Ravinder Aggarwal

Person

Gilbert, AZ, US

People

Patents Grantslast 30 patents

Information Patent Grant
Self-centering susceptor ring assembly
- Patent number 11,387,137
- Issue date Jul 12, 2022
- ASM IP Holding B.V.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reaction apparatus having multiple adjustable exhaust ports
- Patent number 9,551,069
- Issue date Jan 24, 2017
- ASM America, Inc.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Smart temperature measuring device
- Patent number 9,297,705
- Issue date Mar 29, 2016
- ASM America, Inc.
- Ravinder K. Aggarwal
- G05 - CONTROLLING REGULATING
Information Patent Grant
Thermocouple assembly with guarded thermocouple junction
- Patent number 9,267,850
- Issue date Feb 23, 2016
- ASM America, Inc.
- Ravinder K. Aggarwal
- G01 - MEASURING TESTING
Information Patent Grant
Load lock having secondary isolation chamber
- Patent number 8,927,435
- Issue date Jan 6, 2015
- ASM America, Inc.
- Ravinder K. Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Grant
Self-centering susceptor ring assembly
- Patent number 8,801,857
- Issue date Aug 12, 2014
- ASM America, Inc.
- Ravinder Aggarwal
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Thermocouple
- Patent number 8,616,765
- Issue date Dec 31, 2013
- ASM America, Inc.
- Buz Darabnia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate reactor with adjustable injectors for mixing gases within...
- Patent number 8,486,191
- Issue date Jul 16, 2013
- ASM America, Inc.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock having secondary isolation chamber
- Patent number 8,440,048
- Issue date May 14, 2013
- ASM America, Inc.
- Ravinder Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Grant
Susceptor ring
- Patent number 8,394,229
- Issue date Mar 12, 2013
- ASM America, Inc.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermocouple assembly with guarded thermocouple junction
- Patent number 8,382,370
- Issue date Feb 26, 2013
- ASM America, Inc.
- Ravinder K. Aggarwal
- G01 - MEASURING TESTING
Information Patent Grant
Thermocouple
- Patent number 8,262,287
- Issue date Sep 11, 2012
- ASM America, Inc.
- Buz Darabnia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermocouple
- Patent number 8,100,583
- Issue date Jan 24, 2012
- ASM America, Inc.
- Rand Conner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 8,088,225
- Issue date Jan 3, 2012
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction apparatus having multiple adjustable exhaust ports
- Patent number 8,067,061
- Issue date Nov 29, 2011
- ASM America, Inc.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Calibration of temperature control system for semiconductor process...
- Patent number 8,047,706
- Issue date Nov 1, 2011
- ASM America, Inc.
- Matthew G. Goodman
- G01 - MEASURING TESTING
Information Patent Grant
Redundant temperature sensor for semiconductor processing chambers
- Patent number 7,993,057
- Issue date Aug 9, 2011
- ASM America, Inc.
- Ravinder Aggarwal
- G01 - MEASURING TESTING
Information Patent Grant
Movable radiant heat sources
- Patent number 7,725,012
- Issue date May 25, 2010
- ASM America, Inc.
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support system for reduced autodoping and backside deposi...
- Patent number 7,648,579
- Issue date Jan 19, 2010
- ASM America, Inc.
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor ring
- Patent number D600223
- Issue date Sep 15, 2009
- Ravinder Aggarwal
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Substrate handling chamber with movable substrate carrier loading p...
- Patent number 7,585,142
- Issue date Sep 8, 2009
- ASM America, Inc.
- Ravinder Aggarwal
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Wafer holder with peripheral lift ring
- Patent number 7,449,071
- Issue date Nov 11, 2008
- ASM America, Inc.
- Ravinder K. Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature drop-off of a substrate
- Patent number 7,231,141
- Issue date Jun 12, 2007
- ASM America, Inc.
- Paul Jacobson
- D10 - INDEXING SCHEME ASSOCIATED WITH SUBLASSES OF SECTION D, RELATING TO TEX...
Information Patent Grant
Slit valve for a semiconductor processing system
- Patent number 7,159,846
- Issue date Jan 9, 2007
- ASM America, Inc.
- Ravinder Aggarwal
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Non-contact cool-down station for wafers
- Patent number 7,147,720
- Issue date Dec 12, 2006
- ASM America, Inc.
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock with integrated pre-clean chamber
- Patent number 7,018,504
- Issue date Mar 28, 2006
- ASM America, Inc.
- Ivo Raaijmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Front opening unified pod
- Patent number 6,899,145
- Issue date May 31, 2005
- ASM America, Inc.
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Slit valve for a semiconductor processing system
- Patent number 6,883,776
- Issue date Apr 26, 2005
- ASM America, Inc.
- Ravinder Aggarwal
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Non-contact cool-down station for wafers
- Patent number 6,883,250
- Issue date Apr 26, 2005
- ASM America, Inc.
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Localized heating of substrates using optics
- Patent number 6,879,777
- Issue date Apr 12, 2005
- ASM America, Inc.
- Matthew G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SELF-CENTERING SUSCEPTOR RING ASSEMBLY
- Publication number 20220172980
- Publication date Jun 2, 2022
- ASM IP HOLDING B.V.
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-CENTERING SUSCEPTOR RING ASSEMBLY
- Publication number 20140338596
- Publication date Nov 20, 2014
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
- Publication number 20130239879
- Publication date Sep 19, 2013
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Application
THERMOCOUPLE ASSEMBLY WITH GUARDED THERMOCOUPLE JUNCTION
- Publication number 20130148693
- Publication date Jun 13, 2013
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- G01 - MEASURING TESTING
Information Patent Application
THERMOCOUPLE
- Publication number 20120310440
- Publication date Dec 6, 2012
- ASM AMERICA, INC
- Buz Darabnia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION APPARATUS HAVING MULTIPLE ADJUSTABLE EXHAUST PORTS
- Publication number 20120031340
- Publication date Feb 9, 2012
- ASM AMERICA, INC
- RAVINDER AGGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMOCOUPLE ASSEMBLY WITH GUARDED THERMOCOUPLE JUNCTION
- Publication number 20100282163
- Publication date Nov 11, 2010
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- G01 - MEASURING TESTING
Information Patent Application
Smart Temperature Measuring Device
- Publication number 20100286842
- Publication date Nov 11, 2010
- ASM AMERICA, INC
- Ravinder K. Aggarwal
- G05 - CONTROLLING REGULATING
Information Patent Application
Thermocouple
- Publication number 20100284438
- Publication date Nov 11, 2010
- ASM AMERICA, INC
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE REACTOR WITH ADJUSTABLE INJECTORS FOR MIXING GASES WITHIN...
- Publication number 20100255658
- Publication date Oct 7, 2010
- ASM AMERICA, INC
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER
- Publication number 20100190343
- Publication date Jul 29, 2010
- ASM AMERICA, INC
- Ravinder Aggarwal
- C30 - CRYSTAL GROWTH
Information Patent Application
THERMOCOUPLE
- Publication number 20100145547
- Publication date Jun 10, 2010
- ASM AMERICA, INC
- Buz Darabnia
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELF-CENTERING SUSCEPTOR RING ASSEMBLY
- Publication number 20100107973
- Publication date May 6, 2010
- ASM AMERICA, INC
- Ravinder Aggarwal
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...
- Publication number 20100089314
- Publication date Apr 15, 2010
- ASM AMERICA, INC
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUSCEPTOR RING
- Publication number 20100031884
- Publication date Feb 11, 2010
- ASM AMERICA, INC
- RAVINDER AGGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REDUNDANT TEMPERATURE SENSOR FOR SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20090159000
- Publication date Jun 25, 2009
- ASM AMERICA, INC
- Ravinder Aggarwal
- G01 - MEASURING TESTING
Information Patent Application
CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...
- Publication number 20090147819
- Publication date Jun 11, 2009
- ASM AMERICA, INC
- MATTHEW G. GOODMAN
- G01 - MEASURING TESTING
Information Patent Application
REACTION APPARATUS HAVING MULTIPLE ADJUSTABLE EXHAUST PORTS
- Publication number 20090110826
- Publication date Apr 30, 2009
- ASM AMERICA, INC
- RAVINDER AGGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR WITH SMALL LINEAR LAMPS FOR LOCALIZED HEAT CONTROL AND IMPR...
- Publication number 20090101633
- Publication date Apr 23, 2009
- ASM AMERICA, INC
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate handling chamber with movable substrate carrier loading p...
- Publication number 20080226428
- Publication date Sep 18, 2008
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Movable radiant heat sources
- Publication number 20080175571
- Publication date Jul 24, 2008
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor wafer cooling device
- Publication number 20070209593
- Publication date Sep 13, 2007
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing apparatus with multiple exhaust paths
- Publication number 20070207625
- Publication date Sep 6, 2007
- Ravinder Aggarwal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fabrication pathway integrated metrology device
- Publication number 20060154385
- Publication date Jul 13, 2006
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Load port with manual FOUP door opening mechanism
- Publication number 20060045663
- Publication date Mar 2, 2006
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support system for reduced autodoping and backside deposi...
- Publication number 20050193952
- Publication date Sep 8, 2005
- Matt G. Goodman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Slit valve for a semiconductor processing system
- Publication number 20050184270
- Publication date Aug 25, 2005
- Ravinder Aggarwal
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
Two-stage load for processing both sides of a wafer
- Publication number 20050176252
- Publication date Aug 11, 2005
- Matthew G. Goodman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor processing tool front end interface with sealing capa...
- Publication number 20050169730
- Publication date Aug 4, 2005
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Non-contact cool-down station for wafers
- Publication number 20050145180
- Publication date Jul 7, 2005
- Ravinder Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS

Ravinder Aggarwal

Person

Patents Grantslast 30 patents

Self-centering susceptor ring assembly

Reaction apparatus having multiple adjustable exhaust ports

Smart temperature measuring device

Thermocouple assembly with guarded thermocouple junction

Load lock having secondary isolation chamber

Self-centering susceptor ring assembly

Thermocouple

Substrate reactor with adjustable injectors for mixing gases within...

Load lock having secondary isolation chamber

Susceptor ring

Thermocouple assembly with guarded thermocouple junction

Thermocouple

Thermocouple

Substrate support system for reduced autodoping and backside deposi...

Reaction apparatus having multiple adjustable exhaust ports

Calibration of temperature control system for semiconductor process...

Redundant temperature sensor for semiconductor processing chambers

Movable radiant heat sources

Substrate support system for reduced autodoping and backside deposi...

Susceptor ring

Substrate handling chamber with movable substrate carrier loading p...

Wafer holder with peripheral lift ring

High temperature drop-off of a substrate

Slit valve for a semiconductor processing system

Non-contact cool-down station for wafers

Loadlock with integrated pre-clean chamber

Front opening unified pod

Slit valve for a semiconductor processing system

Non-contact cool-down station for wafers

Localized heating of substrates using optics

Patents Applicationslast 30 patents

SELF-CENTERING SUSCEPTOR RING ASSEMBLY

SELF-CENTERING SUSCEPTOR RING ASSEMBLY

LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

THERMOCOUPLE ASSEMBLY WITH GUARDED THERMOCOUPLE JUNCTION

THERMOCOUPLE

REACTION APPARATUS HAVING MULTIPLE ADJUSTABLE EXHAUST PORTS

THERMOCOUPLE ASSEMBLY WITH GUARDED THERMOCOUPLE JUNCTION

Smart Temperature Measuring Device

Thermocouple

SUBSTRATE REACTOR WITH ADJUSTABLE INJECTORS FOR MIXING GASES WITHIN...

LOAD LOCK HAVING SECONDARY ISOLATION CHAMBER

THERMOCOUPLE

SELF-CENTERING SUSCEPTOR RING ASSEMBLY

SUBSTRATE SUPPORT SYSTEM FOR REDUCED AUTODOPING AND BACKSIDE DEPOSI...

SUSCEPTOR RING

REDUNDANT TEMPERATURE SENSOR FOR SEMICONDUCTOR PROCESSING CHAMBERS

CALIBRATION OF TEMPERATURE CONTROL SYSTEM FOR SEMICONDUCTOR PROCESS...

REACTION APPARATUS HAVING MULTIPLE ADJUSTABLE EXHAUST PORTS

REACTOR WITH SMALL LINEAR LAMPS FOR LOCALIZED HEAT CONTROL AND IMPR...

Substrate handling chamber with movable substrate carrier loading p...

Movable radiant heat sources

Semiconductor wafer cooling device

Semiconductor processing apparatus with multiple exhaust paths

Fabrication pathway integrated metrology device

Load port with manual FOUP door opening mechanism

Substrate support system for reduced autodoping and backside deposi...

Slit valve for a semiconductor processing system

Two-stage load for processing both sides of a wafer

Semiconductor processing tool front end interface with sealing capa...

Non-contact cool-down station for wafers