Robert E. Tompkins

Person

Pleasant Valley, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Hybrid ceramic electrostatic clamp
- Patent number 6,754,062
- Issue date Jun 22, 2004
- Praxair S. T. Technology, Inc.
- Joseph Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Guard ring electrostatic chuck
- Patent number RE37580
- Issue date Mar 12, 2002
- Dorsey Gage Co., Inc.
- Michael Scott Barnes
- 361 - Electricity: electrical systems and devices
Information Patent Grant
Electrostatic chuck with reference electrode
- Patent number RE37541
- Issue date Feb 5, 2002
- Dorsey Gage Co., Inc.
- Michael Scott Barnes
- 361 - Electricity: electrical systems and devices
Information Patent Grant
Electrostatic chuck and method of manufacture
- Patent number 6,268,994
- Issue date Jul 31, 2001
- Dorsey Gage, Inc.
- Joseph Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck with ceramic pole protection
- Patent number 5,905,626
- Issue date May 18, 1999
- Dorsey Gage, Inc.
- Joseph Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck employing thermoelectric cooling
- Patent number 5,901,030
- Issue date May 4, 1999
- Dorsey Gage, Inc.
- Joseph Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Guard ring electrostatic chuck
- Patent number 5,612,851
- Issue date Mar 18, 1997
- International Business Machines Corporation
- Michael S. Barnes
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck with reference electrode
- Patent number 5,561,585
- Issue date Oct 1, 1996
- International Business Machines Corporation
- Michael S. Barnes
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method of making electrostatic chuck with oxide insulator
- Patent number 5,535,507
- Issue date Jul 16, 1996
- International Business Machines Corporation
- Michael S. Barnes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having relatively thick and thin areas and mean...
- Patent number 5,521,790
- Issue date May 28, 1996
- International Business Machines Corporation
- Raymond R. Ruckel
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck with reference electrode
- Patent number 5,467,249
- Issue date Nov 14, 1995
- International Business Machines Corporation
- Michael S. Barnes
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Guard ring electrostatic chuck
- Patent number 5,463,525
- Issue date Oct 31, 1995
- International Business Machines Corporation
- Michael S. Barnes
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Ceramic electrostatic chuck
- Patent number 5,191,506
- Issue date Mar 2, 1993
- International Business Machines Corporation
- Joseph S. Logan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature cycling ceramic electrostatic chuck
- Patent number 5,155,652
- Issue date Oct 13, 1992
- International Business Machines Corporation
- Joseph S. Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method for fabricating a split-ring electrostatic chuck
- Patent number 5,099,571
- Issue date Mar 31, 1992
- International Business Machines Corporation
- Joseph S. Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck having tapered electrodes
- Patent number 5,055,964
- Issue date Oct 8, 1991
- International Business Machines Corporation
- Joseph S. Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
Hybrid ceramic electrostatic clamp
- Publication number 20030165043
- Publication date Sep 4, 2003
- Joseph Logan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Robert E. Tompkins

Person

Patents Grantslast 30 patents

Hybrid ceramic electrostatic clamp

Guard ring electrostatic chuck

Electrostatic chuck with reference electrode

Electrostatic chuck and method of manufacture

Electrostatic chuck with ceramic pole protection

Electrostatic chuck employing thermoelectric cooling

Guard ring electrostatic chuck

Electrostatic chuck with reference electrode

Method of making electrostatic chuck with oxide insulator

Electrostatic chuck having relatively thick and thin areas and mean...

Electrostatic chuck with reference electrode

Guard ring electrostatic chuck

Ceramic electrostatic chuck

Temperature cycling ceramic electrostatic chuck

Method for fabricating a split-ring electrostatic chuck

Electrostatic chuck having tapered electrodes

Patents Applicationslast 30 patents

Hybrid ceramic electrostatic clamp