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San Jose, CA, US
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last 30 patents
Information
Patent Grant
Methods for depositing tungsten layers employing atomic layer depos...
Patent number
7,745,333
Issue date
Jun 29, 2010
Applied Materials, Inc.
Ken Kaung Lai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pulsed deposition process for tungsten nucleation
Patent number
7,695,563
Issue date
Apr 13, 2010
Applied Materials, Inc.
Xinliang Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods for depositing tungsten layers employing atomic layer depos...
Patent number
7,405,158
Issue date
Jul 29, 2008
Applied Materials, Inc.
Ken Kaung Lai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pulsed nucleation deposition of tungsten layers
Patent number
7,211,144
Issue date
May 1, 2007
Applied Materials, Inc.
Xinliang Lu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Showerhead with reduced contact area
Patent number
6,461,435
Issue date
Oct 8, 2002
Applied Materials, Inc.
Karl A. Littau
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Gate electrode connection structure by in situ chemical vapor depos...
Patent number
6,251,190
Issue date
Jun 26, 2001
Applied Materials, Inc.
Alfred Mak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of forming gate electrode connection structure by in situ ch...
Patent number
6,162,715
Issue date
Dec 19, 2000
Applied Materials, Inc.
Alfred Mak
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
PULSED DEPOSITION PROCESS FOR TUNGSTEN NUCLEATION
Publication number
20080317954
Publication date
Dec 25, 2008
XINLIANG LU
C30 - CRYSTAL GROWTH
Information
Patent Application
METHODS FOR DEPOSITING TUNGSTEN LAYERS EMPLOYING ATOMIC LAYER DEPOS...
Publication number
20080280438
Publication date
Nov 13, 2008
Ken Kaung Lai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Methods for depositing tungsten layers employing atomic layer depos...
Publication number
20060009034
Publication date
Jan 12, 2006
Ken Kaung Lai
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Formation of titanium nitride films using a cyclical deposition pro...
Publication number
20040013803
Publication date
Jan 22, 2004
APPLIED MATERIALS, INC.
Hua Chung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Pulsed nucleation deposition of tungsten layers
Publication number
20030127043
Publication date
Jul 10, 2003
APPLIED MATERIALS, INC.
Xinliang Lu
C30 - CRYSTAL GROWTH
Information
Patent Application
W-CVD with fluorine-free tungsten nucleation
Publication number
20020190379
Publication date
Dec 19, 2002
Applied Materials, Inc.
Ping Jian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...