Osamu Nabeya

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus
- Patent number 12,128,523
- Issue date Oct 29, 2024
- Ebara Corporation
- Makoto Fukushima
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane, substrate holding device, and polishing apparatus
- Patent number 12,068,189
- Issue date Aug 20, 2024
- Ebara Corporation
- Satoru Yamaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding apparatus, elastic membrane, polishing apparatus,...
- Patent number 11,958,163
- Issue date Apr 16, 2024
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane
- Patent number D1021832
- Issue date Apr 9, 2024
- Ebara Corporation
- Kenichi Akazawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Polishing head and polishing apparatus
- Patent number 11,752,590
- Issue date Sep 12, 2023
- Ebara Corporation
- Yuichi Kato
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and method of controlling inclination of statio...
- Patent number 11,745,306
- Issue date Sep 5, 2023
- Ebara Corporation
- Tomoko Owada
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 11,731,235
- Issue date Aug 22, 2023
- Ebara Corporation
- Shingo Togashi
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane
- Patent number D989012
- Issue date Jun 13, 2023
- Ebara Corporation
- Kenichi Akazawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Method of detecting abnormality of a roller which transmits a local...
- Patent number 11,654,524
- Issue date May 23, 2023
- Ebara Corporation
- Tomoko Owada
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane for semiconductor wafer polishing apparatus
- Patent number D981969
- Issue date Mar 28, 2023
- Ebara Corporation
- Kenichi Akazawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Retaining ring for substrate
- Patent number D981459
- Issue date Mar 21, 2023
- Ebara Corporation
- Kenichi Akazawa
- D15 - Machines not elsewhere specified
Information Patent Grant
Substrate holding device, substrate polishing apparatus, and method...
- Patent number 11,478,895
- Issue date Oct 25, 2022
- Ebara Corporation
- Shingo Togashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate adsorption method, substrate holding apparatus, substrate...
- Patent number 11,472,000
- Issue date Oct 18, 2022
- Ebara Corporation
- Hiroyuki Shinozaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 11,426,834
- Issue date Aug 30, 2022
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,224,956
- Issue date Jan 18, 2022
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus, elastic membrane, polishing apparatus,...
- Patent number 11,179,823
- Issue date Nov 23, 2021
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane, substrate holding device, and polishing apparatus
- Patent number 11,088,011
- Issue date Aug 10, 2021
- Ebara Corporation
- Satoru Yamaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 11,059,144
- Issue date Jul 13, 2021
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane
- Patent number D918161
- Issue date May 4, 2021
- Ebara Corporation
- Shingo Togashi
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate holding apparatus, substrate suction determination method...
- Patent number 10,991,613
- Issue date Apr 27, 2021
- Ebara Corporation
- Osamu Nabeya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Elastic membrane for semiconductor wafer polishing
- Patent number D913977
- Issue date Mar 23, 2021
- Ebara Corporation
- Satoru Yamaki
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Polishing apparatus
- Patent number 10,702,972
- Issue date Jul 7, 2020
- Ebara Corporation
- Makoto Fukushima
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate adsorption method, substrate holding apparatus, substrate...
- Patent number 10,537,975
- Issue date Jan 21, 2020
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding device, and substrate polishing apparatus
- Patent number 10,486,284
- Issue date Nov 26, 2019
- Ebara Corporation
- Shingo Togashi
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus, substrate processing method, substr...
- Patent number 10,486,285
- Issue date Nov 26, 2019
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate polishing method, top ring, and substrate polishing appar...
- Patent number 10,464,185
- Issue date Nov 5, 2019
- Ebara Corporation
- Shintaro Isono
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate holding apparatus and polishing apparatus
- Patent number 10,442,056
- Issue date Oct 15, 2019
- Ebara Corporation
- Keisuke Namiki
- B24 - GRINDING POLISHING
Information Patent Grant
Elastic membrane for semiconductor wafer polishing
- Patent number D859332
- Issue date Sep 10, 2019
- Ebara Corporation
- Satoru Yamaki
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Polishing apparatus, control method and recording medium
- Patent number 10,391,603
- Issue date Aug 27, 2019
- Ebara Corporation
- Satoru Yamaki
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 10,293,455
- Issue date May 21, 2019
- Ebara Corporation
- Osamu Nabeya
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20240351161
- Publication date Oct 24, 2024
- EBARA CORPORATION
- Tomoko OWADA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING HEAD SYSTEM AND POLISHING METHOD
- Publication number 20240066658
- Publication date Feb 29, 2024
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING METHOD AND POLISHING APPARATUS
- Publication number 20240025007
- Publication date Jan 25, 2024
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
METHOD OF RAISING POLISHING HEAD AFTER POLISHING OF WORKPIECE, POLI...
- Publication number 20230191553
- Publication date Jun 22, 2023
- EBARA CORPORATION
- Yuichi Kato
- B24 - GRINDING POLISHING
Information Patent Application
ELASTIC MEMBRANE AND METHOD OF MANUFACTURING ELASTIC MEMBRANE
- Publication number 20230065029
- Publication date Mar 2, 2023
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
BREAK-IN PROCESSING APPARATUS AND BREAK-IN PROCESSING METHOD
- Publication number 20230026543
- Publication date Jan 26, 2023
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
FILM-THICKNESS MEASURING METHOD, METHOD OF DETECTING NOTCH PORTION,...
- Publication number 20220344221
- Publication date Oct 27, 2022
- EBARA CORPORATION
- Osamu NABEYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING HEAD AND POLISHING APPARATUS
- Publication number 20220134506
- Publication date May 5, 2022
- EBARA CORPORATION
- Yuichi Kato
- B24 - GRINDING POLISHING
Information Patent Application
INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, PROGR...
- Publication number 20220093409
- Publication date Mar 24, 2022
- EBARA CORPORATION
- Keisuke Namiki
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, ELASTIC MEMBRANE, POLISHING APPARATUS,...
- Publication number 20220048157
- Publication date Feb 17, 2022
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
ELASTIC MEMBRANE, SUBSTRATE HOLDING DEVICE, AND POLISHING APPARATUS
- Publication number 20210335650
- Publication date Oct 28, 2021
- EBARA CORPORATION
- Satoru YAMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE SUCTION DETERMINATION METHOD...
- Publication number 20210217647
- Publication date Jul 15, 2021
- EBARA CORPORATION
- Osamu Nabeya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS AND METHOD OF MANUFACTURING A DRIVE RING
- Publication number 20210138606
- Publication date May 13, 2021
- EBARA CORPORATION
- Keisuke NAMIKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DETECTING ABNORMALITY OF A ROLLER WHICH TRANSMITS A LOCAL...
- Publication number 20210060723
- Publication date Mar 4, 2021
- EBARA CORPORATION
- Tomoko Owada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20200361056
- Publication date Nov 19, 2020
- EBARA CORPORATION
- Makoto Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS AND POLISHING METHOD
- Publication number 20200206867
- Publication date Jul 2, 2020
- EBARA CORPORATION
- Shingo Togashi
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS AND METHOD OF CONTROLLING INCLINATION OF STATIO...
- Publication number 20200206868
- Publication date Jul 2, 2020
- EBARA CORPORATION
- Tomoko Owada
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE ADSORPTION METHOD, SUBSTRATE HOLDING APPARATUS, SUBSTRATE...
- Publication number 20200094372
- Publication date Mar 26, 2020
- EBARA CORPORATION
- Hiroyuki SHINOZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20200047309
- Publication date Feb 13, 2020
- Mitsuru MIYAZAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING DEVICE, SUBSTRATE POLISHING APPARATUS, AND METHOD...
- Publication number 20200047308
- Publication date Feb 13, 2020
- EBARA CORPORATION
- Shingo TOGASHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE SUCTION DETERMINATION METHOD...
- Publication number 20200043773
- Publication date Feb 6, 2020
- EBARA CORPORATION
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE POLISHING APPARATUS, ELASTIC...
- Publication number 20190375070
- Publication date Dec 12, 2019
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20190224808
- Publication date Jul 25, 2019
- EBARA CORPORATION
- Osamu Nabeya
- B24 - GRINDING POLISHING
Information Patent Application
ELASTIC MEMBRANE, SUBSTRATE HOLDING DEVICE, AND POLISHING APPARATUS
- Publication number 20180301367
- Publication date Oct 18, 2018
- EBARA CORPORATION
- Satoru YAMAKI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE HOLDING APPARATUS, ELASTIC MEMBRANE, POLISHING APPARATUS,...
- Publication number 20180117730
- Publication date May 3, 2018
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
POLISHING APPARATUS
- Publication number 20180065228
- Publication date Mar 8, 2018
- EBARA CORPORATION
- Osamu NABEYA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE POLISHING METHOD, TOP RING, AND SUBSTRATE POLISHING APPAR...
- Publication number 20170266779
- Publication date Sep 21, 2017
- EBARA CORPORATION
- Shintaro Isono
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...
- Publication number 20170252894
- Publication date Sep 7, 2017
- EBARA CORPORATION
- Mitsuru Miyazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS, CONTROL METHOD AND RECORDING MEDIUM
- Publication number 20170173756
- Publication date Jun 22, 2017
- EBARA CORPORATION
- Satoru Yamaki
- B24 - GRINDING POLISHING
Information Patent Application
ELASTIC MEMBRANE, SUBSTRATE HOLDING APPARATUS, AND POLISHING APPARATUS
- Publication number 20170144267
- Publication date May 25, 2017
- EBARA CORPORATION
- Makoto Fukushima
- B24 - GRINDING POLISHING

Osamu Nabeya

Person

Patents Grantslast 30 patents

Polishing apparatus

Elastic membrane, substrate holding device, and polishing apparatus

Substrate holding apparatus, elastic membrane, polishing apparatus,...

Elastic membrane

Polishing head and polishing apparatus

Polishing apparatus and method of controlling inclination of statio...

Polishing apparatus and polishing method

Elastic membrane

Method of detecting abnormality of a roller which transmits a local...

Elastic membrane for semiconductor wafer polishing apparatus

Retaining ring for substrate

Substrate holding device, substrate polishing apparatus, and method...

Substrate adsorption method, substrate holding apparatus, substrate...

Substrate processing apparatus, substrate processing method, substr...

Polishing apparatus

Substrate holding apparatus, elastic membrane, polishing apparatus,...

Elastic membrane, substrate holding device, and polishing apparatus

Polishing apparatus

Elastic membrane

Substrate holding apparatus, substrate suction determination method...

Elastic membrane for semiconductor wafer polishing

Polishing apparatus

Substrate adsorption method, substrate holding apparatus, substrate...

Substrate holding device, and substrate polishing apparatus

Substrate processing apparatus, substrate processing method, substr...

Substrate polishing method, top ring, and substrate polishing appar...

Substrate holding apparatus and polishing apparatus

Elastic membrane for semiconductor wafer polishing

Polishing apparatus, control method and recording medium

Polishing apparatus

Patents Applicationslast 30 patents

POLISHING METHOD AND POLISHING APPARATUS

POLISHING HEAD SYSTEM AND POLISHING METHOD

POLISHING METHOD AND POLISHING APPARATUS

METHOD OF RAISING POLISHING HEAD AFTER POLISHING OF WORKPIECE, POLI...

ELASTIC MEMBRANE AND METHOD OF MANUFACTURING ELASTIC MEMBRANE

BREAK-IN PROCESSING APPARATUS AND BREAK-IN PROCESSING METHOD

FILM-THICKNESS MEASURING METHOD, METHOD OF DETECTING NOTCH PORTION,...

POLISHING HEAD AND POLISHING APPARATUS

INFORMATION PROCESSING SYSTEM, INFORMATION PROCESSING METHOD, PROGR...

SUBSTRATE HOLDING APPARATUS, ELASTIC MEMBRANE, POLISHING APPARATUS,...

ELASTIC MEMBRANE, SUBSTRATE HOLDING DEVICE, AND POLISHING APPARATUS

SUBSTRATE HOLDING APPARATUS, SUBSTRATE SUCTION DETERMINATION METHOD...

SUBSTRATE HOLDING APPARATUS AND METHOD OF MANUFACTURING A DRIVE RING

METHOD OF DETECTING ABNORMALITY OF A ROLLER WHICH TRANSMITS A LOCAL...

POLISHING APPARATUS

POLISHING APPARATUS AND POLISHING METHOD

POLISHING APPARATUS AND METHOD OF CONTROLLING INCLINATION OF STATIO...

SUBSTRATE ADSORPTION METHOD, SUBSTRATE HOLDING APPARATUS, SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

SUBSTRATE HOLDING DEVICE, SUBSTRATE POLISHING APPARATUS, AND METHOD...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE SUCTION DETERMINATION METHOD...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE POLISHING APPARATUS, ELASTIC...

POLISHING APPARATUS

ELASTIC MEMBRANE, SUBSTRATE HOLDING DEVICE, AND POLISHING APPARATUS

SUBSTRATE HOLDING APPARATUS, ELASTIC MEMBRANE, POLISHING APPARATUS,...

POLISHING APPARATUS

SUBSTRATE POLISHING METHOD, TOP RING, AND SUBSTRATE POLISHING APPAR...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, SUBSTR...

POLISHING APPARATUS, CONTROL METHOD AND RECORDING MEDIUM

ELASTIC MEMBRANE, SUBSTRATE HOLDING APPARATUS, AND POLISHING APPARATUS