Neil Benjamin

Person

Austin, TX, US

People

Patents Grantslast 30 patents

Information Patent Grant
Cooling for a plasma-based reactor
- Patent number 11,676,798
- Issue date Jun 13, 2023
- Lam Research Corporation
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic shielding for plasma sources
- Patent number 11,177,067
- Issue date Nov 16, 2021
- Lam Research Corporation
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic layer for electrostatic chuck including embedded faraday ca...
- Patent number 11,101,107
- Issue date Aug 24, 2021
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maintenance mode power supply system
- Patent number 10,896,808
- Issue date Jan 19, 2021
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck including clamp electrode assembly forming port...
- Patent number 10,892,179
- Issue date Jan 12, 2021
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-power radio-frequency spiral-coil filter
- Patent number 10,812,033
- Issue date Oct 20, 2020
- Lam Research Corporation
- Sean Kelly O'Brien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,770,363
- Issue date Sep 8, 2020
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with thermal zones for semiconductor processing
- Patent number 10,720,346
- Issue date Jul 21, 2020
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic layer for electrostatic chuck including embedded faraday ca...
- Patent number 10,475,623
- Issue date Nov 12, 2019
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ferrite cage RF isolator for power circuitry
- Patent number 10,460,914
- Issue date Oct 29, 2019
- Lam Research Corporation
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable multi-zone gas injection system
- Patent number 10,403,475
- Issue date Sep 3, 2019
- Lam Research Corporation
- David J. Cooperberg
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma ignition and sustaining apparatus
- Patent number 10,395,901
- Issue date Aug 27, 2019
- Lam Research Corporation
- Neil Martin Paul Benjamin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Methods and apparatus for a hybrid capacitively-coupled and an indu...
- Patent number 10,276,348
- Issue date Apr 30, 2019
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supports with multi-layer structure including independent...
- Patent number 10,236,193
- Issue date Mar 19, 2019
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
RF isolation for power circuitry
- Patent number RE47276
- Issue date Mar 5, 2019
- Lam Research Corporation
- Neil Benjamin
Information Patent Grant
Ceramic electrostatic chuck including embedded faraday cage for RF...
- Patent number 10,192,767
- Issue date Jan 29, 2019
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hollow RF feed with coaxial DC power feed
- Patent number 10,153,136
- Issue date Dec 11, 2018
- Lam Research Corporation
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceramic electrostatic chuck including embedded Faraday cage for RF...
- Patent number 10,079,168
- Issue date Sep 18, 2018
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power switching system for ESC with array of thermal control elements
- Patent number 10,049,948
- Issue date Aug 14, 2018
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck including embedded faraday cage for RF delivery...
- Patent number 10,014,161
- Issue date Jul 3, 2018
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid edge ring for plasma wafer processing
- Patent number 9,997,381
- Issue date Jun 12, 2018
- Lam Research Corporation
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling spatial temperature distribution
- Patent number 9,824,904
- Issue date Nov 21, 2017
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiplexed heater array using AC drive for semiconductor processing
- Patent number 9,775,194
- Issue date Sep 26, 2017
- Lam Research Corporation
- John Pease
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Application of powered electrostatic faraday shield to recondition...
- Patent number 9,767,996
- Issue date Sep 19, 2017
- Lam Research Corporation
- Robert G. O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck including embedded faraday cage for RF delivery...
- Patent number 9,673,025
- Issue date Jun 6, 2017
- Lam Research Corporation
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating plate with heating zones for substrate processing and metho...
- Patent number 9,646,861
- Issue date May 9, 2017
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for chuck thermal calibration
- Patent number 9,530,679
- Issue date Dec 27, 2016
- Lam Research Corporation
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating plate with planar heater zones for semiconductor processing
- Patent number 9,392,643
- Issue date Jul 12, 2016
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for a hybrid capacitively-coupled and an indu...
- Patent number 9,287,096
- Issue date Mar 15, 2016
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma ignition and sustaining methods and apparatuses
- Patent number 9,174,296
- Issue date Nov 3, 2015
- Lam Research Corporation
- Neil Martin Paul Benjamin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
CONTROL OF PLASMA FORMATION BY RF COUPLING STRUCTURES
- Publication number 20230326720
- Publication date Oct 12, 2023
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTRIBUTED PLASMA SOURCE ARRAY
- Publication number 20230290611
- Publication date Sep 14, 2023
- LAM RESEARCH CORPORATION
- Neil M. P. BENJAMIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING FOR A PLASMA-BASED REACTOR
- Publication number 20230274912
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED CLOSED LOOP GAS BASED HEAT EXCHANGE
- Publication number 20230170227
- Publication date Jun 1, 2023
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transformer Isolator Having RF Shield Structure for Effective Magne...
- Publication number 20230134296
- Publication date May 4, 2023
- Neil M.P. Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING FOR A PLASMA-BASED REACTOR
- Publication number 20220139671
- Publication date May 5, 2022
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC SHIELDING FOR PLASMA SOURCES
- Publication number 20220044864
- Publication date Feb 10, 2022
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPACT HIGH DENSITY PLASMA SOURCE
- Publication number 20210183619
- Publication date Jun 17, 2021
- LAM RESEARCH CORPORATION
- Roger Patrick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...
- Publication number 20200035455
- Publication date Jan 30, 2020
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC SHIELDING FOR PLASMA SOURCES
- Publication number 20200035409
- Publication date Jan 30, 2020
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAINTENANCE MODE POWER SUPPLY SYSTEM
- Publication number 20200035460
- Publication date Jan 30, 2020
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
HIGH-POWER RADIO-FREQUENCY SPIRAL-COIL FILTER
- Publication number 20190207579
- Publication date Jul 4, 2019
- LAM RESEARCH CORPORATION
- Sean Kelly O'Brien
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Ferrite Cage RF Isolator For Power Circuitry
- Publication number 20190164729
- Publication date May 30, 2019
- LAM RESEARCH CORPORATION
- Hema Swaroop Mopidevi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS
- Publication number 20180374763
- Publication date Dec 27, 2018
- LAM RESEARCH CORPORATION
- Keith William Gaff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...
- Publication number 20180358254
- Publication date Dec 13, 2018
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Including Clamp Electrode Assembly Forming Port...
- Publication number 20180130689
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...
- Publication number 20180130690
- Publication date May 10, 2018
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...
- Publication number 20170287680
- Publication date Oct 5, 2017
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...
- Publication number 20170263418
- Publication date Sep 14, 2017
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS WITH MULTI-LAYER STRUCTURE INCLUDING INDEPENDENT...
- Publication number 20170229327
- Publication date Aug 10, 2017
- LAM RESEARCH CORPORATION
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPLICATION OF POWERED ELECTROSTATIC FARADAY SHIELD TO RECONDITION...
- Publication number 20170053782
- Publication date Feb 23, 2017
- LAM RESEARCH CORPORATION
- Robert G. O'Neill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLLOW RF FEED WITH COAXIAL DC POWER FEED
- Publication number 20170040148
- Publication date Feb 9, 2017
- LAM RESEARCH CORPORATION
- Jason Augustino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...
- Publication number 20170032935
- Publication date Feb 2, 2017
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING
- Publication number 20160300741
- Publication date Oct 13, 2016
- LAM RESEARCH CORPORATION
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLEXED HEATER ARRAY USING AC DRIVE FOR SEMICONDUCTOR PROCESSING
- Publication number 20160198524
- Publication date Jul 7, 2016
- LAM RESEARCH CORPORATION
- John Pease
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR A HYBRID CAPACITIVELY-COUPLED AND AN INDU...
- Publication number 20160155615
- Publication date Jun 2, 2016
- LAM RESEARCH CORPORATION
- Alexei MARAKHTANOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Ignition and Sustaining Apparatus
- Publication number 20160056023
- Publication date Feb 25, 2016
- LAM RESEARCH CORPORATION
- Neil Martin Paul Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABLE MULTI-ZONE GAS INJECTION SYSTEM
- Publication number 20150235811
- Publication date Aug 20, 2015
- LAM RESEARCH CORPORATION
- David J. Cooperberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING SPATIAL TEMPERATURE DISTRIBUTION
- Publication number 20150187619
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID EDGE RING FOR PLASMA WAFER PROCESSING
- Publication number 20140235063
- Publication date Aug 21, 2014
- LAM RESEARCH CORPORATION
- Brian McMillin
- H01 - BASIC ELECTRIC ELEMENTS

Neil Benjamin

Person

Patents Grantslast 30 patents

Cooling for a plasma-based reactor

Magnetic shielding for plasma sources

Ceramic layer for electrostatic chuck including embedded faraday ca...

Maintenance mode power supply system

Electrostatic chuck including clamp electrode assembly forming port...

High-power radio-frequency spiral-coil filter

Power switching system for ESC with array of thermal control elements

Substrate support with thermal zones for semiconductor processing

Ceramic layer for electrostatic chuck including embedded faraday ca...

Ferrite cage RF isolator for power circuitry

Tunable multi-zone gas injection system

Plasma ignition and sustaining apparatus

Methods and apparatus for a hybrid capacitively-coupled and an indu...

Substrate supports with multi-layer structure including independent...

RF isolation for power circuitry

Ceramic electrostatic chuck including embedded faraday cage for RF...

Hollow RF feed with coaxial DC power feed

Ceramic electrostatic chuck including embedded Faraday cage for RF...

Power switching system for ESC with array of thermal control elements

Electrostatic chuck including embedded faraday cage for RF delivery...

Hybrid edge ring for plasma wafer processing

Method and apparatus for controlling spatial temperature distribution

Multiplexed heater array using AC drive for semiconductor processing

Application of powered electrostatic faraday shield to recondition...

Electrostatic chuck including embedded faraday cage for RF delivery...

Heating plate with heating zones for substrate processing and metho...

Method and apparatus for chuck thermal calibration

Heating plate with planar heater zones for semiconductor processing

Methods and apparatus for a hybrid capacitively-coupled and an indu...

Plasma ignition and sustaining methods and apparatuses

Patents Applicationslast 30 patents

CONTROL OF PLASMA FORMATION BY RF COUPLING STRUCTURES

DISTRIBUTED PLASMA SOURCE ARRAY

COOLING FOR A PLASMA-BASED REACTOR

ENHANCED CLOSED LOOP GAS BASED HEAT EXCHANGE

Transformer Isolator Having RF Shield Structure for Effective Magne...

COOLING FOR A PLASMA-BASED REACTOR

MAGNETIC SHIELDING FOR PLASMA SOURCES

COMPACT HIGH DENSITY PLASMA SOURCE

Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...

MAGNETIC SHIELDING FOR PLASMA SOURCES

MAINTENANCE MODE POWER SUPPLY SYSTEM

HIGH-POWER RADIO-FREQUENCY SPIRAL-COIL FILTER

Ferrite Cage RF Isolator For Power Circuitry

POWER SWITCHING SYSTEM FOR ESC WITH ARRAY OF THERMAL CONTROL ELEMENTS

Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...

Electrostatic Chuck Including Clamp Electrode Assembly Forming Port...

Ceramic Electrostatic Chuck Including Embedded Faraday Cage for RF...

Ceramic Layer for Electrostatic Chuck Including Embedded Faraday Ca...

Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...

SUBSTRATE SUPPORTS WITH MULTI-LAYER STRUCTURE INCLUDING INDEPENDENT...

APPLICATION OF POWERED ELECTROSTATIC FARADAY SHIELD TO RECONDITION...

HOLLOW RF FEED WITH COAXIAL DC POWER FEED

Electrostatic Chuck Including Embedded Faraday Cage for RF Delivery...

SUBSTRATE SUPPORT WITH THERMAL ZONES FOR SEMICONDUCTOR PROCESSING

MULTIPLEXED HEATER ARRAY USING AC DRIVE FOR SEMICONDUCTOR PROCESSING

METHODS AND APPARATUS FOR A HYBRID CAPACITIVELY-COUPLED AND AN INDU...

Plasma Ignition and Sustaining Apparatus

TUNABLE MULTI-ZONE GAS INJECTION SYSTEM

METHOD AND APPARATUS FOR CONTROLLING SPATIAL TEMPERATURE DISTRIBUTION

HYBRID EDGE RING FOR PLASMA WAFER PROCESSING