movable Z-Axis Sensing Element
- Publication number 20120223726
- Publication date Sep 6, 2012
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and Method for Anchoring Electrodes in MEMS Devices
- Publication number 20120137773
- Publication date Jun 7, 2012
- Analog Devices, Inc.
- Michael W. Judy
- G01 - MEASURING TESTING
Information Patent Application
Non-Degenerate Mode MEMS Gyroscope
- Publication number 20120137774
- Publication date Jun 7, 2012
- Analog Devices, Inc.
- Michael W. Judy
- G01 - MEASURING TESTING
Information Patent Application
Microphone with Variable Low Frequency Cutoff
- Publication number 20110110550
- Publication date May 12, 2011
- Analog Devices, Inc.
- Sushil Bharatan
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MEMS Sensor with Movable Z-Axis Sensing Element
- Publication number 20100058865
- Publication date Mar 11, 2010
- Analog Devices, Inc.
- Xin Zhang
- G01 - MEASURING TESTING
Information Patent Application
Stress Mitigation in Packaged Microchips
- Publication number 20100013067
- Publication date Jan 21, 2010
- Analog Devices, Inc.
- Xin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stress Mitigation in Packaged Microchips
- Publication number 20090230521
- Publication date Sep 17, 2009
- Analog Devices, Inc.
- Xin Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Microphone with Backside Cavity that Impedes Bubble Formation
- Publication number 20090180647
- Publication date Jul 16, 2009
- Analog Devices, Inc.
- Thomas Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Camera with Acceleration Sensor
- Publication number 20090154910
- Publication date Jun 18, 2009
- Analog Devices, Inc.
- Harvey Weinberg
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Microphone with Pressure Relief
- Publication number 20080175418
- Publication date Jul 24, 2008
- Analog Devices, Inc.
- Xin Zhang
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Michael W. Judy

Person

Patents Grantslast 30 patents

Stress-isolated MEMS device comprising substrate having cavity and...

Magnetic multi-turn sensor and method of manufacture

Accelerometer with translational motion of masses

Coherent summation in wireless sensor platforms

Pseudo-extensional mode MEMS ring gyroscope

Multiple anchor high frequency accelerometer

Increased sensitivity z-axis accelerometer

Stress isolation platform for MEMS devices

Multiple-axis resonant accelerometers

Anchor tracking apparatus for in-plane accelerometers and related m...

Stress isolation platform for MEMS devices

Silicon-based MEMS devices including wells embedded with high densi...

MEMS device with stress relief structures

MEMS sensor with dynamically variable reference capacitance

Tilt mode accelerometer with improved offset and noise performance

Apparatus and method of wafer bonding using compatible alloy

MEMS sensor with movable Z-axis sensing element

Apparatus and method for anchoring electrodes in MEMS devices

Non-degenerate mode MEMS gyroscope

Multi-stage stopper system for MEMS devices

Systems and methods for determining resonant frequency and quality...

Microphone with variable low frequency cutoff

Stress mitigation in packaged microchips

Microphone with backside cavity that impedes bubble formation

MEMS sensor with movable z-axis sensing element

Microphone with pressure relief

Sensor system

Capped sensor

Method for producing a MEMS device

Camera with acceleration sensor

Patents Applicationslast 30 patents

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...

STRESS ISOLATION FOR INTEGRATED CIRCUIT PACKAGE INTEGRATION

ACCELEROMETER WITH TRANSLATIONAL MOTION OF MASSES

MAGNETIC MULTI-TURN SENSOR AND METHOD OF MANUFACTURE

STRESS-ISOLATED MEMS DEVICE COMPRISING SUBSTRATE HAVING CAVITY AND...

MULTIPLE ANCHOR HIGH FREQUENCY ACCELEROMETER

COHERENT SUMMATION IN WIRELESS SENSOR PLATFORMS

PSEUDO-EXTENSIONAL MODE MEMS RING GYROSCOPE

INCREASED SENSITIVITY Z-AXIS ACCELEROMETER

STRESS ISOLATION PLATFORM FOR MEMS DEVICES

ANCHOR TRACKING APPARATUS FOR IN-PLANE ACCELEROMETERS AND RELATED M...

MULTIPLE-AXIS RESONANT ACCELEROMETERS

Silicon-Based MEMS Devices Including Wells Embedded with High Densi...

Time Multiplexed Electrodes in MEMS Inertial Sensors

Stress Isolation Platform for MEMS Devices

MEMS Sensor With Dynamically Variable Reference Capacitance

Tilt Mode Accelerometer with improved Offset and Noise Performance

MEMS Device With Stress Relief Structures

Apparatus and Method of Wafer Bonding Using Compatible Alloy

Multi-Stage Stopper System for MEMS Devices

MEMS Sensor with Movable Z-Axis Sensing Element

Apparatus and Method for Anchoring Electrodes in MEMS Devices

Non-Degenerate Mode MEMS Gyroscope

Microphone with Variable Low Frequency Cutoff

MEMS Sensor with Movable Z-Axis Sensing Element

Stress Mitigation in Packaged Microchips

Stress Mitigation in Packaged Microchips

Microphone with Backside Cavity that Impedes Bubble Formation

Camera with Acceleration Sensor

Microphone with Pressure Relief