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Hsinchu Hsien, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for determining various processes of wafer fab...
Patent number
6,632,685
Issue date
Oct 14, 2003
Mosel Vitelic Inc
Cheng-Tsung Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Auxiliary gasline-heating unit in chemical vapor deposition
Patent number
6,352,244
Issue date
Mar 5, 2002
United Microelectronics, Corp.
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Auxiliary gasline-heating unit in chemical vapor deposition
Patent number
6,322,057
Issue date
Nov 27, 2001
United Microelectronics Corp.
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Chemical-mechanical polish machines and fabrication process using t...
Patent number
6,293,850
Issue date
Sep 25, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Method of mixing slurries
Patent number
6,280,079
Issue date
Aug 28, 2001
United Microelectronics Corp.
Ming-Sheng Yang
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical mechanical polish machines and fabrication process using t...
Patent number
6,241,582
Issue date
Jun 5, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical polish machines and fabrication process using t...
Patent number
6,234,876
Issue date
May 22, 2001
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer polishing head
Patent number
6,220,930
Issue date
Apr 24, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Method for increasing working life of retaining ring in chemical-me...
Patent number
6,206,758
Issue date
Mar 27, 2001
United Microelectronics Corp.
Chien-Hsin Lai
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-mechanical polish machines and fabrication process using t...
Patent number
6,183,350
Issue date
Feb 6, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Chemical-liquid controlling apparatus
Patent number
6,165,255
Issue date
Dec 26, 2000
United Microelectronics Corp.
Chien-Hsin Lai
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Cleaning system with automatically controlled brush pressure
Patent number
6,119,294
Issue date
Sep 19, 2000
United Microelectronics Corp.
Chien-Hsin Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chemical-mechanical polishing pad
Patent number
6,120,366
Issue date
Sep 19, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Filtering apparatus with stirrer in a CMP apparatus
Patent number
6,106,714
Issue date
Aug 22, 2000
United Microelectronics Corp.
Hao-Kuang Chiu
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Chemical mechanical polishing machine
Patent number
6,096,162
Issue date
Aug 1, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Retainer ring design for polishing head of chemical-mechanical poli...
Patent number
6,062,963
Issue date
May 16, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING
Information
Patent Grant
Device for filtering slurry
Patent number
6,051,139
Issue date
Apr 18, 2000
United Microelectronics Corp.
Juen-Kuen Lin
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Circulation system of slurry
Patent number
5,993,647
Issue date
Nov 30, 1999
United Microelectronics Corp.
Chao-Yuan Huang
B24 - GRINDING POLISHING
Information
Patent Grant
Retainer ring for polishing head of chemical-mechanical polish mach...
Patent number
5,944,593
Issue date
Aug 31, 1999
United Microelectronics Corp.
Daniel Chiu
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
WAFER POLISHING HEAD
Publication number
20070298694
Publication date
Dec 27, 2007
United Microelectronics Corp.
Chin-Kun Lin
B24 - GRINDING POLISHING
Information
Patent Application
WAFER STAGE HAVING AN ENCAPSULATED CENTRAL PEDESTAL PLATE
Publication number
20070181420
Publication date
Aug 9, 2007
Ming-Tung Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Chemical mechanical polishing device including a polishing pad and...
Publication number
20070066187
Publication date
Mar 22, 2007
Chih-Chiang Yang
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus and method for determining various processes of wafer fab...
Publication number
20020108893
Publication date
Aug 15, 2002
Mosel Vitelic Inc.
Cheng-Tsung chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Auxiliary gasline-heating unit in chemical vapor deposition
Publication number
20010042930
Publication date
Nov 22, 2001
Juen-Kuen Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Wafer polishing head
Publication number
20010000770
Publication date
May 3, 2001
United Microelectronics Corp.
Juen-Kuen Lin
B24 - GRINDING POLISHING